JPS62144976U - - Google Patents
Info
- Publication number
- JPS62144976U JPS62144976U JP3040486U JP3040486U JPS62144976U JP S62144976 U JPS62144976 U JP S62144976U JP 3040486 U JP3040486 U JP 3040486U JP 3040486 U JP3040486 U JP 3040486U JP S62144976 U JPS62144976 U JP S62144976U
- Authority
- JP
- Japan
- Prior art keywords
- drum
- rotating shaft
- section
- storage tank
- rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002347 injection Methods 0.000 claims description 2
- 239000007924 injection Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 230000032258 transport Effects 0.000 claims 1
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3040486U JPS62144976U (de) | 1986-03-03 | 1986-03-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3040486U JPS62144976U (de) | 1986-03-03 | 1986-03-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62144976U true JPS62144976U (de) | 1987-09-12 |
Family
ID=30835177
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3040486U Pending JPS62144976U (de) | 1986-03-03 | 1986-03-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62144976U (de) |
-
1986
- 1986-03-03 JP JP3040486U patent/JPS62144976U/ja active Pending