JPS62154427A - Improved piezoelectric switching device and manufacture of the same - Google Patents

Abstract

(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION TECHNICAL FIELD This invention relates to an improved piezoelectric ceramic switching device and a novel electrical system for controlling and using the device.

More particularly, the present invention provides improved piezoelectric ceramic switching devices and methods of making them, and the use of the improved elements as switching elements in electrical systems and for energizing the switching elements. The present invention relates to a novel electrical circuit in which portions of the electrical circuit are attached to and supported by the improved piezoelectric ceramic switching device itself.

Problems with the Prior Art In a typical electrical circuit, electrical relays and switches are placed at points in the circuit where electrical current is to be conducted or interrupted. Conventionally, electromagnetic solenoid driven switches and relays are used to open and close the contacts of a power switch or relay in response to a small control signal (low voltage, low current). The micro control signals open and close the contacts of a relatively large current rated switch, thereby controlling the circuit current provided through the switch contacts.

Relays and switches using piezoelectric actuators have many advantages over electromagnetic contact pairs such as those described above. For example, piezoelectrically actuated relays or switches require relatively low currents, yet require less current from electromagnetic actuators of the same rating. The piezoelectric drive switching device consumes only a small amount of current to open and close the contact pair compared to the piezoelectric drive switching device.Furthermore, the piezoelectric drive switching device is extremely lightweight and therefore occupies a small space, making it possible to reduce the weight of the circuit incorporating it. Moreover, the operating time of the piezoelectric drive switching device is extremely short.

Therefore, if a piezoelectric ceramic switching device is used, it is possible to perform high-speed switching operation in a small and lightweight device, and the advantages of low current consumption and low temperature rise can be exhibited.

Piezoelectric plate elements are formed by forming and firing various polycrystalline ceramic materials, such as barium titanate, lead zirconate titanate, lead metaniobate, etc., into a desired shape, such as a rectangular plate. Conductive surfaces, usually metallized electrodes, are arranged and formed on the surface of the plate, and these electrodes are used to apply a polarizing voltage to the ceramic plate in order to obtain the desired polarity of the piezoelectric ceramic through an initial poling process. It will be done. This polarization process consists of placing the ceramic plates in a high electric field applied between the metallized electrodes while maintaining the ceramic plates at a temperature somewhat below their Curie point, so that the plates are oriented in the same direction as the applied voltage. Then, upon cooling the plate and removing the initial polarization field,
The dipoles within the ceramic plate become perfectly aligned as a result of the initial polarization treatment and do not easily recover their pre-treatment arrangement, thus resulting in a condition known as permanent polarization. Such a ceramic plate becomes a permanent piezoelectric body,
As a result, a dipole alignment is permanently established and
Energy conversion can be performed between mechanical energy and electrical energy or vice versa. Regarding the piezoelectric effect, for example, Philips Gloirampenfabriken of Eindhogen, Kingdom of the Netherlands, published in 1924, 1
“Piezoelectric Effects in Ceramic Materials” edited by J. Pan Landerard and R.E.
Effect in CeraIIlic Mat
It is explained in relatively detail in a booklet entitled ``Erials''.

In piezoceramic materials, the axial directions of the electrical and mechanical dipoles are dominated by a unidirectional electric field for the initial polarization process. In preliminary or initial polarization, the ceramic plate element increases the degree of dipole orientation in the direction between the polarizing electrodes and decreases the degree of orientation in the direction parallel to the electrodes. When a relatively large DC energizing voltage having the same polarity as the polarization voltage is continuously applied between the polarization electrodes,
Furthermore, it expands in the polarization direction and contracts in the direction parallel to the electrodes. Conversely, when a DC energizing voltage of opposite polarity is applied between the electrodes of the plate element, the plate contracts in the direction of polarization and expands in the direction parallel to the electrodes. In either case, the piezoceramic plate element subsequently returns to its initial polarization direction when the applied energizing voltage is removed from the electrodes.

A variety of ceramic switching devices have been commercially available in various forms. A bimorph flexural piezoelectric ceramic switch is known as one relatively common structure, although it has not been the most popular structure in the past. This piezoelectric ceramic switch consists of two closely stacked piezoelectric plate elements each having conductive electrodes coated on their outer surfaces and a common conductive surface on their inner surfaces to form a bimorph flexure-type device. It is something to do. A well-known, commercially available bimorph flexural piezoelectric ceramic switch is described in an application note published in 1978 by the Piezoelectric Manufacturing Division of Gruton Industries, Inc., Fullerton, Calif., and Metchen, New Chassis, USA. There is. When one end of such a piezoceramic bimorph flexure element is clamped in a cantilevered manner, the flexure element can be activated in either polarity by applying an energizing potential to either of its outer electrodes that is lower than the initial polarization potential. It can flex in either direction from its unbiased neutral position. If a energizing potential of the appropriate value in either polarity is applied to only one of the piezoceramic plate elements in the flexure element, only the dipole orientation of that particular plate element will increase, resulting in shortening and Thickening occurs. In this case, since the two piezoelectric plate elements are physically bundled and integrated, the bimorph flexure element as a whole will flex. With appropriate design, this flexing action will result in the closing of the two switch contacts or other similar effects.

Prior art attempts at piezoelectrically driven switching devices have unfortunately resulted in devices with modest electrical and mechanical performance. In prior art bimorph flexural switching devices such as the one outlined above,
Has limited performance in contact force, contact separation, depolarization or dielectric depolarization, and reliability during use, as well as creep and temperature effects that accumulate over continued device use. This results in uncertain contact positions based on

One such prior art switching device using a piezoelectric flexible drive member is described, for example, in "Piezoelectric Apparatus and Circuits", July 18, 1939.
No. 2,166,7623 entitled Apparatus and C1rcuits). The piezoelectric flexural drive member described in this '763 patent consists of two adjacently held piezoelectric plate elements having electrodes as described above, one of which is directed from one of the piezoelectric plate elements in the same direction as the initial polarization field. At the same time, the other piezoelectric plate element is energized by applying an energizing potential in the opposite direction to the initial polarization electric field. As a result, the device of said U.S. patent shows that the long-term depolarization phenomenon of the piezoelectric plate element after a period of use is due to the dielectric depolarization effect due to repeatedly applied energization signals of unfavorable characteristics (out-of-phase and opposite polarity direction). This will occur in either or both. The adverse effect on dipole orientation in this manner would greatly limit the applied voltage distortion and the effective operating output obtainable by the device. Furthermore, the prior art device according to this patent is not intended to be overcome by the present invention. Similarly, disadvantageous features are also present in various prior art piezoelectrically actuated flexure switch or relay devices, such as the 1939 U.S. Patent No. 21823 dated May 5th
No. 40 (signal generation system), U.S. Patent No. 2203332 dated June 4, 1950 (piezoelectric bag uT), U.S. Patent No. 2227268 dated December 31, 1940 (piezoelectric device), U.S. Patent No. 26 dated December 26, 1944. 236573
No. 8 (Relay), U.S. Patent No. 27, August 2, 1955.
No. 14642 (High Speed Relay Comprising Electromechanical Energy Conversion Materials), U.S. Pat. No. 4093, June 6, 1978
No. 883 (piezoelectric multi-bimorph switch), 1983
It is described in U.S. Pat. No. 4,395,651 dated July 26, 1983 (low energy relay using piezoelectric flexure element) and U.S. Pat. . In addition to the conventional piezoelectric flexural switching devices disclosed in the above U.S. patents, McGraw-Hill, 1965
“Manual of Electromechanical Devices” by Douglas C. and Greenwood, published by Book Publishing Co., Ltd.
ctroa+echanical Lowevices) describes on page 64 a piezoelectric ceramic switching device substantially similar to the one described above.

The present invention has been made to overcome the drawbacks of piezoelectric ceramic actuated relays and switches known from the prior art as described above.

SUMMARY OF THE INVENTION Accordingly, the basic object of the present invention is to provide an improved piezoelectric ceramic switching device having a novel construction that is superior in general nature to prior art devices as described above.

Another object of the present invention is to provide a piezoelectric ceramic switching device for use with a piezoelectric ceramic switching device that is improved to operate reliably through long-term use involving a large number of switching operations. An object of the present invention is to provide a switching device energizing circuit with an extended lifespan.

Still another object of the present invention is to provide an improved piezoelectric ceramic switching device in which a number of elements employed in either switch energization or circuitry using this type of switching device are Support formation in the inactive, non-polarized portion of the switching element reduces the stray inductance of the circuit to a minimum value and facilitates miniaturization and batch processing.

Another object of the present invention is to support power switch contacts and to selectively control the current flowing therethrough by selectively opening and closing them, and to selectively control the current flowing therethrough, such as in gate turn-on devices such as SCRs, triacs or transistors. By providing a sufficient discharge current to the control gate of a turn-off type semiconductor power switch, it is possible to selectively conduct current when the semiconductor is turned on or cut off current when the semiconductor is turned off.

According to an embodiment of the invention, in a novel piezoelectric ceramic switching circuit and a flexible piezoelectric ceramic switching device, the latter (switching device) is physically and electrically coupled to both sides of at least one intermediate conductive surface. It consists of at least two initially polarized piezoelectric ceramic plate elements in the shape of a sandwich, with an outer conductive surface formed on the outer surface of each plate element. A piezoelectric ceramic switching device cooperates with a set of make and break electrical contacts (normally oven and normally closed contacts) to open and close these contacts, thereby closing or breaking a conductive path through the contacts. . Selectively operative electrical energizing circuit means are connected to the flexible piezoceramic switching elements, thereby applying a DC energizing electric field always in the same direction as an initial polarizing electric field to polarize each piezoelectric plate element. They are selectively energized by each of them. Naturally, the initial polarizing field already permanently induces in the piezoelectric plate element an increase in the orientation of the dipoles that is the basis of said energizing action, so that this selectively activates the make and break contacts. No depolarization of the piezoelectric plate element occurs through successive closing or opening switch operations. Further, continuous biasing of the flexure does not result in the disadvantage of contact opening as the charge within the flexure decreases.

Selectively operative electrical energizing circuit means is circuit connected to each of the initially polarized piezoelectric plate elements of the piezoceramic flexure switching device, thereby cooperating with each plate element to provide a respective set of electrical switch contacts. energizing circuit means for selectively opening and closing the switches to control the load current flowing between their contacts. Each switch energizing circuit means includes a flexure switching device that is passed between a flexure energizing voltage source, a user-operated normally open and power switch, a current limiting resistor, and a piezoelectric plate of the previous piezoelectric flexure switching device. A polarized diode rectifier circuit means is selectively connected to provide an energizing potential of the same polarity as the initial polarization potential used to polarize the device to extend its dipole orientation. The series electrical circuit thus constructed is connected across each one of the pre-polarized plate elements of the flexure switch such that when the normally open low power rated user switch is closed, Each initially polarized piezoelectric plate element of the flexural piezoelectric switch is selectively excited by a DC energizing electric field. This electric field is induced in each piezoelectric plate element and has the same polarity as the polarity of the already established dipole array.

Then, no depolarization or depolarization of the piezoelectric plate element occurs during continuous operation of the piezoelectric flexural switch device for opening and closing the electrical switch contacts for controlling the load current.

The improved piezoelectric ceramic switching element has two flat piezoelectric plate elements supported side by side in a sandwich on opposite sides of at least one intermediate conductive surface and an insulated outer conductive surface. It consists of at least one piezoelectric flexural switching device whose conductive surfaces are insulated from each other by the thickness of the element material to each piezoelectric plate 1. The flexible piezoelectric switching device further includes at least one set of electrical switch contacts that are opened or closed by the initially polarized flexible portion of the piezoelectric ceramic switching arrangement. The improved switching device further includes clamping means secured to different portions of the flexible piezoelectric ceramic switching device to mechanically support the pre-polarized movable flexible portion thereof. I'm here. The different parts of the piezoelectric ceramic plate element are non-polarized and electrically neutral parts which cantilever the flexible switching device in cooperation with the clamping means.

The different parts of the piezoelectric ceramic plate element placed under the clamping means are not only held non-polarized and electrically neutral, but also have the outer conductive surface coated on that part removed. . Further, at least one of the outer surfaces of the initially polarized movable portion of the flexible piezoelectric device is covered with an electrically insulating protective coating made of a polyimide siloxane copolymer.

