JPS62149138U - - Google Patents

Info

Publication number
JPS62149138U
JPS62149138U JP3649086U JP3649086U JPS62149138U JP S62149138 U JPS62149138 U JP S62149138U JP 3649086 U JP3649086 U JP 3649086U JP 3649086 U JP3649086 U JP 3649086U JP S62149138 U JPS62149138 U JP S62149138U
Authority
JP
Japan
Prior art keywords
fixed
piezoelectric
drive
thermal expansion
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3649086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3649086U priority Critical patent/JPS62149138U/ja
Publication of JPS62149138U publication Critical patent/JPS62149138U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Micromachines (AREA)
JP3649086U 1986-03-12 1986-03-12 Pending JPS62149138U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3649086U JPS62149138U (enrdf_load_stackoverflow) 1986-03-12 1986-03-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3649086U JPS62149138U (enrdf_load_stackoverflow) 1986-03-12 1986-03-12

Publications (1)

Publication Number Publication Date
JPS62149138U true JPS62149138U (enrdf_load_stackoverflow) 1987-09-21

Family

ID=30846937

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3649086U Pending JPS62149138U (enrdf_load_stackoverflow) 1986-03-12 1986-03-12

Country Status (1)

Country Link
JP (1) JPS62149138U (enrdf_load_stackoverflow)

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