JPS62152435U - - Google Patents

Info

Publication number
JPS62152435U
JPS62152435U JP3905486U JP3905486U JPS62152435U JP S62152435 U JPS62152435 U JP S62152435U JP 3905486 U JP3905486 U JP 3905486U JP 3905486 U JP3905486 U JP 3905486U JP S62152435 U JPS62152435 U JP S62152435U
Authority
JP
Japan
Prior art keywords
substrate
electrodes
dry etching
etching
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3905486U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0451473Y2 (US06521211-20030218-C00004.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986039054U priority Critical patent/JPH0451473Y2/ja
Publication of JPS62152435U publication Critical patent/JPS62152435U/ja
Application granted granted Critical
Publication of JPH0451473Y2 publication Critical patent/JPH0451473Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1986039054U 1986-03-19 1986-03-19 Expired JPH0451473Y2 (US06521211-20030218-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986039054U JPH0451473Y2 (US06521211-20030218-C00004.png) 1986-03-19 1986-03-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986039054U JPH0451473Y2 (US06521211-20030218-C00004.png) 1986-03-19 1986-03-19

Publications (2)

Publication Number Publication Date
JPS62152435U true JPS62152435U (US06521211-20030218-C00004.png) 1987-09-28
JPH0451473Y2 JPH0451473Y2 (US06521211-20030218-C00004.png) 1992-12-03

Family

ID=30851870

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986039054U Expired JPH0451473Y2 (US06521211-20030218-C00004.png) 1986-03-19 1986-03-19

Country Status (1)

Country Link
JP (1) JPH0451473Y2 (US06521211-20030218-C00004.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58125831A (ja) * 1982-01-22 1983-07-27 Seiko Epson Corp ドライエツチング装置
JPS58168232A (ja) * 1982-03-30 1983-10-04 Fujitsu Ltd 平行平板型ドライエツチング装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58125831A (ja) * 1982-01-22 1983-07-27 Seiko Epson Corp ドライエツチング装置
JPS58168232A (ja) * 1982-03-30 1983-10-04 Fujitsu Ltd 平行平板型ドライエツチング装置

Also Published As

Publication number Publication date
JPH0451473Y2 (US06521211-20030218-C00004.png) 1992-12-03

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