JPS62150894A - Optical device and manufacture thereof - Google Patents
Optical device and manufacture thereofInfo
- Publication number
- JPS62150894A JPS62150894A JP60290727A JP29072785A JPS62150894A JP S62150894 A JPS62150894 A JP S62150894A JP 60290727 A JP60290727 A JP 60290727A JP 29072785 A JP29072785 A JP 29072785A JP S62150894 A JPS62150894 A JP S62150894A
- Authority
- JP
- Japan
- Prior art keywords
- cap
- lens
- optical
- base
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/58—Optical field-shaping elements
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
本発明は、光フアイバ通信に用いられる光学装置および
その製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to an optical device used in optical fiber communication and a method for manufacturing the same.
光ファイバ通信を実現するためには、光ファイバと半導
体光素子を安定かつ高効率に接続することが重要な課題
である。その中でも集光やコリメ−ト作用をもつ光学レ
ンズの固定に関しては、従来第4図に示すような構造が
採用されている。すなわち球レンズα1)が光軸方向に
開いた穴の内部に保持されたホルダー(lの、光半導体
が固定された基台IJIに固着している。これは光学レ
ンズにメタライズを施すことなく信頼性の高いメタル固
定が可能だが、固定面の一部で半田付している九め非対
称的であf)、温度変化による熱膨張によ9球レンズの
位置ずれを起こすという欠点があった。特にシングルモ
ードファイバ全相いた場合には、ファイバのコア径が1
0μm程度と非常に小さいので。In order to realize optical fiber communication, it is important to connect optical fibers and semiconductor optical devices stably and with high efficiency. Among these, a structure as shown in FIG. 4 has been conventionally adopted for fixing an optical lens having a light condensing and collimating function. In other words, the spherical lens α1) is fixed to the base IJI on which the optical semiconductor is fixed in the holder (l) held inside the hole opened in the optical axis direction. Although it is possible to fix the lens with a highly durable metal, it is asymmetrical as a part of the fixing surface is soldered (f), and has the disadvantage that thermal expansion caused by temperature changes can cause the nine-ball lens to shift in position. Especially when there is a single mode fiber in all phases, the fiber core diameter is 1
It is very small, about 0 μm.
球レンズのわずかな位置ずれでも結合特性に大きな影響
ヲ及ぼす。加えて球レンズとホルダーの穴には精密な寸
法合わせが必要なので高い加工精度が要求され高価であ
る。さらにこのような構造では光軸方向の球レンズ−光
半導体素子間距離の調整が難しい、また、製造の際には
球レンズをホルダーに圧入等であらかじめ封入しておく
工程が必要であり、半田付の際の温度上昇により光半導
体素子の劣化全相き、歩留まりが悪いという欠点がある
。地紋的温度上昇の少ない抵抗加熱法によるキャップを
固着は1球レンズが光軸方向にずれる可能性があり、固
定精度が悪くなる。Even a slight misalignment of the ball lens has a large effect on the coupling characteristics. In addition, the holes in the ball lens and holder require precise dimensional alignment, which requires high processing accuracy and is expensive. Furthermore, with such a structure, it is difficult to adjust the distance between the ball lens and the optical semiconductor element in the optical axis direction, and during manufacturing, a process of press-fitting the ball lens into the holder is required, which requires soldering. The drawback is that the temperature rise during deposition causes complete deterioration of the optical semiconductor element, resulting in poor yield. If the cap is fixed using the resistance heating method, which causes a small temperature increase due to tint marks, there is a possibility that the single-ball lens will shift in the optical axis direction, and the fixing accuracy will deteriorate.
この発明は上述した問題点を改良したもので、温度特性
がよく安価で、生産性のよい光学itおよびその製造方
法を提供することを目的とする。This invention improves the above-mentioned problems, and aims to provide an optical IT with good temperature characteristics, low cost, and high productivity, and a method for manufacturing the same.
光半導体素子が固定された基台上の所定の位置で光学レ
ンズの位置決めに使われている穴?有するキャップが弾
性的に曲げられ基台との間で光学レンズを押え込んだ状
態で固定されたものである。A hole used to position an optical lens at a predetermined position on a base to which an optical semiconductor element is fixed? The optical lens is fixed in a state in which the cap is elastically bent and the optical lens is pressed between it and the base.
