JPS6214722U - - Google Patents
Info
- Publication number
- JPS6214722U JPS6214722U JP10655685U JP10655685U JPS6214722U JP S6214722 U JPS6214722 U JP S6214722U JP 10655685 U JP10655685 U JP 10655685U JP 10655685 U JP10655685 U JP 10655685U JP S6214722 U JPS6214722 U JP S6214722U
- Authority
- JP
- Japan
- Prior art keywords
- layer
- ppm
- group content
- quartz glass
- core tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
Landscapes
- Heat Treatments In General, Especially Conveying And Cooling (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985106556U JPH0739227Y2 (ja) | 1985-07-12 | 1985-07-12 | 多層構造の石英ガラス製炉芯管 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985106556U JPH0739227Y2 (ja) | 1985-07-12 | 1985-07-12 | 多層構造の石英ガラス製炉芯管 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6214722U true JPS6214722U (enrdf_load_stackoverflow) | 1987-01-29 |
JPH0739227Y2 JPH0739227Y2 (ja) | 1995-09-06 |
Family
ID=30982026
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985106556U Expired - Lifetime JPH0739227Y2 (ja) | 1985-07-12 | 1985-07-12 | 多層構造の石英ガラス製炉芯管 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0739227Y2 (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0387020A (ja) * | 1989-06-13 | 1991-04-11 | Shinetsu Sekiei Kk | 半導体熱処理用石英ガラス部材及びその製造方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5917242A (ja) * | 1982-07-20 | 1984-01-28 | Toshiba Ceramics Co Ltd | 半導体製造用石英ガラス |
-
1985
- 1985-07-12 JP JP1985106556U patent/JPH0739227Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5917242A (ja) * | 1982-07-20 | 1984-01-28 | Toshiba Ceramics Co Ltd | 半導体製造用石英ガラス |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0387020A (ja) * | 1989-06-13 | 1991-04-11 | Shinetsu Sekiei Kk | 半導体熱処理用石英ガラス部材及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0739227Y2 (ja) | 1995-09-06 |