JPS62146057U - - Google Patents
Info
- Publication number
- JPS62146057U JPS62146057U JP3433586U JP3433586U JPS62146057U JP S62146057 U JPS62146057 U JP S62146057U JP 3433586 U JP3433586 U JP 3433586U JP 3433586 U JP3433586 U JP 3433586U JP S62146057 U JPS62146057 U JP S62146057U
- Authority
- JP
- Japan
- Prior art keywords
- silicon wafer
- thick
- protrusions
- thick part
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 235000012431 wafers Nutrition 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 3
- 238000004817 gas chromatography Methods 0.000 description 1
Landscapes
- Multiple-Way Valves (AREA)
- Magnetically Actuated Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986034335U JPH041418Y2 (OSRAM) | 1986-03-10 | 1986-03-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986034335U JPH041418Y2 (OSRAM) | 1986-03-10 | 1986-03-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62146057U true JPS62146057U (OSRAM) | 1987-09-14 |
| JPH041418Y2 JPH041418Y2 (OSRAM) | 1992-01-17 |
Family
ID=30842784
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986034335U Expired JPH041418Y2 (OSRAM) | 1986-03-10 | 1986-03-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH041418Y2 (OSRAM) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0273152A (ja) * | 1988-09-09 | 1990-03-13 | Hitachi Ltd | 液体クロマトグラフ |
| JP2007509286A (ja) * | 2003-09-30 | 2007-04-12 | Ｓｍｃ株式会社 | 高流量マイクロバルブ |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS612977U (ja) * | 1984-06-13 | 1986-01-09 | ぺんてる株式会社 | 筆記具に於ける滑り止め用ゴム部品 |
-
1986
- 1986-03-10 JP JP1986034335U patent/JPH041418Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS612977U (ja) * | 1984-06-13 | 1986-01-09 | ぺんてる株式会社 | 筆記具に於ける滑り止め用ゴム部品 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0273152A (ja) * | 1988-09-09 | 1990-03-13 | Hitachi Ltd | 液体クロマトグラフ |
| JP2007509286A (ja) * | 2003-09-30 | 2007-04-12 | Ｓｍｃ株式会社 | 高流量マイクロバルブ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH041418Y2 (OSRAM) | 1992-01-17 |