さらに製法として、空気を吸引する際の圧力差を利用し
て、キャップを吸い口に吸着し、さらにキャップに設け
られた穴全通して光学レンズを吸着した状態で、光半導
体素子が固定されている基台上の所定の位置に光学レン
ズを設置しつつ、キャップを弾性的に変形し基台と接触
した部分で抵抗加熱、半田付、レーザ溶接、レーザ半田
付のいずれからの方法によって固着することによって製
作できる。また、キャップ固着後、にキャップに設けら
れた穴に半田または溶融ガラスを流し込みキャップと光
学レンズとを固定し、固定強度を、増しても良い。Furthermore, the manufacturing method uses the pressure difference when sucking air to attach the cap to the mouthpiece, and then the optical semiconductor element is fixed with the optical lens attached through the entire hole provided in the cap. While installing the optical lens in a predetermined position on the base, the cap is elastically deformed and fixed at the part where it contacts the base by resistance heating, soldering, laser welding, or laser soldering. It can be manufactured by Further, after fixing the cap, solder or molten glass may be poured into the hole provided in the cap to fix the cap and the optical lens to increase the fixing strength.
本発明による光学装置およびその製造方法によれば、光
学レンズをキャップの曲げによる弾性力によって基台上
に固定されているので、温度変化で生じる材質の熱膨張
による光学レンズの位置ずれを吸収することができ、信
頼性を高めることができる。ま比圧力差を作ってキャッ
プおよび光学レンズを吸着する方法はそれらの着脱全容
易にしたばかシでなく、メタル固定のために用いる部材
であるキャップと光学レンズをあらかじめ固定しておく
という工程を省いた。これにより、キャップに高い寸法
精度は必要なくなシ安家に製作することが可能となる。According to the optical device and the manufacturing method thereof according to the present invention, since the optical lens is fixed on the base by the elastic force caused by bending the cap, the positional shift of the optical lens due to thermal expansion of the material caused by temperature change can be absorbed. can improve reliability. The method of adsorbing the cap and optical lens by creating a specific pressure difference does not make it easy to attach and detach them, but it involves a process of fixing the cap and optical lens, which are the members used for fixing the metal, in advance. I omitted it. As a result, the cap does not require high dimensional accuracy and can be manufactured in a simple manner.
さらにキャップの固定時にレンズの位置ずれ全おこさず
に抵抗加熱法により固、定できるので、熱による光半導
体素子の劣化を防ぎ歩留まシラ向上させることができる
。Furthermore, since the cap can be fixed by resistance heating without causing any displacement of the lens when fixing the cap, it is possible to prevent deterioration of the optical semiconductor element due to heat and improve yield.
本発明の一実施例を、光半導体素子として半導体レーザ
、光学レンズとして球レンズを使った場合について第1
図を用い詳細に説明する。図において(1)は球レンズ
、(2)はキャップ、13)は基台、(4)は半導体レ
ーザチップ・である。キャップ(2)に設けられ丸球レ
ンズの直径よりも小さい径の穴(2a)の周上で球レン
ズ用と接することで、キャップ(2)と球レンズ(1)
の位置決めが行なわれ、半導体レーザチップ(4)が設
置された基台(3)上に球レンズ(1)がキャップ(2
)の変形による弾性力で固定されている。A first embodiment of the present invention will be described in the case where a semiconductor laser is used as an optical semiconductor element and a ball lens is used as an optical lens.
This will be explained in detail using figures. In the figure, (1) is a ball lens, (2) is a cap, 13) is a base, and (4) is a semiconductor laser chip. The cap (2) and the ball lens (1) are connected to each other by contacting the ball lens on the circumference of the hole (2a) provided in the cap (2) and having a diameter smaller than the diameter of the round ball lens.
The ball lens (1) is placed on the base (3) on which the semiconductor laser chip (4) is placed.
) is fixed by the elastic force caused by the deformation of
ここでキャップ(2)は変形された状iηで基台(3)
に固着されている。この構造によれば2球レンズ(1)
ト半導体し−ザチップ間の距離をかえるだけで、同じ傳
成部品で集光にもコリメートにも用いることができる。Here, the cap (2) is in a deformed state iη and the base (3) is
is fixed to. According to this structure, two-ball lens (1)
By simply changing the distance between the semiconductor chip and the chip, the same manufacturing component can be used for both light collection and collimation.
キャップにあけられた穴の径は球レンズよシも小されけ
ばよく、はめ合いの場合のようにお互いの寸法合わせは
不必要で、外形寸法にも高い加工精度は要求されないの
で、プレス加工等で作製でき大量生産の際には安価にな
る。また、半導体レーザチップの発光面光学レンズとは
空間的に離れているので5発光面に直接接着剤で固定し
た場合に生じるような半導体レーザチップの劣化も起こ
らず長時間使用した場合でもチップの本第の特性をそこ
なわずに使用できる。The diameter of the hole drilled in the cap only needs to be smaller than that of the spherical lens, and there is no need to match each other's dimensions as in the case of fitting, and high processing accuracy is not required for the external dimensions, so press processing is used. It can be manufactured using similar methods, and is inexpensive when mass-produced. In addition, since the light-emitting surface of the semiconductor laser chip is spatially separated from the optical lens, the semiconductor laser chip does not deteriorate as would occur if it were directly fixed to the light-emitting surface with adhesive. It can be used without damaging the first characteristic.
