JPS62147453U - - Google Patents

Info

Publication number
JPS62147453U
JPS62147453U JP1986035615U JP3561586U JPS62147453U JP S62147453 U JPS62147453 U JP S62147453U JP 1986035615 U JP1986035615 U JP 1986035615U JP 3561586 U JP3561586 U JP 3561586U JP S62147453 U JPS62147453 U JP S62147453U
Authority
JP
Japan
Prior art keywords
cleaning
liquid
substrate
supply port
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986035615U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986035615U priority Critical patent/JPS62147453U/ja
Publication of JPS62147453U publication Critical patent/JPS62147453U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP1986035615U 1986-03-11 1986-03-11 Pending JPS62147453U (US20110009641A1-20110113-C00185.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986035615U JPS62147453U (US20110009641A1-20110113-C00185.png) 1986-03-11 1986-03-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986035615U JPS62147453U (US20110009641A1-20110113-C00185.png) 1986-03-11 1986-03-11

Publications (1)

Publication Number Publication Date
JPS62147453U true JPS62147453U (US20110009641A1-20110113-C00185.png) 1987-09-17

Family

ID=30845265

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986035615U Pending JPS62147453U (US20110009641A1-20110113-C00185.png) 1986-03-11 1986-03-11

Country Status (1)

Country Link
JP (1) JPS62147453U (US20110009641A1-20110113-C00185.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05243198A (ja) * 1992-02-27 1993-09-21 Nec Corp 半導体素子剥離洗浄治具

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05243198A (ja) * 1992-02-27 1993-09-21 Nec Corp 半導体素子剥離洗浄治具

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