In a preferred embodiment of the invention, said electrically insulating coating covers the flat outer conductive surface and the edges of the initially polarized flat piezoelectric ceramic plate element, and also covers the side edges of the piezoelectric ceramic plate element and their outer conductive surfaces and It covers the outer edge of an intermediate conductive surface sandwiched therebetween, at least in the initially polarized portion of the device. Furthermore, the insulating coating covering the flat outer conductive surface of the initially polarized portion of the piezoelectric ceramic plate element also covers the removed portion of any conductive surface of the piezoelectric ceramic plate element as well as the edge of the outer conductive surface exposed by the removal. It is.

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows a piezoelectric ceramic switching device constructed in accordance with the present invention. The switching device comprises at least one piezoelectric flexural switching device (11).
The device is formed of at least two flat piezoelectric plate elements, consisting of an upper plate (12) and a lower plate (13), as shown in FIG. 1A.A piezoceramic plate element ( 12) and (13)
) are arranged in a sandwich on both sides of at least one intermediate conductive surface (14), each with an outer conductive surface (15).
) and (16). These conductive surfaces are electrically insulated from each other and from the intermediate conductive surface (14) by the thickness of the intervening piezoceramic plate elements on each side. Piezoelectric ceramic plates (12) and (13)
) may be formed from lead zirconate titanate, lead metaniobate, barium titanate or other known piezoelectric ceramic materials, although naturally occurring piezoelectric materials such as quartz or the like may be used if desired. conductive surface (14),
(14A), (1413), (15) and (I6) consist of deposited layers of nickel, silver or other similar conductive material supported on plate elements (12) and (13).

The flexible piezoelectric switching device further includes at least one set of fixed electrical switch contacts (17) and (18).

These contact pairs are electrically opened and closed by the movement of the initially polarized movable flexible portion constituted by the piezoelectric ceramic plate elements (12A) and (13A) of the flexible switching device. Contacts (17) and (18) are connected to contacts (19) and (21) formed on the movable ends of the flexure devices (12A), (13A) in the manner detailed below with respect to Figures 1B, IE and IE, respectively. They cooperate with each other.

The movable flexible part of the piezoelectric ceramic switch device (11) (
12A) and (13A) are clamp means (22) and (2
3) is physically supported in a cantilevered manner.

These clamping means are piezoelectric ceramic plates (12
) and (13) together with the intermediate conductive surface (4) between them.

The clamping means (22) and (23) consist of two elongated substantially rigid bodies projecting beyond the opposite edges of the piezoelectric ceramic plate elements (12) and (13), as shown in more detail in Figure 1C. It is composed of e-edge bars (22) and (23). The fastening screw indicated by (24) is for clamping the two insulating bar members (22) and (23) together with the intervening ceramic plate elements (12) and (13) and the intermediate conductive surface (14). Other configurations for suitably clamping and holding the piezoceramic plate members (12) and (13) together will be apparent to those skilled in the art.

As best shown in FIG. 1A, the clamping means (22) and (23) are free of initial polarization in the piezoceramic plate elements (12) and (13) and are therefore non-polar and electrically neutral. (12B) and (13B
) is placed on top. These parts (12B), (13B
) are the initially polarized active movable deflecting portions (12A), (13A) of the plate elements to form the contacts (19) and (21).
) and has a remarkable symmetry. If so, the clamping means (22) and (23) are non-polarized portions (12).
B), in (13B), the initial polarization plate element portion (12A) and the activation movable deflection portion consisting of (13A>) are connected to the boundary portion and are arranged on the portion physically integrated therewith. It has been discovered that by mounting the piezoceramic plate elements in this manner, malfunctions due to vibrations of the piezoceramic plates at their support points are significantly reduced.

According to the flexible piezoelectric ceramic plate device shown in Figures 1 and 1A, after the device is assembled, the plate portions (12A) and (13A) are subjected to an initial polarization treatment as a unit, as shown in these figures. is possible. This is done by applying initial polarization potentials with the same polarity and appropriate values to the terminals (T3) and (T4), respectively, and at the same time applying the initial polarization potential to the terminals (T3) and (T4),
) is achieved by maintaining opposite polarity. At the same time, the temperature of the device is raised in an oven or other suitable device to a temperature slightly below the Curie temperature of the piezoceramic plate elements (12) and (13). The values of the target temperature and initial polarization potential of the device will vary depending on the particular piezoceramic material used to form the plate elements (12) and (13), as is known in the art of piezoelectric ceramic manufacturing. . If the polarization potential is high enough, polarization treatment at ambient temperature is also possible. During the polarization process, in order to separate the piezoelectric ceramic plate elements (12) and (13) into two separate polarized parts (12A) and (13A) and non-polarized parts (12B) and (13B), these It is necessary to electrically isolate the two parts so that no initial polarization potential is applied between the non-polar parts (12B) and (13B) and the common conductive surface 14). For this purpose, the outer conductive surfaces (15) and (16) each have a suitable gap (1) formed across their width.
5A) and (16A), which allows the terminal (T
3) or (T4) and the piezoelectric ceramic plate portion (12B) and (13
B) will not be applied between. Clamp bar (2
The parts of the piezoceramic plate elements arranged on the underside of 2) and (23) have their outer conductive surfaces removed, thereby adjoining the initial polarization plate parts (12A) and (13A) on the underside of the clamping means. and the integrated parts (12B) and (13B) are maintained in a non-polar and electrically neutral state.

As a result of manufacturing the switching device in this way, during operation of the flexible switching element, the energizing potential with respect to the terminal (Tc) is selectively applied to either the terminal (T3) or (T4), thereby causing polarization activation. The movable flexure plate portions (12A) or (13A) are flexibly driven to bring their contacts (19) or 21) into closed contact with the respective cooperating contacts (17) or (18). As briefly explained, the active moving parts (12A) and (13A) of the piezoelectric ceramic plate element
The initial polarization of the piezoceramic plates (13) and (14) permanently changes their physical dimensions with respect to the non-polarized portions (12B> and (13B)) of the piezoceramic plates (13) and (14). This change is permanently formed and the electrodes (15)-(14) and (16)-(
14) Increase the dimensions of the plate portions (12A) and (13A) between and parallel to the electrodes (i.e.
1A). As a result, when a DC voltage of the same polarity as the initial polarization voltage but smaller is applied as the energizing potential between the direct polarization electrodes, the plate element portion (1
2A) and (13A) further temporarily expand in the polarization direction and contract in the direction parallel to the electrodes. When the energizing DC potential is removed, this temporary expansion in the polarization direction and contraction in the direction of the electrode surface relaxes and the plate element portions (12A) and (13A) enter a permanent rest established only by the initial polarization voltage effect. Or it returns to a non-excited state. Therefore, the movable flexure brake I
- the element portions (12A) and (13A) return to their initial polarization dimensions, whereby the flexure element contacts the contacts from which the DC energizing voltage has been removed between the electrodes (T3)-(Tc) or (T4)iTc); <19) and (21) return to the neutral position in the rest open state.

As will be described later, the core feature of the present invention is that the piezoelectric ceramic flexible type is directly supported on the unused portions of the piezoelectric plate elements (step 2) and (step 3) of the flexible piezoelectric ceramic switching device (11>). As a result of this configuration, the stray inductance of the circuit is minimized by the length required for circuit connection conductors formed on such unused piezoceramic plate portions. is reduced to a local minimum value based on the
The formed biasing circuit is connected to each piezoelectric plate element portion (12A
) or (13A), respectively, by selectively applying a DC energizing potential. Their energizing potential always has a polarity in the same direction as the initial polarizing field permanently introduced in the piezoelectric plate element parts (12A) and (13A), so that the make and break contacts (L7), (19 > or (18), (21) can be prevented from depolarization or dielectric depolarization occurring in the piezoelectric ceramic plate element portion during continuous operation of the switch for closing or opening. The improved piezoelectric ceramic switching device according to the present invention, as shown in Figures 1 and 2A, can be operated as a normally open or normally closed switch without compromising the long term stability and reliability of the switch. This is explained next.

First, piezoelectric moramic plate portion (12A) and (1
plate portion (12A) as outlined above by keeping the outer conductive surfaces (15) and (16) on 3A) at a positive potential and the middle conductive surface (14) at a negative potential;
It is assumed that the initial polarization of (13A) and (13A) is performed.

The initial polarization of these plate elements results in a permanent increase in the direction between the polarizing electrodes and a permanent contraction in the direction parallel to the electrodes (i.e. plate portions (12A) and (13A) increase in thickness). (The length becomes shorter as well.) Because both plate element portions (12A) and (13A) are initially polarized at substantially the same time, this dimensional permanent change is due to the cooperative contact of the activated movable flexure member formed by plate portions (12A) and (13A). Intermediate positions with respect to (17) and (18) are not affected. However, if any off-centering occurs, by adjusting the magnitude of the initial polarization potential applied to either one or the other of the plate element portions (12A) or (13A>), the cooperative contacts (17>, ( 1
The flexure contacts (19), (21) between (8) can be adjusted for tight centering. In this easily applied adjustment method, the ability to precisely center the flexure elements contributes to the initial polarization of the flexure plate elements (12A) and (13A) together, and the This is an extremely important attribute in obtaining a flexure switch that operates accurately at a relatively low cost, as it requires few manufacturing and processing steps.
During operation of the switch, the DC energizing potential is applied to the terminal (T3).
or (T4), respectively, and this potential is always polarized in the same direction as the polarity of the initial polarization potential. If the initial polarization potential applied to the conductive surfaces (I5) and (16) is positive with respect to the potential of the intermediate conductive surface (14), the DC applied energization potential required to operate the switch will correspond to It will have polarity. That is, the DC energizing potential applied through either (T3) or (T4) will be a positive potential with respect to (Tc). This provides a reasonable polarity relationship if the flexural switch is designed for use with a PNP bipolar transistor or P-type FET transistor. If the switching circuit is to be used with NPN biholer transistors or N-type FET transistors, the polarity is reversed both with respect to the high voltage initial polarization potential and the later applied operating energization potential. This is a piezoelectric ceramic plate element (12A), (13A)
The aim is to ensure a reasonable dipole orientation broadening effect of the initial polarization part of . That is, a negative energizing potential is selectively applied to either the terminal (T3) or (T4), and a positive energizing potential is applied to the terminal (Tc).

As mentioned above, when applying a DC energizing potential of the same polarity that is smaller than the initial polarization potential during operation, one or the other of the plate element portions (12A) or (13A) may be thickened and Shortening occurs. The thickening and shortening of one side of this plate is the active deflection part (1
2A), (13A) are physically bent sufficiently to connect the contact (19) to its cooperative contact (17) (terminal (T3)
(when terminal (T4) is energized) or selectively closes the contact (21) to its cooperating contact (18) (when terminal (T4) is energized). The closed contact of the switch contacts thus achieved is maintained as long as a DC energizing potential is applied to each contact (T3) or (T4). This is possible for an infinite amount of time. Thus, with properly designed energizing and use circuits, the flexure type switching device (11) shown in Figures 1 and IA can be utilized as a normally open or normally closed switching device. This ability is the 3rd part of the switching device.
This is achieved based on two basic characteristics: Namely, the first is that the piezoelectric ceramic plate elements (12) and (13) are essentially high-quality capacitors that do not or almost never experience losses during charging (energization); 2. The loss that occurs during the entire energization period is directly and continuously converted or compensated for by the continuously applied energizing potential; and 3rd, the energizing potential is always applied to the piezoelectric ceramic plate element. Parts (12A) and (13
Since it is applied with the same polarity as the initial polarization potential used for the initial polarization and dipole arrangement in A), there is a long-term continuous depolarization or dielectric depolarization effect that makes the device operation unstable. This means that this does not occur.

