JPS62153045U - - Google Patents
Info
- Publication number
- JPS62153045U JPS62153045U JP1986041546U JP4154686U JPS62153045U JP S62153045 U JPS62153045 U JP S62153045U JP 1986041546 U JP1986041546 U JP 1986041546U JP 4154686 U JP4154686 U JP 4154686U JP S62153045 U JPS62153045 U JP S62153045U
- Authority
- JP
- Japan
- Prior art keywords
- laminated
- polishing
- adhesive layer
- insertion hole
- polyether
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 claims description 4
- 239000004721 Polyphenylene oxide Substances 0.000 claims description 2
- 239000012790 adhesive layer Substances 0.000 claims description 2
- 230000037431 insertion Effects 0.000 claims description 2
- 238000003780 insertion Methods 0.000 claims description 2
- 229920000570 polyether Polymers 0.000 claims description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical group [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 1
- 239000003054 catalyst Substances 0.000 claims 1
- 238000004132 cross linking Methods 0.000 claims 1
- 150000002170 ethers Chemical class 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Adhesive Tapes (AREA)
- Adhesives Or Adhesive Processes (AREA)
Description
第１図は本考案の研磨用保持部材の一例を示す
断面図であり、第２図は異なる例を示す断面図で
ある。 １，１′…研磨用パツド、２，２′…キヤリア
部材、２１，２１′…挿通孔、３，３′…ポリエ
ーテル系粘着剤層、４…不透水性シート。
断面図であり、第２図は異なる例を示す断面図で
ある。 １，１′…研磨用パツド、２，２′…キヤリア
部材、２１，２１′…挿通孔、３，３′…ポリエ
ーテル系粘着剤層、４…不透水性シート。
Claims (1)
- 研磨用パツドの一面に、被研磨材を挿入するた
めの挿通孔が設けられたキヤリア部材が積層され
、他面に分子内に少なくとも１個の反応性シラン
基を有するポリエーテルと粘着付与剤と架橋触媒
とからなるエーテル系粘着剤層が積層されてなる
研磨用保持部材。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986041546U JPH0321892Y2 (ja) | 1986-03-19 | 1986-03-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986041546U JPH0321892Y2 (ja) | 1986-03-19 | 1986-03-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62153045U true JPS62153045U (ja) | 1987-09-28 |
| JPH0321892Y2 JPH0321892Y2 (ja) | 1991-05-13 |
Family
ID=30856648
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986041546U Expired JPH0321892Y2 (ja) | 1986-03-19 | 1986-03-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0321892Y2 (ja) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52117692A (en) * | 1976-03-30 | 1977-10-03 | Agency Of Ind Science & Technol | Preparation of sample with polished surface |
| JPS6121174A (ja) * | 1984-07-09 | 1986-01-29 | Sekisui Chem Co Ltd | 表面保護用粘着テ−プもしくはシ−ト |
-
1986
- 1986-03-19 JP JP1986041546U patent/JPH0321892Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52117692A (en) * | 1976-03-30 | 1977-10-03 | Agency Of Ind Science & Technol | Preparation of sample with polished surface |
| JPS6121174A (ja) * | 1984-07-09 | 1986-01-29 | Sekisui Chem Co Ltd | 表面保護用粘着テ−プもしくはシ−ト |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0321892Y2 (ja) | 1991-05-13 |