JPS62148932U - - Google Patents

Info

Publication number

JPS62148932U

JPS62148932U JP3642086U JP3642086U JPS62148932U JP S62148932 U JPS62148932 U JP S62148932U JP 3642086 U JP3642086 U JP 3642086U JP 3642086 U JP3642086 U JP 3642086U JP S62148932 U JPS62148932 U JP S62148932U

Authority

JP

Japan

Prior art keywords

crystal

crystal oscillator

gas

pressure sensor

pressure

Prior art date

1986-03-13

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000013078 crystal Substances 0.000 claims description 11
• 229910052581 Si3N4 Inorganic materials 0.000 claims description 2
• HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 2
• 239000010453 quartz Substances 0.000 claims 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
• 239000011521 glass Substances 0.000 description 1
• WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1