Removing the DC energizing potential on either (T3) or (T4) activates the movable flexure portions (12A), (1
3A) returns to its deenergized and neutral position, and the closed set of contacts (17), (19) or 18), (21) opens. In this case, the initial polarization and associated operation is such that each outer conductive surface (14) remains negative while the intermediate conductive surface (14) remains negative.
15) and (16) through the terminals (T3) and (T4), it should be noted that this polarity relationship is for convenience of explanation. That is, the device can be similarly manufactured and operated by applying an initial polarization potential of negative polarity to the terminals (T3) and (T4) and maintaining the intermediate conductive surface (14) at a positive potential by means of the terminal (Tc). can be done. Upon initial polarization in this manner, the device naturally applies to terminals (T3) and (T4) only DC energizing signals of negative polarity with respect to the potential applied from terminal (T c ) to intermediate conductive surface (14). It must be operated by FIGS. 7B and 7C, which will be explained later, show this procedure.

Referring again to Figures 1 and IA, the activated movable deflecting portions (12A), (13A) which are initially polarized beyond the clamping portions of the piezoelectric ceramic plates (12) and (13) and the two projecting in the opposite direction There are two non-polarized piezoelectric plate element portions (12B) and (13B). These non-polarized plate element portions (12B) and (13B) have outer conductive surfaces as shown at (15B) and (16B), respectively, which conductive surfaces are connected to the polarized piezoceramic plate portions (12A) and (16B). 13A) from the conductive surfaces (15) and (16>) respectively.
) formed at the bottom of the gap (15A) and (16A
). These outer conductive surfaces (15B
), (16B) further forms a relatively large capacitance (ie 1 μF) capacitor with the intermediate conductive surface (14).

In the embodiment of the invention shown in FIG. 1A, a conductive surface (1
4) piezoelectric ceramic plate elements (12) and (13)
), thereby providing a continuous intermediate conductive path (14) between the movable flexible portions (12A) of the device;
(13A) and the other end connected to the common terminal (Tc). If required in a particular circuit design, the conductive paths formed through the intermediate conductive surface (14) can be interrupted along a transverse line or at multiple points through the clamping bars (22) and (23), and their interruption The part includes non-polarized plate parts (12B) and (13B).
The intermediate conductive surface (14) is yellowed with a suitable insulating adhesive for electrical isolation. The same is true for electrically isolating the intermediate conductive surface between the initially polarized plate portions (12A) and (13^) with respect to the intermediate conductive surface between the non-polarized portions (12B) and (13B). In either configuration, the non-polarized plate portion (12
B) and (13B) form two capacitors that can be connected in series or in parallel via an intermediate conductive surface 14) and a terminal (Tc) between them. By appropriate design and manufacture of the outer conductive surfaces (15B) and (16B), the capacitor thus formed can have the capacitance required for a particular circuit design.The dimensions and capacitance value of the capacitor can be For example, up to a capacitance of approximately 1/10 μF is approximately 2.54 cm (lin) wide and approximately 7.62 cm (3 lin) long.
In) the flexible member has a very thin conductive surface with a thickness of 7
．． The piezoelectric ceramic plate element of 6 to 25.4 bites (3 to 10 m1n) is provided by the switching device configured in the above-mentioned model M. If capacitors of various sizes are required in a particular circuit configuration, the outer conductive surface (1'5B) or (16B) can be divided appropriately to provide the desired number and size of capacitors. They can be formed. A number of capacitors formed in this way can share an intermediate conductive surface (14) as a common electrode via a terminal (T c ).

In addition to forming capacitors as outlined above, non-polarized piezoelectric ceramic plate element portions (12B) or (13B)
) may physically form and support various other electrical circuit elements consisting of active semiconductor devices or passive circuit elements, such as stand-alone, hybrid or monolithic integrated circuits, etc.; Conductive surface (1
5B) and (16B) can be formed to provide conductive paths that connect the various elements described above to each other to achieve the desired circuit relationships. The aspect is, for example, 1968
Microelectronics, a technical book edited by Max Horshir, published by the Research and Education Association in 1969, and Handbook of Electronics, edited by Charles A. Hopper, published by McGraw-Hill Books in 1969.
It is well-known in ``Handbook of Component Electronics'', edited by Charles A. Hopper and published by McGraw-Hill Books in 1977.

In FIG. 1A, relatively large hybrid integrated resistors (25) and (26) are shown. These resistive surfaces each have a non-polarized neutral piezoceramic plate section (1
2B) and (13B), respectively conductive surface portions (15B) and (
16B) Formed by surface coating, adhesion, printing, etc. so as to be supported on the surface. This structure results in two series connected resistor and capacitor elements, which are connected between terminals (Tl)-(Tc), (T2)-(Tc).
nces). The total capacity of this snubber circuit can be doubled by connecting two snubber capacitors in parallel.

FIG. 1B is a schematic circuit diagram of the novel piezoelectric ceramic switching device and associated energization circuitry illustrated in FIGS. 1 and IA. In Figure 1B, terminals (T1) and (T2)
is connected to an AC power supply or a DC power supply of proper polarity.

The terminal (T1) connects to the contact (17) via the intermediate conductive surface (14).
) and (19), and is connected to the common terminal (Tc) through the switch (Sl) formed by (19). The terminals (T2) have the same (cooperating contacts (18) and (
21) and is connected to the common terminal (Tc) through the switch (S2) formed by the common terminal (Tc). Resistors connected in series (25)
A snubber circuit formed by a resistor (26) and a capacitor (CI2B) is connected in parallel with the switch (Sl), and a snubber circuit formed by a series resistor (26) and a capacitor (C13B) is connected in parallel with the switch (S2). Snubber circuit (R25”), (CI2B) and (R26), (C
13D), when each contact forming the switch opens to interrupt the current, the voltage between the contacts (17>, (19) or (
This prevents arcs from occurring between 18) and (21). The snubber circuit formed in this way serves as a dV/dt protection circuit for the switch (Sl) and (S2) contacts, prolonging their operating life and reducing electrical noise. This reduces the occurrence of

The user-operated energizing circuit means selectively switches (Sl)
and (S2) are opened and closed, respectively. The energizing circuit consists of a normally open user-operated switch (27) and a current limiting resistor (28).
) and the initial polarization portion (12) of the piezoelectric ceramic switching device (11) via diode rectifier circuit means (29).
A) or (13A) includes a negative polarity DC power supply or AC power supply connected in series. The positive terminal of this DC power supply or the other terminal of the AC power supply is led to a common intermediate conductive surface (14) via a common terminal (Tc). In a preferred embodiment, the normally open user operated switch (27) is electrically or mechanically connected to the normally closed switch (31). This switch is connected in series with a current limiting resistor (32) and in parallel with initially polarized upper and lower piezoelectric ceramic plate elements (12A) and (13A), shown as capacitors (C12A) and (C13A), respectively. Motoko (2
7) to (32), their specific shapes are not shown in FIG. 1 and FIG. 1A in order to avoid making the drawings too complicated.
and piezoelectric ceramic switching device (
11) will be obvious to those skilled in the art in light of the spirit of the present invention.

In actual operation, the normally closed contacts (31) keep the upper and lower initially polarized piezoceramic plate elements (12A) and (13A) in a non-charging state, thereby causing the flexure device (11) to switch (Sl). or S2), a neutral position is maintained in which neither of them is closed. For example, if a switch (Sl) consisting of contacts (17) and (19) is required to be closed in order to supply current to a load device controlled by the switch (Sl),
The user operated switch contact (27) is closed. This is a current limiting resistor (28) and a diode rectifier circuit means (29)
The upper piezoelectric ceramic plate element (12A) will be charged via the power supply connected across the energizing circuit input terminal and the common terminal (Tc). As a result of this action,
The normally closed contact (31) automatically opens to charge the piezoelectric ceramic plate element (12A), thereby physically deforming it as mentioned in the introduction, and causing the contact (19) to become a cooperative switch. A load current is supplied to a load (not shown) by closing the contact (17). After the desired period has elapsed, depending on the user's selection, the load current being supplied via the contacts (17), (19) of the switch (Sl) is simply turned off normally by opening the normally open switch contact (27). It can be cut off by automatically closing the closing contact (31) and discharging the piezoelectric ceramic plate element (12A). This de-energizes the top plate element (12) and returns the flexure device (11) to its normally inactive neutral position, thereby not closing either the switch contacts (Sl) or S2). becomes. Contact (1
The device operation for opening the switch (S2) consisting of 8) and (21) is also similar to the operation described for the switch (Sl), and therefore further explanation is omitted.

In addition, an initially polarized movable flexure plate section (12A
) and <13A) can be achieved by reversing the connection polarity of the diode rectifier (29) and will be used in the actual circuit as required. In addition, as a modification of the circuit shown in Figure 1B, a normally closed contact (
31) or change the value of resistor (32) to resistor (2).
8) may be increased to about 10 times.

One of the problems encountered with flexible piezoelectric ceramic switching devices having a general form similar to that shown in Figures 1 and IA is that the movable flexible member (12A ), (13A) tend to curve during continuous energization. As a result of this tendency of the free end to curve during energization, the effective contact surface area is reduced, the degree of heating is increased, the contact closing force is reduced, and the contact spacing and contact closing timing are reduced. cannot be precisely controlled, thus reducing the stability and reliability of device operation.

To avoid such problems, the present invention is designed to reduce the width of the free end of each initially polarized movable deflecting portion of the upper and lower piezoelectric ceramic plate elements (12) and (13), as shown in Figures 1 and IA. This uses a relatively thin rigid member (35) that is supported across the bending direction.By using such a rigid member (35), the mass of the free end in the flexible portion is made uniform, and a resultant force is generated. It maintains the straightness and prevents any bending during the changeover that would not affect the operation of the switching device 1 (11). With a suitable design, the mass of the rigid member (35) can be adjusted as desired. The total deflection motion is set to approximate mechanical resonance during the movement of the deflection portion of the device.

Figures 1D, IE and 12 illustrate the preferred procedure for manufacturing electrical contacts (19) and (21) supported at the free ends of each piezoelectric ceramic flexure plate section (12A) and (13A). As best shown in Figure 1D, the intermediate conductive surface (14) at the free end of the flexure has a longitudinally formed slit (14) in its extension or protrusion.
Both halves (14A) separated by 4c), <148)
It consists of a foil body with As shown in Figure 1E,
Both hands (14A) and (148) of the conductor foil are bent upward and downward, respectively, to form upper and lower piezoelectric ceramic plate element portions (12A) and (13A), respectively.
) covers approximately half the length of the exposed upper and lower surfaces of each rigid member (35) held at the tip of the rigid body member (35). Conductor foil parts (14A) and (148) bent in this way
is now attached to the rigid member (35
) extends along the entire length of the outer upper and lower surfaces of the rigid member, thereby providing gravitational balance for the flexure element, and as shown in FIGS. Type rivet (19) or
21> on the rigid member (35). Each conductor foil half (14A) and (148) and their extensions with said flat head rivets (19) and (21) provide a good conductive connection to the intermediate conductive surface (14), so that these flexible contacts The pressure due to supplying a relatively large load current through is reduced without causing excessively damped oscillations of the movable flexure plate elements (12A), (13A), thus reducing the problems involved at the fixed ends of the flexure members. do.

FIG. 2 is a partial elevation view of a second embodiment of an improved piezoelectric ceramic switching device constructed in accordance with the present invention. In FIG. 2, a piezoelectric ceramic switching device (11>) having the configuration described with respect to FIG. 1 is supported on an insulating base member (41). Part (13A
) and (12A) on the movable free end of the movable contact (1
9) and (21) are fixed contact terminals (T5), (T6) mounted on an insulating base member (41) in adjacent switching relation to each other and a mirror-image base member (
Terminal (T5) installed on 41'> (not shown)
, (T6'), respectively. The insulating base member (41) has a number of conductive paths formed on its exposed surface in a manner well known in the art to support various elements of an electrical control circuit, including an active power semiconductor device (42), as shown in FIG. 2A. They are interconnected. The active power semiconductor device (42) uses a power triac, such as one manufactured and sold by General Electric Company of the United States, and is supported on the extended support surface of the base member (41). moreover,
On this base member is supported a semiconductor device (42) as well as the conductive paths necessary to connect this device (42) to several elements in the circuit, as shown in FIG. 2A.

