JPS62149798U - - Google Patents
Info
- Publication number
- JPS62149798U JPS62149798U JP3814486U JP3814486U JPS62149798U JP S62149798 U JPS62149798 U JP S62149798U JP 3814486 U JP3814486 U JP 3814486U JP 3814486 U JP3814486 U JP 3814486U JP S62149798 U JPS62149798 U JP S62149798U
- Authority
- JP
- Japan
- Prior art keywords
- tube
- exhaust pipe
- heating chamber
- gas exhaust
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000012495 reaction gas Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims description 2
- 230000001681 protective effect Effects 0.000 claims description 2
- 238000011144 upstream manufacturing Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3814486U JPH0440160Y2 (fr) | 1986-03-14 | 1986-03-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3814486U JPH0440160Y2 (fr) | 1986-03-14 | 1986-03-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62149798U true JPS62149798U (fr) | 1987-09-22 |
| JPH0440160Y2 JPH0440160Y2 (fr) | 1992-09-21 |
Family
ID=30850111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3814486U Expired JPH0440160Y2 (fr) | 1986-03-14 | 1986-03-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0440160Y2 (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997031389A1 (fr) * | 1996-02-23 | 1997-08-28 | Tokyo Electron Limited | Dispositif de traitement thermique |
| JP2007205691A (ja) * | 2006-02-06 | 2007-08-16 | Furukawa Electric Co Ltd:The | グラファイト加熱炉 |
-
1986
- 1986-03-14 JP JP3814486U patent/JPH0440160Y2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997031389A1 (fr) * | 1996-02-23 | 1997-08-28 | Tokyo Electron Limited | Dispositif de traitement thermique |
| JP2007205691A (ja) * | 2006-02-06 | 2007-08-16 | Furukawa Electric Co Ltd:The | グラファイト加熱炉 |
| US8549886B2 (en) | 2006-02-06 | 2013-10-08 | The Furukawa Electric Co., Ltd. | Graphite heating furnace |
| US9458051B2 (en) | 2006-02-06 | 2016-10-04 | Furukawa Electric Co., Ltd. | Graphite heating furnace |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0440160Y2 (fr) | 1992-09-21 |