JPS6214722U - - Google Patents

Info

Publication number
JPS6214722U
JPS6214722U JP10655685U JP10655685U JPS6214722U JP S6214722 U JPS6214722 U JP S6214722U JP 10655685 U JP10655685 U JP 10655685U JP 10655685 U JP10655685 U JP 10655685U JP S6214722 U JPS6214722 U JP S6214722U
Authority
JP
Japan
Prior art keywords
layer
ppm
group content
quartz glass
core tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10655685U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0739227Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985106556U priority Critical patent/JPH0739227Y2/ja
Publication of JPS6214722U publication Critical patent/JPS6214722U/ja
Application granted granted Critical
Publication of JPH0739227Y2 publication Critical patent/JPH0739227Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Heat Treatments In General, Especially Conveying And Cooling (AREA)
JP1985106556U 1985-07-12 1985-07-12 多層構造の石英ガラス製炉芯管 Expired - Lifetime JPH0739227Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985106556U JPH0739227Y2 (ja) 1985-07-12 1985-07-12 多層構造の石英ガラス製炉芯管

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985106556U JPH0739227Y2 (ja) 1985-07-12 1985-07-12 多層構造の石英ガラス製炉芯管

Publications (2)

Publication Number Publication Date
JPS6214722U true JPS6214722U (enrdf_load_stackoverflow) 1987-01-29
JPH0739227Y2 JPH0739227Y2 (ja) 1995-09-06

Family

ID=30982026

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985106556U Expired - Lifetime JPH0739227Y2 (ja) 1985-07-12 1985-07-12 多層構造の石英ガラス製炉芯管

Country Status (1)

Country Link
JP (1) JPH0739227Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0387020A (ja) * 1989-06-13 1991-04-11 Shinetsu Sekiei Kk 半導体熱処理用石英ガラス部材及びその製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5917242A (ja) * 1982-07-20 1984-01-28 Toshiba Ceramics Co Ltd 半導体製造用石英ガラス

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5917242A (ja) * 1982-07-20 1984-01-28 Toshiba Ceramics Co Ltd 半導体製造用石英ガラス

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0387020A (ja) * 1989-06-13 1991-04-11 Shinetsu Sekiei Kk 半導体熱処理用石英ガラス部材及びその製造方法

Also Published As

Publication number Publication date
JPH0739227Y2 (ja) 1995-09-06

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