The piezoelectric ceramic switching device (11) of FIG.
) has been removed, contacts (19) and (21)
is the same as shown and described with respect to FIGS. 1 and 1A, except that is electrically isolated from the conductive surface (14). In FIG. 2, only the lower part of the complete switching device is shown, since the upper part of the device is a mirror image of the lower part and has therefore been omitted. 2nd including power triac (42)
The circuit in Figure A is controlled by the lower contact (21) of the flexural switching device (11), and a similar circuit (not shown) is shown in Figure 2 driven through the upper contact (19) of the flexural switching device. Controlled by mirror image parts of the structure. The following description relates only to the lower part of the illustrated structure, but the upper part is constructed and operates similarly.

In the circuit of FIG. 2A, the contacts (T5) and (T6) closed by the movable contact (21) in the lower part of the piezoceramic flexural switching device (11) are the terminals (T1
) and (Tc) to configure a load current control switch (S3) that connects an electric load (not shown) to an AC power source. The circuit of FIG.
) A new auxiliary rectifier circuit is constructed in which the circuit is cut off with the aid of the following. This power triac (42
) is a switch (
S3) is connected in parallel. The triac (42) and fuse (43) have a resistor (R25) formed and fitted as described with respect to Figures 1 and IA.
and a DC circuit of a capacitor (C1213) and a resistor (
Two snubber circuits formed from a series circuit consisting of a capacitor (R25) and a capacitor (C13B) are connected in parallel. The upper and lower polarized movable flexure plate elements (12A) and (13A), designated as capacitors (C12A) and (C13A), are connected to those shown in FIG. 1B via terminals (T3) and (T4), respectively. Similarly, an energizing potential is applied through each energizing circuit including user-operated switches (27) and (31) (not shown).

In circuit operation, a suitable gate signal source (not shown)
is provided, which is supplied via a switch (S3) with a gating signal to the triac (42) at the desired phase point of the alternating current to be supplied to the load. At this gate energization point, the triac (42) turns on and conducts the load current only for a short period of time until the flexural switch (11) closes the contact (S3). Under these conditions (S3), the closing of the switch contact does not substantially generate an arc because the potential applied to the switch during closing is substantially reduced based on the conduction of the triac (42). It can be achieved without any problem. After the closing of the physical switch contact (S3) by the piezoceramic switching device (11), the conduction of the triac (42) causes the operating current to flow through the closed contact terminals (T5) and (T6) of the switch (S3). The termination is based on the shunt effect of the triac (
The turn-on signal to 42) is now removed. next,
The supply of load current through the closed flexure switch (S3) is applied to the energizing potential via the energizing signal input terminal (T4) to the lower piezoelectric ceramic plate element (13A) as described with respect to the embodiment of FIG. By continuing to maintain
It can be maintained according to the user's request.

When attempting to interrupt the current through contacts (T5) and (T6) of the flexible switch (S3), use a piezoelectric ceramic flexible switch device fl! At some point in the operating cycle of the AC power supply prior to the de-energization of triac (11), triac (42) is gated on again by a gate signal source (not shown). As a result, when the contacts of the switch (S3) begin to open, current flows from the current path of the contacts (T5) and (T6) into the circuit formed by the triac (42) which has become conductive.

Such partially open contacts (T5), (T6) and (21
), the triac (42〉) rectifies off (opens) the flexure switch contacts (T5), (T6) in conditions where there is little or no arc present.
It is intended to assist. The triac itself is then shut off by removing the turn-on signal from its gate at or before the next current zero point of the load current source. The interruption of the triac (42) at this point is:
A snubber circuit (R25), (C1
2B), (1126), and (CI3B). This avoids unexpected turn-on and reconduction of the triac due to sudden increases in the triac voltage. Therefore, the structure of Figure 2 provides a fast and reliable synchronous differential relay, which Based on large current surges in the power semiconductor device (42) during short-term operation (allowing a significant increase in current rating), the piezoelectric ceramic flexure switch device (11) is further activated by a flexure-operated switch for load current control (T5). It will be appreciated that the still low conduction resistance of )l:21)-(T6) allows effective operation without substantial heating at its load current conduction conditions.

Additionally, this novel switching circuit eliminates the large size, heavy weight, slow and variable response, and high heat generation characteristic of traditional conventional electromagnetic relay structures, and eliminates the average heat generation associated with such structures. The stray inductance is substantially reduced to an absolute minimum due to the short electrical connections formed in the switching element itself. lastly,
It will be appreciated that polyphase circuit structures as well as switch structures such as single pole double throw-neutral off systems may be implemented in the form shown in phantom in FIG.

FIG. 4 shows another embodiment of the present invention using a low voltage energization source. The embodiment of the invention shown in FIG.
) is constructed and operates in substantially the same manner as the embodiments shown in FIGS. 1 and 1A, except that a voltage doubler circuit is formed above. In FIG. 4, an active semiconductor device consisting of a set of surface-supported semiconductor diodes (DI> and (D2>) has conductive surface portions (15B') and (15B''), respectively.
and (16B'), supported on (16B-). Each conductive surface (15B) and (16B) is divided into two parts (15B') and (15B) by an appropriate insulation gap within each surface.
B-) and (16B'), <16B''), and the non-polarized piezoelectric ceramic plate (1
2B> and (13B), respectively. Furthermore, an insulating portion (gap filled with adhesive) as shown in (20) is formed on the intermediate conductive surface (14). Gap (2
0) is a piezoelectric ceramic plate element (12) and (13)
) electrically separates and insulates the conductive surface (14) inside the initial polarized portions (12A) and (13A) from the conductive surface portion inside the non-polarized portions (12B) and (13B). . The devices thus formed are connected together by wired insulated conductors in the manner shown in FIG. 4 to form an electrical circuit as schematically shown in FIG. 48. This circuit configuration, which differs somewhat from the circuit of FIG. 4A or 4C, is
It can also be formed in a similar manner by using discontinuous hard-wired wiring or printed circuits as already mentioned. Each of the circuits shown in Figures 4A, 48 and 40 is adapted to double the value of the AC voltage at their output terminal (T3) or (T4) respectively as the activation circuit input for the flexural switching device (11). This is a well-known classic diode type voltage doubler circuit. Thus, the piezoelectric ceramic switching device (1) shown in FIG.
1) is the so-called 115 volt (AC) power supply for household use.
If the device can only operate in the United States), this fourth
The switching device shown in FIG.
) are employed to double the energizing potential applied to the load current control switch contacts (17), (19) and (18), (21), as already mentioned with respect to Figures 1 and IA.
can be selectively opened and closed. In other respects, the apparatus is constructed and operable similarly to the switching apparatus shown in FIGS. 1 and 1A.

FIG. 5 shows a further embodiment of the invention formed according to the technical and structural features described in connection with FIGS. 1-4, and FIG. 5A shows a non-polarizable and electrically neutral piezoelectric ceramic Figure 3 shows a schematic diagram of the energizing potential drive circuit formed on the plates (12B) and <13B). In FIG. 5 (and FIG. 6), the clamping means (22
) and (23) are omitted to simplify the figure, but
Gap (1) in outer conductive surfaces (15) and (16)
5A), (16A) are clearly shown. FIG. 5 specifically illustrates a printed circuit designed to form the voltage tripler circuit shown schematically in FIG. 5A. That is, according to this circuit, a relatively low voltage alternating current is converted into a direct current voltage having three times the effective value of that voltage, and this is used as the energizing potential for driving the deflecting plates of the initially polarized piezoceramic flexures. Plate part (12A) and (13A
') is applied.

Fig. 6 is imagined to be the same as Fig. 5, but a voltage quadrupling circuit as schematically shown in Fig. 6A is formed on each outer surface of the non-polarized neutral piezoelectric ceramic plate portions (12B) and (13B). A piezoelectric ceramic switching device (11) is shown. The voltage quadrupling circuit of FIG. 6A and the voltage tripling circuit of FIG. 5A have well-known structures and operations, and therefore further explanation will be omitted. However, the capacitors shown in these electrical circuit diagrams are
As shown in the figure, the diodes (Dl), (D2), etc. supported on these capacitors are given corresponding suffix numbers C1), (C2), etc. In the apparatus of FIGS. 5 and 6, the manner in which the islands of conductive surfaces (15B) are formed on the non-polarized neutral piezoelectric ceramic plate portions (12B) and (13B) is the same as that described with respect to FIG. A well-known photoresist film processing method or etching technique is employed. In this way the fifth
Capacitor neutral electrode of desired size (15B
1), (15B2) and (1583) and the capacitor neutral electrode <15Bl), ku15B2), (1
583) and (1584) are formed with appropriately sized connecting conductors spanning between these several electrodes. Semiconductor diodes (Dl)-(D3) in FIG. 5 or Dl-(D4) in FIG. 6 are supported on each metallized electrode surface.

In embodying the configurations shown in FIGS. 5 and 6, soldering, ultrasonic bonding techniques or a suitable conductive surface adhesive,
By using other metallized electrodes (15B1), (
Semiconductor diode devices are individually employed for direct support on conductive surfaces such as 15B2). These manufacturing steps are carried out after activation of the piezoceramic flexure-type device and said initial polarization of the initially polarized moving parts (12A), (13A), in order to prevent possible damage to the element due to high initial polarization potentials. be. Selectively capacitor electrode area (
I5) and diodes (Dl) to (D3) or (Dl
) to (D4) can also be formed by suitable integrated circuit technology. For example, "Microelectronics" by Max Hozil, published by Research Education Associates, New York, NY in 1968, discloses such integrated circuit technology. Of course, FIG. 1 of the present invention already described,
Similar techniques can be used in forming the corresponding capacitor electrodes and conductors used in the embodiments of Figures IA and 2.

7 and 7A, the piezoceramic flexural switching device (11) selectively closes the circuit via the switch contact (19) or the switch contact (21), thereby converting the triac (42) shown in FIG. 7A. , (42') or a corresponding gate-controlled power switch, such as an SCR or power transistor, with a gate signal current provided to the control gate of the gate-controlled power switch.

The conductors formed off the inner conductive surface (14) of the flexible switching device (11) are
The non-polarized portion (12
B) and (13B) provide electrical connections to current resistors (25) and (26) formed on them. Current limiting resistors (25) and (26) are connected to the triax device (42) associated with each energized switch contact (19) and (21) via piezoelectric ceramic flexure switch contacts (19) and (21), respectively. Connected to I11 control gate.

In circuit operation, turn-on of either one or the other of the gated power switching devices (42) energizes the appropriately initially polarized piezoceramic plate element of the switch device (11) and turns on its associated power triac (42). This is achieved by closing the gate input terminal. Here, the charge stored in the initially polarized piezoceramic plate element is released into the gate of the triac,
Applying an appropriate turn-on current to the tractor turns it on and energizes it. When either triac (42) or (42゛) turns on, the load <51
) or (52) is supplied with AC load current via the power triac switch (42) or (42') which is turned on. In addition, the turn-off of the triac power switch (42) at the time of conduction is caused by the initially polarized piezoelectric ceramic plate portion (
This is achieved by simply de-energizing either part (12A) or (13A)) at a reasonable point during the cycle of the alternating current. If desired, a suitable snubber circuit, such as that described with respect to FIG. It helps with insulation resistance. .

Suitable arrangements supporting the switching device (11) in FIG. 7 are as already described with respect to FIG.

FIG. 7B is a diagram showing a modification of the gate configuration of a power circuit using a novel piezoelectric ceramic flexure switch (11) constructed according to the present invention.
gate-controlled power semiconductors such as SCRs, power transistors or triacs (42) in which the electrical energy stored in the piezoelectric ceramic plate element of ) supplies the load current to the load (51) or (52) shown in the figure. Used as a gate current source for type switches.

The circuit configuration of FIG. 7B uses a gate-controlled power semiconductor switch that must provide a turn-on gate current of positive polarity with respect to the polarity of the cathode. In this configuration, the energizing circuit is configured by a rectifier (29P) having an anode connected to the positive terminal of the DC power source or one terminal of the AC power source. diode(
The cathode of 29P) is connected to the normally closed contact of either the normally open user switch (27A) or (27B) via the current limiting resistor (28), and this switch is a flexible mounting! (1
1) Initial polarization movable piezoelectric ceramic plate element (1
2A) or (13A) outer conductive surface (15) or (
16). Outer conductive surface (15) or (16)
is not energized at all times, and the normally closed switch (31A) or (
31B) is connected to the negative terminal of the DC power supply or one terminal of the AC power supply by a normally closed contact in either one of the terminals 31B). The two switch sets consisting of switches (27) and (31) are electrically or mechanically interconnected and (2
If either 7) or 31 opens, the other closes. The flexural drive contacts (19) and (21) at the free end of the device (11) each close onto a cooperative contact and connect via either a current limiting resistor (25) or (26) to a gate-controlled power semiconductor switch device. 5 (42') or (42), thereby energizing the load (51> or (52)).

