JPS62153364U - - Google Patents

Info

Publication number
JPS62153364U
JPS62153364U JP3813086U JP3813086U JPS62153364U JP S62153364 U JPS62153364 U JP S62153364U JP 3813086 U JP3813086 U JP 3813086U JP 3813086 U JP3813086 U JP 3813086U JP S62153364 U JPS62153364 U JP S62153364U
Authority
JP
Japan
Prior art keywords
substrate
target
scattered atoms
sputter
adhere
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3813086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3813086U priority Critical patent/JPS62153364U/ja
Publication of JPS62153364U publication Critical patent/JPS62153364U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3813086U 1986-03-14 1986-03-14 Pending JPS62153364U (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3813086U JPS62153364U (en, 2012) 1986-03-14 1986-03-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3813086U JPS62153364U (en, 2012) 1986-03-14 1986-03-14

Publications (1)

Publication Number Publication Date
JPS62153364U true JPS62153364U (en, 2012) 1987-09-29

Family

ID=30850085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3813086U Pending JPS62153364U (en, 2012) 1986-03-14 1986-03-14

Country Status (1)

Country Link
JP (1) JPS62153364U (en, 2012)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5933764B2 (ja) * 1974-06-26 1984-08-17 ソシエテ アノニム オトモビル シトロエン レジ パル レ ザルテイクル 118 ア 150 ド ラ ルワ シユル レ ソシエテ コメルシアル ケ−ブルを通すため急速に壁面に取付ける装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5933764B2 (ja) * 1974-06-26 1984-08-17 ソシエテ アノニム オトモビル シトロエン レジ パル レ ザルテイクル 118 ア 150 ド ラ ルワ シユル レ ソシエテ コメルシアル ケ−ブルを通すため急速に壁面に取付ける装置

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