JPS6214708Y2 - - Google Patents
Info
- Publication number
- JPS6214708Y2 JPS6214708Y2 JP4051182U JP4051182U JPS6214708Y2 JP S6214708 Y2 JPS6214708 Y2 JP S6214708Y2 JP 4051182 U JP4051182 U JP 4051182U JP 4051182 U JP4051182 U JP 4051182U JP S6214708 Y2 JPS6214708 Y2 JP S6214708Y2
- Authority
- JP
- Japan
- Prior art keywords
- photoelectric conversion
- film
- conversion element
- transparent conductive
- insulating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006243 chemical reaction Methods 0.000 claims description 41
- 239000010408 film Substances 0.000 claims description 33
- 239000000463 material Substances 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 19
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 7
- 238000000605 extraction Methods 0.000 claims description 2
- 239000002184 metal Substances 0.000 description 10
- 229910052751 metal Inorganic materials 0.000 description 10
- 230000003287 optical effect Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 238000003491 array Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 229910006404 SnO 2 Inorganic materials 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- -1 ITO Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- UHYPYGJEEGLRJD-UHFFFAOYSA-N cadmium(2+);selenium(2-) Chemical compound [Se-2].[Cd+2] UHYPYGJEEGLRJD-UHFFFAOYSA-N 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Facsimile Heads (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4051182U JPS58142948U (ja) | 1982-03-23 | 1982-03-23 | 薄膜形光電変換素子アレイ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4051182U JPS58142948U (ja) | 1982-03-23 | 1982-03-23 | 薄膜形光電変換素子アレイ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58142948U JPS58142948U (ja) | 1983-09-27 |
| JPS6214708Y2 true JPS6214708Y2 (de) | 1987-04-15 |
Family
ID=30051726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4051182U Granted JPS58142948U (ja) | 1982-03-23 | 1982-03-23 | 薄膜形光電変換素子アレイ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58142948U (de) |
-
1982
- 1982-03-23 JP JP4051182U patent/JPS58142948U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58142948U (ja) | 1983-09-27 |
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