In circuit operation, if the user uses, for example, a normally closed contact (27A)
When closed, the piezoceramic plate element (12A) of the flexural switching device (11) is charged via the closed contacts of the rectifier (29P), the current limiting resistor (28) and the normally open switch (27A). The normally closed switch (31A) opens automatically, which causes the plate element (12A) to
charging becomes possible. By sufficiently charging the plate element (12A), the deflection device (11) is displaced and the contact (
19) is closed on its cooperative contact, and from there a resistor (25
) to the gate of the gate-controlled power switch (42'), sufficient electrical energy is stored in the piezoceramic plate element (12A) within the required short time. This allows the gate-controlled power switching device f! Sufficient gate current is supplied to turn on (42'). This gate turn-on current is applied to the outer conductive surface (12A) of the piezoelectric ceramic plate element (12A).
5), a contact (19) formed with a contact surface connected in an opposite direction to the inner conductive surface (14);
Supplied via. Modifications of contacts (19) and (21) to provide such a connection are provided in Sections 1B, IE and I.
This can be clearly understood from the aspect shown in Figure F. The gate turn-on current thus supplied to the gate of the power switch (42') properly gates on this semiconductor power switch (42') and the user-operated switch (27A) is closed on the corresponding contact. The gate-controlled power semiconductor switch device (42°) maintains its conductive state as long as the load (51) remains conductive.
The load current is supplied through the The piezoelectric ceramic plate element (12A) of the flexural switching device (11) has a rectifier (29P), a current limiting resistor (28) and a normally open switch (
27A) through the closed contacts. The normally open switch (31A) opens automatically, thereby allowing charging of the plate element (12A). Load (52)
The other gate-controlled power switch (42
) to return the normally open switch (27A) which energizes the piezoelectric ceramic plate element (12A) to its normally open position and energizes the piezoelectric ceramic plate element (13A). the other normally open switch (27B) is closed, thereby turning on the gate-controlled power switch (42);
The result is that the load current is supplied to the load (52) in the same manner as described for the load (51).

FIG. 7C shows a flexible switch device (11) connected with reverse polarity to provide a negative polarity gate turn-off signal to the control gate of a gate-controlled semiconductor power switch (42) in certain types. It is.

That is, the semiconductor power switch (42') in this case
Or (42) is designed to turn off the load current passing through either load (51) or (52) by having its gate supplied with a turn-off signal of negative polarity. For certain types of equipment, 2
For example, one of the two independent energizing (deenergizing) circuits is configured to supply a positive gate turn-on signal for turn-on as shown in FIG. 7B, and the other circuit is configured as shown in FIG. 7C. It is possible to provide a gate turn-off signal having a negative polarity to turn off the load current.

Figures 8, 8A, 8B, and 9 all use two separate intermediate conductive surfaces (14U) and (14L) instead of the single intermediate conductive surface described above. This shows yet another embodiment of the invention.

In Figure 8, there are two intermediate conductive surfaces (14U) and (14U).
L) is a piezoelectric ceramic plate element (12) and (13)
) are formed on the faces of both their initial polarized portions (12^) and (13A) and non-polarized neutral portions throughout the entire length. Initial polarization part (12A) and (13A)
The full width of the intermediate conductive surface (140) is folded upwards to form contacts (19) and (21) on the movable ends of the flexible member (12A) in the manner already described with respect to Figures 1B, IE and IE. ) is held across the upper surface of the free end of the rigid member (
35). The basic difference with the embodiment shown in FIGS. 1 to 7 is that the single intermediate conductive surface (14) in FIG. 1 is cut into two halves by slits (14A) and (148 ), one of which is bent upward and the other downward, whereas in the embodiment of FIGS. 8 and 9 the intermediate conductive surfaces (140) and (14L) are bent in such a manner. The entire width of the single protrusion (14 UA) is bent onto the insulating rigid member (35) and retained by the central flat head rivet (19) as shown. It is. In the case of the lower conductive surface (14L), on the contrary, the entire width of the protrusion (14L) is bent downward,
It is stacked on the insulating rigid member (35) and similarly held by flat head rivets (21).

The two intermediate conductive surfaces (14U) and (14L) are firmly held on all inner surfaces of the piezoelectric ceramic plate element members (12) and (13), with a thin adhesive layer (61) between them. interposed, and the deflection device (11) as a whole
It forms the In a preferred form of the FIG. 8 embodiment of the invention, the adhesive layer (61) is insulating;
Therefore, each inner conductive surface (140) and (14L) is a deflection switch device (11) that causes deflection in one direction.
) can be maintained at different potentials during energization. In other configurations, two plate elements 1
Conductive adhesive (61
), which allows the inner conductive surface (14U) and (1
4L) can also be maintained at equal potential. To this end, the adhesive used during any of the embodiments of the present invention can be used at the high temperatures required during the initial polarization process as described above or during the attachment of a vacuum enclosure for atmospheric protection (baking). Typical adhesives for all embodiments of the invention include, for example, GEMID (
Imide ether, PIQ (polyimide indroquine syrian-dion) PEK (polyethyl ketone) ULTI
Examples include M (polynidoxylene) and ULTEM (polyetherimide). Normally, these adhesives are insulating, but if microscopic conductive particles are added to these adhesive layers (61), the two intermediate conductive surfaces (14U) and (14
L) can be a conductive adhesive layer in cases where it is required to maintain the same potential during operation. However, the adhesive layer (61) is virtually porous (pinhole-free) and has a conductive surface (1) on the back of the flexible member.
It is important to provide sufficient assistance in connecting 4U) and (14L).

Once the known flexible piezoelectric ceramics, such as those already listed in the present invention, have been precisely shaped and fired,
It has a sufficiently high density to provide a long operating life. The present invention provides a relatively long creep path to avoid surface failure through the use of selectively formed electrodes and the use of various inert protective coatings and adhesives as previously described. The present invention seeks to extend the operational life of piezoelectric ceramic flexure members such as the following. The embodiment of the invention shown in FIG.
A) and (13A) with an inert protective coating (62
). This inert protective coating (62)
is comprised of a polyimide siloxane copolymer and forms an extremely thin, non-porous, uniform, inert protective coating that is flexible enough to allow movement of the flexure device without undesirable vibration damping effects. Non-polarized clamp part (1
selectively initial polarizing the flexure member to provide separate and independent movable polarized flexure portions (12A) and (13A) from 8A;
As shown most clearly in FIG. 8B, the initial polarized piezoceramic plate element (12A
), (13A), folding back from the side edges and forming recesses abutting suitably formed conductive surfaces (140), (14L), (15) and (16), and activation of the flexural elements. Providing a non-porous protective surface that surrounds the entire area and is not affected by the sharp deflection effects that occur at the clamped end of the piezoelectric ceramic flexure element improves stability, operational repeatability, and repeatability in piezoelectric ceramic flexure switching devices. and dielectric strength and are the most important items for providing a favorable operating life. These features further permit initial polarization potentials as high as were possible in already known flexural switching devices. This allows the piezoelectric ceramic flexural switching device to handle higher power than conventional devices of the same size.

Referring to FIG. 8D, a plurality of curves A-D illustrate the characteristics of various piezoceramic flexure-type devices. 8th D
The figure shows the deflection force generated by the deflection device on the vertical axis and time on the horizontal axis. Curve A shows the force versus time characteristic of a piezoelectric ceramic switching device constructed in accordance with the present invention and enclosed in a suitable vacuum or protective atmosphere tube.
This indicates that a substantially constant deflection force is obtained over an infinite period of time. A piezoelectric ceramic flexural switching device of the present invention adapted to operate in air having a non-porous, inert protective coating of polyimidosiloxane copolymer as described above with respect to FIG. As shown, due to the leakage of the energizing charge from the piezoceramic element capacitor, it has a nearly constant force versus time characteristic on a short time scale that gradually falls with a very gentle slope. In contrast, the deflection force versus time characteristic of a conventional piezoelectric ceramic flexure switch device with a protective coating follows a curve C when the device operates in low humidity air and a curve C° under high humidity conditions. In particular, the curve C° shows that the deflection force of a piezoelectric ceramic switch with a protective coating of the prior art drops rapidly under high humidity. The curvature is the deflection force versus time characteristic of a conventional piezoceramic flexure-type device without any protective coating. As is clear from these curves,
Unless the impedance of the piezoelectric ceramic flexure element is maintained at a consistently high value to prevent leakage current from the piezoelectric ceramic from increasing with time or humidity, a significant reduction in deflection force will occur. That is, an increase in leakage current from the piezoelectric ceramic impairs the function of applying a high energizing voltage to the piezoelectric ceramic to stabilize the operation of the device.

Figures 8A, 8B, and 8C all show an inactive guard wave W (62
) indicates a manufacturing technology that can improve the airtightness of
These correspond to the kneading force versus time characteristic curve approximated to curve B or ideal curve A in FIG. In FIG. 8A, the particular coating is formed as a coating (62) which extends to a considerable depth on the exposed side of the initially polarized movable flexure plate element portion (12A) and (13A). The outer conductive surface (15) and (
16) may be left exposed or simply covered. In this embodiment, the side edges of the inner conductive surfaces (14U) and (14L) are short (and narrow) in the width direction. A significant portion of the active protective coating protrudes into the gap, covering the area that would otherwise be occupied by the exposed side edges of this inner conductive surface.Experience has shown that the current Leakage and voltage breakdown typically occur at the side edges between the top conductive surface and the inner conductive surface.

In order to avoid such voltage breakdown and current leakage in the energized state of the device, a structure as shown in FIG. 8A is recommended. Of course, although a single intermediate conductive surface (14) was used in the embodiment of FIG. It can be used for many purposes.

Figure 8B shows the initial polarization movable deflection portions (12A), (13
A) The whole and their side edges and associated inner and outer conductive surfaces (15) and (16) are coated with an inert protective coating (62).
) shows an embodiment of the present invention completely encompassed by. FIG. 8B further shows how different double-sided tabs, designated (63) and (64), are pulled out of the flexure sheath and used as terminal connections to the inner conductive surfaces (140) and (14L), respectively. There is. The adhesive used to join the flexures into a monolithic structure is M! If it is marginal, the upper and lower inner conductive members (14U) and (14L)
) are maintained at separate potentials, but optionally if the bonding adhesive is conductive, terminals (63) or (64) can be used as output terminals for this device 2, etc.

FIG. 10 shows an embodiment of the invention in which the side tab terminals (63) or (64) are formed in different locations along the length of the flexure switching device. Figure 10 shows a device having a single common conductive surface (14) divided into two parts by an insulating gap shown at (71). Said gap (71) is on the underside of gaps (15A) and (16A) in the outer conductive surfaces (15) and (16) such that this flexible switching device is clamped by appropriate ramp means (not shown). Consistent. According to this configuration, the side edge tabs (63) are connected to the initial polarization movable flexure portion (12) of the piezoelectric ceramic switching device.
A), an intermediate conductive surface (14) placed inside (13A)
), and the side edge tabs (6
4) is the non-polarized part of the piezoelectric ceramic switching device (
12B), (13B) on the inside of the intermediate conductive surface portion (
14) Provide a terminal for connection to.

FIG. 8C is a partial cross-sectional view of a piezoelectric ceramic flexure device constructed according to FIGS. The relevant portions are exaggerated to reveal the areas that are folded over and over any exposed surface of the plate element (12A). This type of area formation is such that gaps (15 A
> and (16A). In this region, current leakage and voltage breakdown can occur between exposed cut, etched or otherwise formed edges of the outer conductive surface. To prevent such undesirable effects, an inert protective coating (62) (indicated as (62A) in the figure) is applied to the outer flat exposed conductive surface and both edges of the initially polarized movable flexure portion of the device. an initially polarized piezoceramic plate element covering both sides of the flat piezoelectric plate element and the recessed side edges of the intermediate conductive surface sandwiched between them, further exposed by the removal of the outer conductive surfaces (15) and (16); as well as the side edges of the selectively metallized outer conductive surface in the form of a recess exposed by such removal.

