JPS62146207U - - Google Patents
Info
- Publication number
- JPS62146207U JPS62146207U JP2949386U JP2949386U JPS62146207U JP S62146207 U JPS62146207 U JP S62146207U JP 2949386 U JP2949386 U JP 2949386U JP 2949386 U JP2949386 U JP 2949386U JP S62146207 U JPS62146207 U JP S62146207U
- Authority
- JP
- Japan
- Prior art keywords
- heat
- sensitive element
- actuator
- thermal expansion
- electrode plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000004913 activation Effects 0.000 claims description 3
- 230000003111 delayed effect Effects 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Resistance Heating (AREA)
- Control Of Position Or Direction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2949386U JPS62146207U (un) | 1986-03-01 | 1986-03-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2949386U JPS62146207U (un) | 1986-03-01 | 1986-03-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62146207U true JPS62146207U (un) | 1987-09-16 |
Family
ID=30833423
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2949386U Pending JPS62146207U (un) | 1986-03-01 | 1986-03-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62146207U (un) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006348765A (ja) * | 2005-06-13 | 2006-12-28 | Shimadzu Corp | ターボ分子ポンプ |
-
1986
- 1986-03-01 JP JP2949386U patent/JPS62146207U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006348765A (ja) * | 2005-06-13 | 2006-12-28 | Shimadzu Corp | ターボ分子ポンプ |
| JP4661378B2 (ja) * | 2005-06-13 | 2011-03-30 | 株式会社島津製作所 | ターボ分子ポンプ |