JPS62147259U - - Google Patents

Info

Publication number
JPS62147259U
JPS62147259U JP3567486U JP3567486U JPS62147259U JP S62147259 U JPS62147259 U JP S62147259U JP 3567486 U JP3567486 U JP 3567486U JP 3567486 U JP3567486 U JP 3567486U JP S62147259 U JPS62147259 U JP S62147259U
Authority
JP
Japan
Prior art keywords
electron beam
plasma electron
sealing material
heat
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3567486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3567486U priority Critical patent/JPS62147259U/ja
Publication of JPS62147259U publication Critical patent/JPS62147259U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP3567486U 1986-03-12 1986-03-12 Pending JPS62147259U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3567486U JPS62147259U (enrdf_load_stackoverflow) 1986-03-12 1986-03-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3567486U JPS62147259U (enrdf_load_stackoverflow) 1986-03-12 1986-03-12

Publications (1)

Publication Number Publication Date
JPS62147259U true JPS62147259U (enrdf_load_stackoverflow) 1987-09-17

Family

ID=30845371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3567486U Pending JPS62147259U (enrdf_load_stackoverflow) 1986-03-12 1986-03-12

Country Status (1)

Country Link
JP (1) JPS62147259U (enrdf_load_stackoverflow)

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