JPS62144849U - - Google Patents
Info
- Publication number
- JPS62144849U JPS62144849U JP3372186U JP3372186U JPS62144849U JP S62144849 U JPS62144849 U JP S62144849U JP 3372186 U JP3372186 U JP 3372186U JP 3372186 U JP3372186 U JP 3372186U JP S62144849 U JPS62144849 U JP S62144849U
- Authority
- JP
- Japan
- Prior art keywords
- rotating
- base
- conveyor belts
- wafer handling
- handling apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 2
Landscapes
- Delivering By Means Of Belts And Rollers (AREA)
- Attitude Control For Articles On Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3372186U JPS62144849U (sl) | 1986-03-08 | 1986-03-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3372186U JPS62144849U (sl) | 1986-03-08 | 1986-03-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62144849U true JPS62144849U (sl) | 1987-09-12 |
Family
ID=30841593
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3372186U Pending JPS62144849U (sl) | 1986-03-08 | 1986-03-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62144849U (sl) |
-
1986
- 1986-03-08 JP JP3372186U patent/JPS62144849U/ja active Pending