JPS62148945U - - Google Patents
Info
- Publication number
- JPS62148945U JPS62148945U JP3530886U JP3530886U JPS62148945U JP S62148945 U JPS62148945 U JP S62148945U JP 3530886 U JP3530886 U JP 3530886U JP 3530886 U JP3530886 U JP 3530886U JP S62148945 U JPS62148945 U JP S62148945U
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- drive means
- respect
- rotatable
- illumination system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005286 illumination Methods 0.000 claims description 4
- 238000003384 imaging method Methods 0.000 claims description 2
- 238000007689 inspection Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3530886U JPS62148945U (enExample) | 1986-03-13 | 1986-03-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3530886U JPS62148945U (enExample) | 1986-03-13 | 1986-03-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62148945U true JPS62148945U (enExample) | 1987-09-21 |
Family
ID=30844681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3530886U Pending JPS62148945U (enExample) | 1986-03-13 | 1986-03-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62148945U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008014848A (ja) * | 2006-07-07 | 2008-01-24 | Hitachi High-Technologies Corp | 表面検査方法及び表面検査装置 |
-
1986
- 1986-03-13 JP JP3530886U patent/JPS62148945U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008014848A (ja) * | 2006-07-07 | 2008-01-24 | Hitachi High-Technologies Corp | 表面検査方法及び表面検査装置 |