JPS6214451U - - Google Patents
Info
- Publication number
- JPS6214451U JPS6214451U JP1985103565U JP10356585U JPS6214451U JP S6214451 U JPS6214451 U JP S6214451U JP 1985103565 U JP1985103565 U JP 1985103565U JP 10356585 U JP10356585 U JP 10356585U JP S6214451 U JPS6214451 U JP S6214451U
- Authority
- JP
- Japan
- Prior art keywords
- frame
- pellicle
- bonded
- adhesive layer
- membrane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012790 adhesive layer Substances 0.000 claims description 3
- 239000012982 microporous membrane Substances 0.000 claims description 2
- 238000001459 lithography Methods 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
Landscapes
- Prevention Of Fouling (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985103565U JPS6214451U (no) | 1985-07-09 | 1985-07-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985103565U JPS6214451U (no) | 1985-07-09 | 1985-07-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6214451U true JPS6214451U (no) | 1987-01-28 |
Family
ID=30976238
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985103565U Pending JPS6214451U (no) | 1985-07-09 | 1985-07-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6214451U (no) |
-
1985
- 1985-07-09 JP JP1985103565U patent/JPS6214451U/ja active Pending