FIG. 9 shows another embodiment of the present invention which shows different areas of a piezoceramic flexure device (11) where considerable care is required to properly form the device due to the high risk of voltage breakdown and current leakage. FIG. 2 is a diagram depicting an example. This area is located at the free end of the switching device on the outer conductive surface (1
5) and (16) extend to or near the elongated insulating rigid member 35). In these crossover regions, contacts (19) and (21) are formed in association with portions (14tlA) and (14LA) of the inner conductive surface. In these connections, the portions of the conductor surfaces (15) and (16) adjacent to the rigid member (35) are removed by cutting, etching or otherwise, and an active protective coating (62B) is additionally applied in the space thus created. ) is required.

The deflection device (11) in the embodiment of the invention shown in FIG.
) is further provided with an insulating adhesive (63) in the region where the portions of the intermediate conductive surfaces (14U) and (14L) extending along the initially polarized and unpolarized portions thereof extend along the clamping means (22)-(23). are insulated from each other by forming insulating segments consisting of. As a result, portions of intermediate conductive surfaces (1411) and (14L) extending along initially polarized piezoceramic plate element portions (12A) and (13A) are replaced by non-polarized piezoceramic plate element portions (12B) and (13B' ) will be electrically insulated from the portion of the intermediate conductive surface extending along.

FIG. 11 is a partial perspective view similar to FIG. 10 of the non-polarized plate portion of a piezoelectric ceramic flexural switching device constructed in accordance with the present invention, showing the inside of the device as shown in FIGS. Conductive surface (141J) or (
14L) illustrates different manufacturing techniques for providing terminal tabs for making electrical connections to any of the following. 1st
As shown in Figure 1, one corner of each of the upper and lower non-polarized piezoelectric ceramic plate element portions (12B) and (13B) is chamfered or beveled, thereby holding it in the upper plate element portion (12B). This is an exposed portion for reaching the inner conductive surface (141J) that serves as the base layer and the inner conductive surface portion (14L) that serves as the upper layer held by each plate portion (1313). The exposed conductive surfaces thus obtained are those upon which metal wire connectors or other suitable terminal tabs can be held to permit electrical potential and current conduction.

Using only a single intermediate conductive surface (14) or optionally two separate intermediate conductive surfaces (140) and (i4L)
A mechanism for achieving electrical connection to an intermediate conductive surface in an electrically connected device by using a conductive and adhesive intermediate tab shown at (65) is barreled at the tip of the structure.

As mentioned in the introduction, a complete piezoceramic flexural switching device (11) can be manufactured almost completely even if it does not have all the characteristics described above prior to the initial polarization of the movable piezoceramic plate portion of the device. It is considered possible. In the piezoelectric ceramic plate element of the prior art, it is preferable to perform initial polarization after the physical completion of the device, in order to obtain stability of device operation, rather than performing early polarization treatment in oil as is usually carried out. This was confirmed. Given that there is no reliable 10096 density piezoceramic material, it is essential if it is to avoid any current leakage or voltage breakdown that may occur in the piezoceramic plate element during the initial polarization process with high voltages. A sealing operation prior to initial polarization is required, although this is not a major issue. However, the degree of hermetic packaging provided in the embodiments described above necessarily depends on the degree of absolute stability required in each switching device application.

(Thus, in some switching devices, an absolutely hermetic package (or close to it) may not be required based on the relatively loose operating specifications of the device. (16), (1
4) Selective electrodeization and shaping of or (140) or (14L) provides enhanced protection with respect to voltage leakage and operational distortions around the side edges;
This alleviates the performance degradation or operating life cycle problems of piezoelectric ceramic flexure devices due to microscopic edge cracks such as those caused by conventional cutting and processing techniques.

As can be seen from the foregoing description, the present invention provides improved piezoelectric ceramic switching devices and improved manufacturing techniques for such devices, as well as novel electrical circuits for the energization and proper use of such switching devices. It provides: The improved structure includes the provision of a biasing or driving circuit supported on the non-polarized portions of the piezoceramic plates forming the piezoelectric ceramic switching device. With this configuration, the size, weight, and bulk of the switching device are significantly reduced, thereby providing a compact and simple switching device in which the circuit elements are miniaturized as a whole. Additionally, circuit elements used in conjunction with the device can be mounted as part of the device itself, significantly reducing the stray impedance of the circuit, thereby improving circuit noise immunity during device operation.

Piezoelectric ceramic switching devices constructed in accordance with the present invention are thicker (and have improved construction and operating characteristics) than prior art devices of similar specifications. The switching device operates with high stability and reliability and achieves a long service life that requires a substantial number of switching operations.

INDUSTRIAL APPLICATIONS The improved piezoelectric ceramic switching device and system having the characteristic configuration constructed in accordance with the present invention can be used to It can be widely used as a switching device to control the supply of. Based on the novel configuration described above, the switching device of the present invention is lighter, more compact, and lower in cost than the electromagnetically driven switching devices that have been used until recently, and can perform switching operations with a faster response time. be.

[Brief explanation of drawings]

FIG. 1 is a plan view of a novel piezoelectric ceramic flexural switching device constructed according to the present invention, FIG. 1A is a longitudinal cross-sectional view taken along line LA-LA in FIG. 1, and FIG. 1C is a circuit diagram of a novel drive circuit used to operate the switching device of FIG.
FIG. 1D is a plan view showing the movable flexible end of the switching device shown in FIG. 1 in an unfinished state in the middle of the manufacturing process, and FIG. Figure 1E is a perspective view of a similar part of the device shown in Figure 1D at a later stage following the stage of Figure 1D; FIG. 1F is a partial side view of the completed device showing the method of forming the contacts of the movable end shown in conjunction with FIGS. 1D and 1E; FIG. 2 is a novel piezoelectric ceramic constructed in accordance with the present invention; FIG. 2A is a longitudinal sectional view showing different embodiments of the switching device, with the device mounted on separate insulating heat members; FIG. 2A is a circuit controlled by the device of FIG. 2; FIG. 3 is a partial plan view showing the non-polarized neutral end of the flexible piezoelectric ceramic switching device together with an electric fuse element bonded to that portion; FIG. The illustration shows active circuit elements mounted on the non-polarizable portion of a flexible switch device constructed in accordance with the present invention and connected to a discontinuous wire connector to constitute an energizing circuit for the device. Figures 4A, 48 and 40 are longitudinal sectional views of a voltage doubler rectifier circuit suitable for use as an energizing circuit with the piezoelectric ceramic switching device shown in Figure 4. In three different embodiments, the circuit arrangement of FIG. 48 is shown supported on the non-polarized portion of a flexible switching device corresponding to the physical arrangement of the circuit elements shown in FIG. FIG. 5 is a top perspective view of a different embodiment of a piezoelectric ceramic switching device constructed in accordance with the present invention and shows how it is manufactured; FIG. FIG. 6 is a top perspective view showing still another switch configuration of the switching device according to the present invention using a voltage quadrupling diode rectifier circuit; This figure shows a voltage quadrupling diode rectifier circuit configured with the element arrangement of FIG. 6, and FIG. FIG. 7A is a circuit diagram showing an embodiment of a load circuit for operation with the device of FIG. 7; FIG. FIG. 7B shows a second type of load circuit controlled by the bidirectional piezoelectric ceramic link switching device of FIG. FIG. 7C is a mirror image of the circuit shown in FIG. 7B, and is designed to supply a gate current of negative polarity in order to use a turn-off type gate signal controlled power semiconductor switch. FIG. 8 is a circuit diagram illustrating how to derive the reversal voltage provided; FIG. 8 is yet another embodiment of a piezoelectric ceramic flexural switching device constructed in accordance with the present invention; Fig. 8A is a cross-sectional view taken along the line 8A-8A in Fig. 8; Fig. 8B is a diagram showing the initial polarization in the same apparatus as Fig. 8; FIG. 8C is a longitudinal sectional view similar to FIG. 8A showing a selective covering structure covering the entire flat outer surface of the movable deflectable portion; FIG. Figure 8D is a deflection force versus time curve showing how to cover any exposed edge of the initially polarized portion of the piezoelectric ceramic plate element with a uniform coating; FIG. 9 is a characteristic curve diagram illustrating the above-mentioned characteristics of a piezoceramic flexible switching device with or without a protective coating formed in the art, as well as the characteristics obtained according to a preferred embodiment of the invention. FIGS. 10 and 11 are longitudinal cross-sectional views of an embodiment of the invention similar to the figures, illustrating how the load current control contacts are formed at the free ends of the flexible elements of the device; FIGS. 10 and 11 respectively 8 and 9 for forming terminal tabs for applying an energizing potential or supplying a load current via the conductive surfaces formed on the piezoceramic plate elements of the device shown in FIGS. 8 and 9. FIG. 3 is a perspective view showing two different techniques. (11)・・・・・・・・・・・・Piezoelectric bending type switching device (12)・・・・・・・・・・・・・・・
・Top plate element (13>・・・・・・・・・・・・
...Lower plate element (14)...
...Intermediate conductive surface (15), (16)...
Outer conductive surfaces (17), (18)...Fixed contacts (
19), (21)...Movable contacts (22), (2
3)...M! Edge paper 2521 member 24)...
・・・・・・・・・・・・Screw patent applicant General Electric Company reinstated agent Shinjiken Department 34
The death of 'ma': 5 (in -81 change 1.νE23
37C! Te0 A. B. 2;D. Procedural Amendment Coordination Ceremony) ■, Incident Display Showa 60 Patent Application No. 290319 3
, Relationship with the M-correction case Patent applicant name General Electric Company 5, ? Date of di order: March 5, 1986
6. Number of Inventions Increased by Amendment 8.1 Correct Contents (1) One copy each of the power of attorney and the same translation are attached as supplementary supplements. ■ Attach one power of attorney.

Claims (52)

