JPS62151735U - - Google Patents
Info
- Publication number
- JPS62151735U JPS62151735U JP3921386U JP3921386U JPS62151735U JP S62151735 U JPS62151735 U JP S62151735U JP 3921386 U JP3921386 U JP 3921386U JP 3921386 U JP3921386 U JP 3921386U JP S62151735 U JPS62151735 U JP S62151735U
- Authority
- JP
- Japan
- Prior art keywords
- coating device
- rotating part
- receiving
- flying
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 230000002265 prevention Effects 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims 3
- 238000000576 coating method Methods 0.000 claims 3
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3921386U JPS62151735U (lt) | 1986-03-18 | 1986-03-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3921386U JPS62151735U (lt) | 1986-03-18 | 1986-03-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62151735U true JPS62151735U (lt) | 1987-09-26 |
Family
ID=30852178
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3921386U Pending JPS62151735U (lt) | 1986-03-18 | 1986-03-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62151735U (lt) |
-
1986
- 1986-03-18 JP JP3921386U patent/JPS62151735U/ja active Pending