JPS62143950U - - Google Patents

Info

Publication number
JPS62143950U
JPS62143950U JP1986032763U JP3276386U JPS62143950U JP S62143950 U JPS62143950 U JP S62143950U JP 1986032763 U JP1986032763 U JP 1986032763U JP 3276386 U JP3276386 U JP 3276386U JP S62143950 U JPS62143950 U JP S62143950U
Authority
JP
Japan
Prior art keywords
support frame
circumferential groove
flange portion
pellicle
cover body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986032763U
Other languages
English (en)
Japanese (ja)
Other versions
JPH036915Y2 (US20110009641A1-20110113-C00185.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986032763U priority Critical patent/JPH036915Y2/ja
Publication of JPS62143950U publication Critical patent/JPS62143950U/ja
Application granted granted Critical
Publication of JPH036915Y2 publication Critical patent/JPH036915Y2/ja
Expired legal-status Critical Current

Links

JP1986032763U 1986-03-07 1986-03-07 Expired JPH036915Y2 (US20110009641A1-20110113-C00185.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986032763U JPH036915Y2 (US20110009641A1-20110113-C00185.png) 1986-03-07 1986-03-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986032763U JPH036915Y2 (US20110009641A1-20110113-C00185.png) 1986-03-07 1986-03-07

Publications (2)

Publication Number Publication Date
JPS62143950U true JPS62143950U (US20110009641A1-20110113-C00185.png) 1987-09-10
JPH036915Y2 JPH036915Y2 (US20110009641A1-20110113-C00185.png) 1991-02-21

Family

ID=30839752

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986032763U Expired JPH036915Y2 (US20110009641A1-20110113-C00185.png) 1986-03-07 1986-03-07

Country Status (1)

Country Link
JP (1) JPH036915Y2 (US20110009641A1-20110113-C00185.png)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007047254A (ja) * 2005-08-08 2007-02-22 Shin Etsu Polymer Co Ltd ペリクル用収納容器
JP2008129453A (ja) * 2006-11-22 2008-06-05 Asahi Kasei Electronics Co Ltd ペリクルの収納方法
JP2011014823A (ja) * 2009-07-06 2011-01-20 Dainichi Shoji Kk マスクケース
JP2017151130A (ja) * 2016-02-22 2017-08-31 信越化学工業株式会社 ペリクル収納容器
JP2021060555A (ja) * 2019-10-09 2021-04-15 信越化学工業株式会社 ペリクルとその専用ペリクルケースからなるアセンブリ

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007047254A (ja) * 2005-08-08 2007-02-22 Shin Etsu Polymer Co Ltd ペリクル用収納容器
JP4668724B2 (ja) * 2005-08-08 2011-04-13 信越ポリマー株式会社 ペリクル用収納容器
JP2008129453A (ja) * 2006-11-22 2008-06-05 Asahi Kasei Electronics Co Ltd ペリクルの収納方法
JP2011014823A (ja) * 2009-07-06 2011-01-20 Dainichi Shoji Kk マスクケース
JP2017151130A (ja) * 2016-02-22 2017-08-31 信越化学工業株式会社 ペリクル収納容器
JP2021060555A (ja) * 2019-10-09 2021-04-15 信越化学工業株式会社 ペリクルとその専用ペリクルケースからなるアセンブリ

Also Published As

Publication number Publication date
JPH036915Y2 (US20110009641A1-20110113-C00185.png) 1991-02-21

Similar Documents

Publication Publication Date Title
JPS62143950U (US20110009641A1-20110113-C00185.png)
JPS62143948U (US20110009641A1-20110113-C00185.png)
JPH01149646U (US20110009641A1-20110113-C00185.png)
JPH028750U (US20110009641A1-20110113-C00185.png)
JPS62143949U (US20110009641A1-20110113-C00185.png)
JPS6426350U (US20110009641A1-20110113-C00185.png)
JPH0190044U (US20110009641A1-20110113-C00185.png)
JPS61144057U (US20110009641A1-20110113-C00185.png)
JPS61165449U (US20110009641A1-20110113-C00185.png)
JPS6332192U (US20110009641A1-20110113-C00185.png)
JPS6386053U (US20110009641A1-20110113-C00185.png)
JPS61173942U (US20110009641A1-20110113-C00185.png)
JPS6330846U (US20110009641A1-20110113-C00185.png)
JPS63158872U (US20110009641A1-20110113-C00185.png)
JPS6247892U (US20110009641A1-20110113-C00185.png)
JPS6373129U (US20110009641A1-20110113-C00185.png)
JPS6167820U (US20110009641A1-20110113-C00185.png)
JPS6222941U (US20110009641A1-20110113-C00185.png)
JPS62144676U (US20110009641A1-20110113-C00185.png)
JPS6189853U (US20110009641A1-20110113-C00185.png)
JPH0365063U (US20110009641A1-20110113-C00185.png)
JPS63168955U (US20110009641A1-20110113-C00185.png)
JPS6245987U (US20110009641A1-20110113-C00185.png)
JPH0448871U (US20110009641A1-20110113-C00185.png)
JPS6290725U (US20110009641A1-20110113-C00185.png)