第2図にこの構造体を製作する工程の1例を示す。第1
の工程(同図(a)参照)で、真空ポンプに接続されて
いる吸引パイプ(5)の先端に゛まずキャップ(2)全
吸着し5次にレンズの位置決め用の穴(2a)を通して
球レンズ(1)ヲキャップ(2)内側に吸着する。FIG. 2 shows an example of the process for manufacturing this structure. 1st
In the process (see figure (a)), the cap (2) is first fully adsorbed on the tip of the suction pipe (5) connected to the vacuum pump, and then the bulb is inserted through the lens positioning hole (2a). Attach the lens (1) to the inside of the cap (2).
第2の工程(同図(b)参照)では1発行可能な状態に
吹るように基台(3)に半田付し、リードa(6)を付
けられた半導体レーザチップに電源(7)全接続し、順
方向電流を流して発光させ吸着した球しン、ズ(1)全
基台上で発光部分に近づける。キャップ内側の寸法は球
レンズのみが基台に接するような長さにしておく。そし
て球レンズ(1)全通過したレーザ光をモニタしながら
1球レンズ(1)と基台(3)との位置を相互に変化さ
せ、最適位置を見つける。第3の工程(同図(b)参照
)では最適位置において吸引パイプ(5)を下方に移動
しキャップ(2)に圧力を加えて弾性変形させ基台(3
)にキャップを接触させる。この状態でキャップ(2)
から基台に電流を流し抵抗加熱によってキャップ(2)
と基台(3)全固着する。固着には半田付、レーザ溶接
、レーザ半田付の手法も用いられる。さらに位置決め用
の穴(2a)に半田。In the second step (see (b) in the same figure), the laser chip is soldered to the base (3) so that it can be printed, and the semiconductor laser chip with the lead a (6) is connected to the power supply (7). All connections are made, and a forward current is applied to make the bulbs emit light and the attached bulbs (1) are brought close to the light emitting part on the base. The inside dimensions of the cap should be long enough so that only the ball lens touches the base. Then, while monitoring the laser light that has completely passed through the ball lens (1), the positions of the ball lens (1) and the base (3) are mutually changed to find the optimum position. In the third step (see figure (b)), the suction pipe (5) is moved downward at the optimum position, pressure is applied to the cap (2), the cap (2) is elastically deformed, and the base (3) is moved downward.
). Cap (2) in this state
The cap (2) is heated by resistance heating by passing a current through the base.
and the base (3) are completely fixed. Soldering, laser welding, and laser soldering methods are also used for fixing. Furthermore, solder to the positioning hole (2a).
溶融ガラス全光し込めば1球レンズ(1)とキャップ(
2)の固定強度を増すことができる。この製造方法によ
れば2位置決めしつつ球レンズを固定するので、高精度
での球レンズの固定かり能であり、キャップの弾性力に
よって球レンズを固定しているので温度特性がよく、固
定時に部材の変位をともなうが局所的な加熱のできる抵
抗加熱法を用いることができる。また吸着パイプ(5)
は、抵抗加熱の際の電極と圧力を加える作用体もかねて
させることができるので製造用の治具も簡単にできる。If all the light enters the molten glass, it will be a one-ball lens (1) and a cap (
2) The fixing strength can be increased. According to this manufacturing method, the ball lens is fixed while positioning in two positions, so it is possible to fix the ball lens with high precision.The ball lens is fixed by the elastic force of the cap, so the temperature characteristics are good, and when it is fixed, A resistance heating method that involves displacement of the member but allows local heating can be used. Also adsorption pipe (5)
Since the electrode for resistance heating and the effecting body for applying pressure can also be used, manufacturing jigs can be easily created.
吸着に真空を利用することはキャップ、レンズの脱着が
行ないやすく作業性に秀れているという利点をもってい
る。Using a vacuum for suction has the advantage that it is easy to attach and detach the cap and lens, making it highly workable.
さらに本発明の他の実施例を第3図に示す。光学レンズ
としてロッドレンズ(8)とした場合で、キャップ(9
)には、ロッドレンズ(8)の位置決めを行なうための
溝(9a)および吸引口として用いられる穴(9b)が
設けられている。このようにキャップに溝を設けること
によ9球以外の光学レンズを固定することができる。Further, another embodiment of the present invention is shown in FIG. When the rod lens (8) is used as an optical lens, the cap (9)
) is provided with a groove (9a) for positioning the rod lens (8) and a hole (9b) used as a suction port. By providing the groove in the cap in this way, optical lenses other than 9-ball lenses can be fixed.