[Claims] (1) Consisting of at least two flat, initially polarized piezoelectric plate elements supported in sandwich fashion on opposite sides of at least one intermediate conductive surface, with a corresponding outer side of each element; at least one piezoelectric ceramic switching device having outer conductive surfaces such that the outer conductive surfaces are insulated from each other and from an intermediate conductive surface through the thickness of each element; The ceramic switching device further includes at least one set of electrical switch contacts that are opened and closed by the initially polarized movable flexible portion of the piezoelectric plate element, and mechanically connects the initially polarized movable flexible portion to open and close the set of contacts. clamping means for supporting and fixing another non-polarized portion of the piezoelectric ceramic plate element proximate to this portion, the clamping means for securing a further non-polarized portion of the piezoelectric ceramic plate element located below said clamping means; A piezoelectric ceramic plate device characterized in that a mechanically strain-free state and an electrically neutral state are established in that portion by maintaining non-polarizability. (2) the outer conductive surface of another portion of the piezoelectric ceramic plate element located below the clamping means is removed, and the intermediate conductive surface and the outer conductive surface are shaped into a desired size of the flat piezoelectric plate element; Subsequent to molding, the lateral edges of the conductive surfaces are recessed relative to the lateral edges of the piezoceramic plate element by selective formation to improve voltage strain resistance along the lateral edges of the piezoceramic flexure. A switching device according to claim (1), characterized in that: (3) The switching device further includes a uniform electrically insulating protective coating covering at least some of the outer surface of the initially polarized movable flexible portion of the flexible piezoelectric device. The switching device according to paragraph (1). (4) The switching device according to claim (3), wherein the uniform electrically insulating protective coating is made of a polyimidosiloxane copolymer. (5) the uniform electrically insulating coating has a flat outer conductive surface;
and at least a switching device which extends over and covers the edges of the initially polarized flat piezoelectric ceramic plate element and covers the side edges of the piezoelectric plate element and an intermediate conductive surface sandwiched between the plates. The switching device according to any one of claims (3) and (4), characterized in that the switching device covers the initial polarization portion by expanding over the initial polarization portion of the switching device. (6) the uniform electrically insulating coating extends over and covers the flat outer conductive surface and the edges of the initially polarized flat piezoceramic plate element, and the lateral edges of the piezoelectric plate element and between the plates; The sandwiched intermediate conductive surface is spread over at least the initial polarization portion of the switching device, and the insulating coating covers the flat outer conductive surface of the initial polarization portion of the piezoelectric plate element. Furthermore, the piezoelectric plate element extends to and covers the exposed portion of the piezoelectric plate element due to the lack of the outer conductive surface, as well as the edge of the outer conductive surface that contacts the exposed portion.
2) The switching device described in section 2). (7) the switching device further includes a non-polarized piezoelectric plate element portion projecting beyond the clamped portion and away from the initially polarized movable deflectable portion; A capacitor having a desired capacitance value of the order of 0.1 μF is formed between the corresponding outer conductive surface and the intermediate conductive surface depending on the power rating, and this is used in an electric circuit for controlling the piezoelectric flexural switching device and the like. Claim No. (1) characterized in that the device is used as a circuit element.
Piezoelectric ceramic switching device as described in . (8) the switching device further includes a non-polarized piezoelectric plate element portion projecting beyond the clamped portion and away from the initially polarized movable deflectable portion; A capacitor having a desired capacitance value on the order of 0.1 μF is formed between the corresponding outer conductive surface and the intermediate conductive surface depending on the power rating, and this is used in an electric circuit for controlling the piezoelectric flexural switching device and the like. Claim No. (6), characterized in that it is used as a circuit element.
Apparatus described in section. (9) an active semiconductor device, wherein the switching device is further configured as a stand-alone device, a hybrid circuit, or a monolithically integrated circuit formed and supported on a portion of a non-polarized piezoelectric plate element that projects beyond the clamping means; or additional electrical circuitry including passive circuit elements or combinations thereof, and including conductive paths preformed by selectively forming suitable conductive surfaces on portions of the unpolarized piezoelectric plate element, thereby 8. The switching device according to claim 7, wherein the active device or passive circuit element including the capacitor is connected in a desired circuit relationship. (10) an active semiconductor device, wherein the switching device is further configured as a stand-alone device, a hybrid circuit, or a monolithic integrated circuit formed and supported on a portion of a non-polarized piezoelectric plate element that projects beyond the clamping means; or additional electrical circuitry including passive circuit elements or combinations thereof, and including conductive paths preformed by selectively forming suitable conductive surfaces on portions of the non-polarized piezoelectric plate element, thereby 9. The switching device according to claim 8, wherein the active device or passive circuit element including the capacitor is connected in a desired circuit relationship. (11) The switching device further includes a relatively thin rigid member fixed in the width direction across the free end of the initially polarized movable flexure portion of the flexure-type piezoelectric switching device. Range number (1)
The switching device described in any one of items (4) to (4) or any one of items (6), (7), or (9). (12) The switching device further includes a relatively thin rigid member fixed in the width direction across the free end of the initially polarized movable flexible portion of the bimorph piezoelectric switching device. Range No. 1
0) The switching device described in item 0). (13) The switching device further includes a relatively thin insulating rigid member fixed in the width direction across the free end of the initially polarized movable flexible portion of the flexible piezoelectric switching device, In this case, the longitudinal protrusion of the intermediate conductive surface is folded back onto the top surface of the rigid member and fixed thereto, thereby forming an exposed electrical contact electrically and physically connected to the intermediate conductive surface. A patent claim characterized in that the exposed electrical contacts cooperate with opposing electrical contacts to selectively open and close an electrical circuit passing through these contacts when the piezoelectric ceramic switching device is energized. The switching device according to item (1). (14) The switching device further includes a relatively thin insulating rigid member fixed in the width direction across the free end of the initially polarized movable flexure portion of the flexure-type piezoelectric switching device; In this case, the longitudinal protrusion of the intermediate conductive surface is folded back onto the top surface of the rigid member and fixed thereto, thereby forming an exposed electrical contact electrically and physically connected to the intermediate conductive surface. A patent claim characterized in that the exposed electrical contacts cooperate with opposing electrical contacts to selectively open and close an electrical circuit passing through these contacts when the piezoelectric ceramic switching device is energized. The switching device according to the range (10). (15) A piezoelectric ceramic switching circuit using the piezoelectric ceramic switching device set forth in claim (1), wherein each of the cooperative electric switch contacts is configured to control energization to a load by opening and closing the contacts. each switch energizing circuit means connected across each one of the initially polarized piezoelectric plate elements of said piezoelectric flexure switching device for selectively opening and closing the set; a power source of flexural energizing potential and a normally open user-operated switch means with a low power rating; current limiting resistor means; Using diode rectifier circuit means polarized to provide energizing potentials at the same polarity, all of these circuit elements are connected to the corresponding initial state of the flexural piezoelectric switch when the normally open user-operated switch is closed. By wiring it in series with the polarized piezoelectric plate element,
each initially polarized piezoelectric plate element of said flexible piezoelectric switch is selectively energized by a direct current electric field always having the same polarity as the initial polarization electric field permanently introduced to that element, and the load current Claim (1) characterized in that dielectric depolarization of the piezoelectric plate element does not occur during continuous operation of a piezoelectric flexure type switching device that opens and closes control switch contacts.
A piezoelectric ceramic switching circuit using the switching circuit described in section. (16) The switching circuit further includes a normally closed electrical switch means connected in parallel to the corresponding piezoelectric plate element for discharging the accumulated charge, and energizing the normally closed electrical switch means to the corresponding piezoelectric plate element. means for connecting to said normally open low power rated user operated switch means for said normally open user operated switch means to be automatically energized when said normally open user operated switch means is closed. Claim 15 is characterized in that the normally closed electric switch means connected in parallel with a corresponding piezoelectric plate element is opened to energize the corresponding piezoelectric plate element. switching circuit. (17) A piezoelectric ceramic switching circuit using the piezoelectric ceramic switching device set forth in claim (9), wherein each of the cooperative electrical switch contacts is configured to control energization to a load by opening and closing the contacts. each switch energizing circuit means connected across each one of the initially polarized piezoelectric plate elements of said piezoelectric flexure switching device for selectively opening and closing the set; a power source of flexural energizing potential and a normally open user-operated switch means with a low power rating; current limiting resistor means; Using diode rectifier circuit means polarized to provide energizing potentials at the same polarity, all of these circuit elements are connected to the corresponding initial state of the flexural piezoelectric switch when the normally open user-operated switch is closed. By wiring it in series with the polarized piezoelectric plate element,
each initially polarized piezoelectric plate element of said flexible piezoelectric switch is selectively energized by a direct current electric field always having the same polarity as the initial polarization electric field permanently introduced to that element, and the load current While ensuring that no dielectric depolarization of the piezoelectric plate elements occurs during successive operations of the piezoelectric flexure switching device opening and closing the control switch contacts, the switching circuitry further comprises: The snubber circuit means includes a series circuit of a resistor and a capacitor connected in parallel to a load current control electric switch contact which is opened and closed by a flexible piezoelectric switching device when energized, and as a passive circuit element in the snubber circuit means. the resistor being mounted on a non-polarized piezoelectric plate element portion of the flexural piezoelectric switching device;
A piezoelectric ceramic switching circuit using a switching device according to claim 9, characterized in that this resistor is connected to a capacitor formed in at least a part of the non-polarized piezoelectric plate element portion. (18) A piezoelectric ceramic switching circuit using the piezoelectric ceramic switching device set forth in claim (12), wherein each of the cooperative electric switch contacts is configured to control energization to a load by opening and closing the contacts. each switch energizing circuit means connected across each one of the initially polarized piezoelectric plate elements of said piezoelectric flexure switching device for selectively opening and closing the set; a power source of flexural energizing potential and a normally open user-operated switch means with a low power rating; current limiting resistor means; Using diode rectifier circuit means polarized to provide energizing potentials at the same polarity, all of these circuit elements are connected to the corresponding initial state of the flexural piezoelectric switch when the normally open user-operated switch is closed. By wiring in series with the polarized piezoelectric plate elements, each initially polarized piezoelectric plate element of the flexible piezoelectric switch always has the same polarity as the initial polarization electric field permanently introduced to that element. The piezoelectric plate elements are selectively energized by a direct current electric field, respectively, so that dielectric depolarization of the piezoelectric plate elements does not occur during continuous operation of the piezoelectric flexure switching device that opens and closes the load current control switch contacts. Claim No. 1 characterized in that
A piezoelectric ceramic switching circuit using the switching circuit described in section 2). (19) the switching circuit further comprises a normally closed electrical switch means connected in parallel thereto for discharging the accumulated charge of the corresponding piezoelectric plate element; and a normally closed electric switch means for energizing the corresponding piezoelectric plate element. including means for connecting the type electrical switch contacts to a normally open low power rated user operated electrical switch means to be automatically energized upon closing of said normally open user operated switch means. Switching according to claim (18), characterized in that the normally closed electric switch means connected in parallel with each piezoelectric plate element is opened to energize the corresponding piezoelectric plate element. circuit. (20) The switching circuit further comprises a series circuit of a resistor and a capacitor connected in parallel across a load current control switch contact which is opened and closed by a flexible piezoelectric switching device upon energization of each initially polarized piezoelectric plate element. a snubber circuit means comprising a resistor as a passive circuit element mounted on a non-polarized piezoelectric plate element portion of the flexural piezoelectric switch device; Claim No. (19) characterized in that the portion is electrically connected to a capacitor formed in at least a part of the portion.
Switching circuit described in section. (21) The diode rectifier circuit means further includes voltage multiplier circuit means for increasing the value of the energizing voltage to a level suitable for driving the piezoelectric flexure switching device. The switching circuit described in (15). (22) The diode rectifier circuit means further includes voltage multiplier circuit means for increasing the value of the energizing voltage to a level suitable for driving the piezoelectric flexure type switching device. The switching circuit according to item (20). (23) Each of said cooperative electrical switch contacts comprises a first electrical contact means connected to and supplied with charge stored in each piezoelectric plate element acting as a capacitor, such as an SCR, triac or transistor. and second electrical contact means connected to supply a gate current to a gated power semiconductor switch such that upon selective energization of each piezoelectric plate element, the initial polarization of the switching device is activated. A deflectable portion momentarily closes the first and second electrical contact means, thereby causing a sufficient current pulse to be emitted from the corresponding piezoelectric plate element into the gate of the gated power semiconductor switch to cause the semiconductor switch to close. 16. The switching circuit according to claim 15, wherein the switching circuit is configured to turn on the switching circuit. (24) Each of said cooperative electrical switch contacts comprises a first electrical contact means connected to and supplied with charge stored in each piezoelectric plate element acting as a capacitor, such as an SCR, triac or transistor. second electrical contact means connected to supply a gate current to a gate-controlled power semiconductor switch, whereby upon selective energization of each piezoelectric plate element, the initial polarization of said switching device is activated; A deflectable portion momentarily closes the first and second electrical contact means, thereby causing a sufficient current pulse to be emitted from the corresponding piezoelectric plate element into the gate of the gated power semiconductor switch to cause the semiconductor switch to close. 21. The switching circuit according to claim 20, wherein the switching circuit is configured to turn on the switching circuit. (25) Each of said cooperative electrical switch contacts has first electrical contact means connected to and supplied with charge stored in each piezoelectric plate element acting as a capacitor, such as an SCR, triac or transistor. second electrical contact means connected to supply a gate current to a gate-controlled power semiconductor switch, whereby upon selective energization of each piezoelectric plate element, the initial polarization of said switching device is activated; A deflectable portion momentarily closes the first and second electrical contact means, thereby causing a sufficient current pulse to be emitted from the corresponding piezoelectric plate element into the gate of the gated power semiconductor switch to cause the semiconductor switch to close. 23. The switching circuit according to claim 22, wherein the switching circuit is configured to turn on the switching circuit. (26) said intermediate conductive surface comprises two closely spaced inner conductive surfaces separated from each other and fixed to each one flat piezoelectric plate element; The switching device according to claim 1, wherein the switching device is fixedly held by a thin adhesive layer located between closely separated conductive surfaces. (27) The thin adhesive layer is electrically insulating, and each one of the adjacent inner conductive surfaces is provided with an independent terminal tab. switching device. 28. The switching device of claim 26, wherein the thin adhesive layer is electrically conductive and the adjacent inner conductive surfaces have a common terminal tab. (29) The switching device according to claim (26), wherein another portion of the piezoelectric plate element located below the clamping means has a removed portion of the outer conductive surface. (30) The switching device further includes a uniform electrically insulative protective coating covering at least some of the outer surface of the initially polarized movable flexure portion of the piezoelectric ceramic flexure switching device, the protective coating being a polyimide siloxane. Claim No. (29) characterized in that it is made of a polymer.
