JPS62147259U - - Google Patents
Info
- Publication number
- JPS62147259U JPS62147259U JP3567486U JP3567486U JPS62147259U JP S62147259 U JPS62147259 U JP S62147259U JP 3567486 U JP3567486 U JP 3567486U JP 3567486 U JP3567486 U JP 3567486U JP S62147259 U JPS62147259 U JP S62147259U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- plasma electron
- sealing material
- heat
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims 1
- 239000003566 sealing material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3567486U JPS62147259U (cs) | 1986-03-12 | 1986-03-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3567486U JPS62147259U (cs) | 1986-03-12 | 1986-03-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62147259U true JPS62147259U (cs) | 1987-09-17 |
Family
ID=30845371
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3567486U Pending JPS62147259U (cs) | 1986-03-12 | 1986-03-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62147259U (cs) |
-
1986
- 1986-03-12 JP JP3567486U patent/JPS62147259U/ja active Pending
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