JPS62150085U - - Google Patents

Info

Publication number
JPS62150085U
JPS62150085U JP3840986U JP3840986U JPS62150085U JP S62150085 U JPS62150085 U JP S62150085U JP 3840986 U JP3840986 U JP 3840986U JP 3840986 U JP3840986 U JP 3840986U JP S62150085 U JPS62150085 U JP S62150085U
Authority
JP
Japan
Prior art keywords
unit
axial direction
movable
movable body
main body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3840986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3840986U priority Critical patent/JPS62150085U/ja
Publication of JPS62150085U publication Critical patent/JPS62150085U/ja
Pending legal-status Critical Current

Links

JP3840986U 1986-03-18 1986-03-18 Pending JPS62150085U (ro)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3840986U JPS62150085U (ro) 1986-03-18 1986-03-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3840986U JPS62150085U (ro) 1986-03-18 1986-03-18

Publications (1)

Publication Number Publication Date
JPS62150085U true JPS62150085U (ro) 1987-09-22

Family

ID=30850625

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3840986U Pending JPS62150085U (ro) 1986-03-18 1986-03-18

Country Status (1)

Country Link
JP (1) JPS62150085U (ro)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012256955A (ja) * 2002-07-19 2012-12-27 Fuji Mach Mfg Co Ltd 対基板作業システム
JP5896369B1 (ja) * 2015-08-24 2016-03-30 豊明工業株式会社 伸縮搬送装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012256955A (ja) * 2002-07-19 2012-12-27 Fuji Mach Mfg Co Ltd 対基板作業システム
JP5896369B1 (ja) * 2015-08-24 2016-03-30 豊明工業株式会社 伸縮搬送装置
JP2017043423A (ja) * 2015-08-24 2017-03-02 豊明工業株式会社 伸縮搬送装置

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