Switching device as described in section. (31) the uniform electrically insulative coating covers the flat outer conductive surface and side edges of the flat initially polarized piezoelectric plate element, and the side edges of the piezoelectric plate element and the conductive layer sandwiched between the elements; A uniform insulating coating covering the flat outer conductive surface of the initially polarized portion of the piezoelectric plate element further covers an intermediate conductive surface corresponding to the initially polarized portion of the device; 31. The switching device according to claim 30, wherein the switching device covers the portion of the piezoelectric plate element exposed by removing the piezoelectric plate element as well as the edge of the outer conductive surface exposed by the removal. (32) the switching device further includes a non-polarized piezoelectric plate element portion projecting beyond the clamping portion in a direction opposite from the initially polarized movable flexure portion, the non-polarized piezoelectric plate element portion extending from each outer conductive surface; A capacitor having a desired capacitance value of 0.1 μF depending on the power rating is formed between the capacitor and the intermediate conductive surface, and this capacitor is connected to the circuit in the electric circuit that controls the operation of the piezoelectric flexible switching device. 32. The switching device according to claim 31, wherein the switching device is used as an element. (33) The switching device further comprises an independent element type;
forming and supporting additional electrical circuitry consisting of active semiconductor devices or passive circuit elements or combinations thereof in hybrid or monolithic integrated circuit type on the non-polarized piezoelectric plate element portions projecting beyond the clamping means; By forming a suitable conductive surface on the non-polarized piezoelectric plate element portion, a pre-formed conductive path is selectively established, whereby a passive A switching device according to claim 32, characterized in that circuit elements or active elements are connected in a desired circuit relationship. (34) A claim characterized in that the switching device further includes a relatively thin rigid member fixedly supported in the width direction across the free end of the initially polarized movable flexible portion of the flexible piezoelectric switching device. Range No. 33
) The switching device described in section 2. (35) Claims (1), (6), and (10) characterized in that the set of cooperative electrical switch contacts opened and closed by a movable flexible member is formed from a copper-vanadium alloy.
, (14), (26), (30), or (34). (36) enabling the flexible piezoelectric drive member to be driven to either side of the neutral position it occupies based on the attitude of the flexible member in the non-excited state, thereby causing the flexible member to Claims (1), (6), characterized in that the contact and the break contact selectively cooperate to open and close at least two electrically independent conductive paths through each contact. (10), (14)
, (26), (30), or (34). (37) enabling the flexible piezoelectric drive member to be driven to either side of the neutral position it occupies based on the attitude of the flexible member in the non-excited state, thereby causing the flexible member to cooperative electrical switch contacts made of a copper-vanadium alloy, selectively cooperating with the contact and break contacts to enable the opening and closing of at least two electrically independent conductive paths through each contact, and which are opened and closed by said movable deflectable member; Claims (1), (6), (10), (14), (26), (3)
0) or (34). (38) Initial polarization of the device Claim (1) characterized in that the piezoelectric plate element portion constituting the movable flexible member is subjected to initial polarization treatment after the switching device is assembled as an integral structure. ), (6), (
10), (14), (26), (30) or (34)
The switching device according to any one of Items. (39) A flexible piezoelectric drive member is capable of being driven to either side of a neutral position of the flexible member in an unenergized state, such that the flexible member has a make contact set and a break contact set disposed on either side thereof. 2 to form each
the movable flexible member being capable of cooperating with different sets of contacts to selectively close or interrupt at least two electrically independent conductive paths through each set of contacts; The contact set of the cooperative electrical switch is formed from a copper-vanadium alloy, and the piezoelectric plate element portion that constitutes the initially polarized movable flexure portion of the device is initially polarized after assembly into the integrated structure of the switching device. A switching device according to claim (1), characterized in that: (40) A flexible piezoelectric drive member is capable of being driven to either side of a neutral position of the flexible member in an unenergized state, whereby the flexible member has a make contact set and a break contact set disposed on either side thereof. 2 to form each
the movable flexible member being capable of cooperating with different sets of contacts to selectively close or interrupt at least two electrically independent conductive paths through each set of contacts; The contact set of the cooperative electrical switch is formed from a copper-vanadium alloy, and the piezoelectric plate element portion that constitutes the initially polarized movable flexure portion of the device is initially polarized after assembly into the integrated structure of the switching device. A switching device according to claim 34, characterized in that: (41) consisting of at least two initially polarized piezoelectric plate elements each having an outer conductive surface and sandwiched on either side of at least one intermediate conductive surface for opening and closing the make and break electrical contacts; at least one electrically driven flexure-type piezoceramic switching device cooperating with those contacts, as well as direct current energization polarized in the same direction as its initial polarization field previously permanently introduced into each piezoelectric plate element of the device; selectively operable electrical energizing circuit means connected to said flexible piezoelectric switching device for selectively energizing each by an electric field, thereby providing a switch for closing or opening the make and break contacts; A piezoelectric ceramic switching circuit characterized in that no dielectric depolarization of the piezoelectric plate element occurs during continuous operation. (42) The flexible piezoelectric ceramic switching device is capable of being driven from a neutral position of the flexible member in an unenergized state to both sides thereof, so that the flexible member comprises two sets of make and break contacts disposed on both sides thereof. Claim 1, characterized in that it cooperates with different sets of contacts in the set to selectively close or open at least two independent conductive paths through each set of contacts.
41) The switching circuit described in item 41). (43) selectively operative electrical energizing circuit means including each switching energizing circuit means connected across each one of the initially polarized piezoelectric plate elements of the piezoceramic flexure switching device; Circuit means is adapted to polarize the initially polarized piezoelectric plate element of the piezoelectric flexural switching device, including a power source of flexural energizing potential, a normally open low power rated user-operated switch means, and a power limiting resistor means. diode rectifier circuit means polarized to apply an energizing potential at the same polarity as the initial polarization potential, which are connected to the deflection circuit when the normally open low power rated user switch is closed. each initially polarized piezoelectric plate element of the flexible piezoelectric switch is configured to be connected in series with each one of the initially polarized piezoelectric plate elements of the flexible piezoelectric switch. during operation of a continuous piezoelectric flexure-type device for opening and closing said electrical switch contacts for controlling said load current, each selectively energized by a DC energizing electric field of always the same polarity as the permanently introduced initial polarization electric field; Claim (41) characterized in that dielectric depolarization of the piezoelectric plate element is prevented from occurring in
Switching circuit described in section. (44) The switching circuit further includes normally closed electric switch means for discharging the charge accumulated in each piezoelectric plate element by being connected in parallel with the element, and for energizing each piezoelectric plate element. and means for connecting said normally closed electrical switch means to a normally open low power rated user operated switch means so that said normally open electrical switch means is automatically engaged upon closing of said normally open user operated switch means. Claim 43, characterized in that said normally closed electric switch means connected in parallel to each piezoelectric plate element to be energized is opened to enable electrical energization of that element. Switching circuit described in ). (45) The switching circuit further includes a resistor and a capacitor connected in parallel across the load current control electrical switch contacts which are opened and closed by the flexible piezoelectric switching device when each initially polarized piezoelectric plate element is energized. a snubber circuit means comprising a series circuit, using as a resistor of the snubber circuit means a passive resistance element formed and supported on a non-polarized piezoelectric plate element portion of the flexural piezoelectric switching device; 45. A switching circuit according to claim 44, wherein the capacitor comprises a capacitor formed in at least a part of the non-polarized piezoelectric plate element portion. (46) The diode rectifier circuit means includes voltage multiplier circuit means for increasing the value of the energizing voltage to an appropriate level for driving the piezoelectric bimorph flexural switching device. Switching circuit as described. (47) first electrical contact means, such as an SCR, triac or transistor, each of the contact sets of said cooperative electrical switch being connected to and being supplied with the charge stored in each piezoelectric plate element, which also acts as a capacitor; and second electrical contact means connected to supply a gate current to a gated power semiconductor switch such as a gate-controlled power semiconductor switch, thereby controlling the initial polarization of the switching device upon selective energization of each piezoelectric plate element. The flexible portion momentarily closes the first and second electrical contact means and causes each piezoelectric plate element to emit a sufficient current pulse into the gate of the gated power semiconductor switch to turn on the semiconductor switch. A switching circuit according to claim (45), characterized in that the switching circuit is configured to: (48) first electrical contact means, such as an SCR, triac or transistor, each of the contact sets of said cooperative electrical switch being connected to and being supplied with the charge stored in each piezoelectric plate element, which also acts as a capacitor; and second electrical contact means connected to supply a gate current to a gate-controlled power semiconductor switch such as a gate-controlled power semiconductor switch such as The flexible portion momentarily closes the first and second electrical contact means and causes each piezoelectric plate element to emit a sufficient current pulse into the gate of the gated power semiconductor switch to turn on the semiconductor switch. A switching circuit according to claim (46), characterized in that the switching circuit is configured to: (49) having a piezoelectric ceramic flexure member comprised of at least two flat, initially polarized piezoelectric plate elements supported in opposite parallel fashion in a sandwich on opposite sides of at least one intermediate conductive surface; at least one piezoceramic flexural switching device having a pair of outer conductive surfaces insulated from the intermediate conductive surface and the other by the thickness of the piezoelectric plate element, the initially polarized movable flexure member of the device; comprising at least one set of cooperative electrical switch contacts operated to open and close by
After forming the flat piezoelectric plate element to a desired size, selectively recessing the edges of the intermediate conductive surface and the outer conductive surface with respect to the opposite edges of the piezoelectric plate element. A piezoelectric ceramic switching device characterized in that voltage distortion resistance along a side edge of a piezoelectric ceramic flexible member is improved. (50) the switching device further comprises a dense electrically insulating protective coating of a polyimide siloxane copolymer covering at least some of the outer surface of the initially polarized movable flexure portion of the piezoelectric ceramic flexure switch device; The dense electrically insulating protective coating covers the side edges of the flat initially polarized piezoelectric plate elements and the flat outer conductive surface, and the side edges of the piezoelectric plate elements and at least the devices inserted into those plate elements. covering an intermediate conductive surface corresponding to the initially polarized portion of the piezoelectric plate element, and a uniform conformal coating covering the flat outer conductive surface in the initially polarized portion of the piezoelectric plate element from which the outer conductive surface has been removed; extending along and covering the portion of the piezoelectric plate element exposed by the conductive surface, as well as the edges of the outer conductive surface exposed by the removal of such conductive surface. The switching device according to item (46). (51) having a piezoelectric ceramic flexure member comprised of at least two flat, initially polarized piezoelectric plate elements supported in opposite parallel fashion in a sandwich on opposite sides of at least one intermediate conductive surface; at least one piezoceramic flexural switching device having a pair of outer conductive surfaces insulated from the intermediate conductive surface and the other by the thickness of the piezoelectric plate element, the initially polarized movable flexure member of the device; at least one set of cooperative electrical switch contacts operated to open and close by the piezoelectric ceramic flexure-type switching device; an electrically insulative protective coating over at least the initially polarized portion of the flexible member at the side edges of the planar initially polarized piezoelectric plate elements and intermediate conductive surfaces interposed between the plate elements; characterized by comprising a portion of the initially polarized piezoelectric plate element exposed by the removal of the outer conductive surface, and something extending to and covering the edge of the outer conductive surface exposed by the removal of such conductive surface. Piezoelectric ceramic switching device. (52) Assembling all of the principal elements of the piezoceramic switching device into an integrated structure, and then applying a relatively high initial polarization potential to each piezoelectric plate element of the flexible member, during which said plate elements are temperature to achieve orientational alignment of the dipoles of the piezoceramic material and then simultaneously adjust the relative values of the initial polarization potentials applied to each piezoelectric plate element of the flexure member to transfer it to the load of the switching device. A method for initial polarization and aligned positioning of a movable flexible piezoelectric member of a piezoelectric flexible switching device characterized by precise positioning with respect to fixed switch contacts for current control.