第1図は本発明による光学レンズ固定構造体の一実施例
を示す図。
第2図は本発明による光学レンズ固定構造体の製造方法
の一実施例を示す図、第3図は本発明の他の実施例を示
す図、第4図は従来例を示す図である。
1・・・球レンズ、2,9・・・キャップ、 2a・
・・キャップに設けられた穴、3・・・基台、4・・・
半導体レーザチップ、5・・・吸引パイプ、6・・・リ
ード線、7・・・電源。
8・・・ロッドレンズ、 9a・・・キャップに設け
られた溝。
代理人 弁理士 則 近 憲 佑
同 竹 花 喜久男
第 1 図
?
(0,)
第 2 図
’ (b)
g2図
第 4 図FIG. 1 is a diagram showing an embodiment of an optical lens fixing structure according to the present invention. FIG. 2 is a diagram showing one embodiment of the method for manufacturing an optical lens fixing structure according to the present invention, FIG. 3 is a diagram showing another embodiment of the present invention, and FIG. 4 is a diagram showing a conventional example. 1... Ball lens, 2, 9... Cap, 2a.
... Hole provided in the cap, 3... Base, 4...
Semiconductor laser chip, 5... Suction pipe, 6... Lead wire, 7... Power supply. 8... Rod lens, 9a... Groove provided in the cap. Agent Patent Attorney Noriyuki Chika Yudo Kikuo Takehana Figure 1? (0,) Figure 2' (b) Figure g2 Figure 4
Claims (7)
に設置した光学レンズと、この光学レンズの位置決めに
使われている穴または溝を有するキャップを具備し、前
記キャップが弾性的に曲げられ前記光学レンズを押えた
状態で前記基台に固着されていることを特徴とする光学
装置。(1) A base, an optical semiconductor element, an optical lens installed at a predetermined position on the base, and a cap having a hole or groove used for positioning the optical lens, and the cap has an elastic An optical device, characterized in that the optical device is fixed to the base in a state in which the optical lens is bent and pressed down.
ことを特徴とする特許請求の範囲第1項記載の光学装置
。(2) The optical device according to claim 1, wherein the cap and the optical lens are fixed to each other.
受光素子であることを特徴とする特許請求の範囲第1項
記載の光学装置。(3) The optical device according to claim 1, wherein the optical semiconductor element is a semiconductor light emitting element or a semiconductor light receiving element.
光学レンズを吸着した状態で前記光学レンズの位置決め
を行ないつつ、前記キャップを弾性変形させ光半導体素
子が固定された基台上に、固着することを特徴とする光
学装置の製造方法。(4) While positioning the optical lens while adsorbing the optical lens through the cap and the hole provided in the cap, elastically deforming the cap and fixing it on the base on which the optical semiconductor element is fixed. A method for manufacturing an optical device characterized by:
を吸引することで行なうことを特徴とする特許請求の範
囲第4項記載の光学装置の製造方法。(5) The method for manufacturing an optical device according to claim 4, wherein the cap and the optical lens are attracted to each other by suctioning air.
溶接、レーザ半田付のいずれかによって固着することを
特徴とする特許請求の範囲第4項記載の光学装置の製造
方法。(6) The method of manufacturing an optical device according to claim 4, wherein the cap is fixed by any one of resistance heating, soldering, laser welding, and laser soldering.
ャップと前記基台の固着後に半田付または溶融石英を用
いて行なうことを特徴とする特許請求の範囲第4項記載
の光学装置の製造方法。(7) The method for manufacturing an optical device according to claim 4, wherein the cap and the optical lens are fixed together by soldering or fused silica after the cap and the base are fixed. .
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60290727A JPS62150894A (en) | 1985-12-25 | 1985-12-25 | Optical device and manufacture thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60290727A JPS62150894A (en) | 1985-12-25 | 1985-12-25 | Optical device and manufacture thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62150894A true JPS62150894A (en) | 1987-07-04 |
Family
ID=17759740
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60290727A Pending JPS62150894A (en) | 1985-12-25 | 1985-12-25 | Optical device and manufacture thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62150894A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01196187A (en) * | 1988-02-01 | 1989-08-07 | Sumitomo Electric Ind Ltd | Optical apparatus and its manufacture |
WO2007036193A1 (en) * | 2005-09-30 | 2007-04-05 | Osram Opto Semiconductors Gmbh | Radiation-emitting element and method for producing a radiation-emitting element |
-
1985
- 1985-12-25 JP JP60290727A patent/JPS62150894A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01196187A (en) * | 1988-02-01 | 1989-08-07 | Sumitomo Electric Ind Ltd | Optical apparatus and its manufacture |
WO2007036193A1 (en) * | 2005-09-30 | 2007-04-05 | Osram Opto Semiconductors Gmbh | Radiation-emitting element and method for producing a radiation-emitting element |
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