JPS62149044U - - Google Patents

Info

Publication number
JPS62149044U
JPS62149044U JP1986036144U JP3614486U JPS62149044U JP S62149044 U JPS62149044 U JP S62149044U JP 1986036144 U JP1986036144 U JP 1986036144U JP 3614486 U JP3614486 U JP 3614486U JP S62149044 U JPS62149044 U JP S62149044U
Authority
JP
Japan
Prior art keywords
pellicle body
frame
cleaned
joined
pellicle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986036144U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0529474Y2 (US08197722-20120612-C00042.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986036144U priority Critical patent/JPH0529474Y2/ja
Publication of JPS62149044U publication Critical patent/JPS62149044U/ja
Application granted granted Critical
Publication of JPH0529474Y2 publication Critical patent/JPH0529474Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP1986036144U 1986-03-14 1986-03-14 Expired - Lifetime JPH0529474Y2 (US08197722-20120612-C00042.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986036144U JPH0529474Y2 (US08197722-20120612-C00042.png) 1986-03-14 1986-03-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986036144U JPH0529474Y2 (US08197722-20120612-C00042.png) 1986-03-14 1986-03-14

Publications (2)

Publication Number Publication Date
JPS62149044U true JPS62149044U (US08197722-20120612-C00042.png) 1987-09-21
JPH0529474Y2 JPH0529474Y2 (US08197722-20120612-C00042.png) 1993-07-28

Family

ID=30846276

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986036144U Expired - Lifetime JPH0529474Y2 (US08197722-20120612-C00042.png) 1986-03-14 1986-03-14

Country Status (1)

Country Link
JP (1) JPH0529474Y2 (US08197722-20120612-C00042.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60237450A (ja) * 1984-05-11 1985-11-26 Asahi Chem Ind Co Ltd 非反射性フオトマスク・レチクル用防塵カバ−体及びその製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60237450A (ja) * 1984-05-11 1985-11-26 Asahi Chem Ind Co Ltd 非反射性フオトマスク・レチクル用防塵カバ−体及びその製造方法

Also Published As

Publication number Publication date
JPH0529474Y2 (US08197722-20120612-C00042.png) 1993-07-28

Similar Documents

Publication Publication Date Title
JPS62149044U (US08197722-20120612-C00042.png)
JPS62149043U (US08197722-20120612-C00042.png)
JPH0221649U (US08197722-20120612-C00042.png)
JPS641928U (US08197722-20120612-C00042.png)
JPS6189854U (US08197722-20120612-C00042.png)
JPS6214451U (US08197722-20120612-C00042.png)
JPS6333154U (US08197722-20120612-C00042.png)
JPS63100735U (US08197722-20120612-C00042.png)
JPH0294660U (US08197722-20120612-C00042.png)
JPH0335522U (US08197722-20120612-C00042.png)
JPS62151567U (US08197722-20120612-C00042.png)
JPH02121771U (US08197722-20120612-C00042.png)
JPH042055U (US08197722-20120612-C00042.png)
JPH049051U (US08197722-20120612-C00042.png)
JPS62157095U (US08197722-20120612-C00042.png)
JPS62124752U (US08197722-20120612-C00042.png)
JPH03103443U (US08197722-20120612-C00042.png)
JPS6214450U (US08197722-20120612-C00042.png)
JPH0187563U (US08197722-20120612-C00042.png)
JPH03125100U (US08197722-20120612-C00042.png)
JPS62113787U (US08197722-20120612-C00042.png)
JPS643425U (US08197722-20120612-C00042.png)
JPS638694U (US08197722-20120612-C00042.png)
JPH0242657U (US08197722-20120612-C00042.png)
JPS6211468U (US08197722-20120612-C00042.png)