JPS62149138U - - Google Patents
Info
- Publication number
- JPS62149138U JPS62149138U JP3649086U JP3649086U JPS62149138U JP S62149138 U JPS62149138 U JP S62149138U JP 3649086 U JP3649086 U JP 3649086U JP 3649086 U JP3649086 U JP 3649086U JP S62149138 U JPS62149138 U JP S62149138U
- Authority
- JP
- Japan
- Prior art keywords
- fixed
- piezoelectric
- drive
- thermal expansion
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- Micromachines (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3649086U JPS62149138U (OSRAM) | 1986-03-12 | 1986-03-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3649086U JPS62149138U (OSRAM) | 1986-03-12 | 1986-03-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62149138U true JPS62149138U (OSRAM) | 1987-09-21 |
Family
ID=30846937
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3649086U Pending JPS62149138U (OSRAM) | 1986-03-12 | 1986-03-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62149138U (OSRAM) |
-
1986
- 1986-03-12 JP JP3649086U patent/JPS62149138U/ja active Pending
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