JPS62143950U - - Google Patents
Info
- Publication number
- JPS62143950U JPS62143950U JP1986032763U JP3276386U JPS62143950U JP S62143950 U JPS62143950 U JP S62143950U JP 1986032763 U JP1986032763 U JP 1986032763U JP 3276386 U JP3276386 U JP 3276386U JP S62143950 U JPS62143950 U JP S62143950U
- Authority
- JP
- Japan
- Prior art keywords
- support frame
- circumferential groove
- flange portion
- pellicle
- cover body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 125000006850 spacer group Chemical group 0.000 claims description 4
- 239000000853 adhesive Substances 0.000 claims description 2
- 230000001070 adhesive effect Effects 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 239000002390 adhesive tape Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986032763U JPH036915Y2 (US06373033-20020416-M00035.png) | 1986-03-07 | 1986-03-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986032763U JPH036915Y2 (US06373033-20020416-M00035.png) | 1986-03-07 | 1986-03-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62143950U true JPS62143950U (US06373033-20020416-M00035.png) | 1987-09-10 |
| JPH036915Y2 JPH036915Y2 (US06373033-20020416-M00035.png) | 1991-02-21 |
Family
ID=30839752
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986032763U Expired JPH036915Y2 (US06373033-20020416-M00035.png) | 1986-03-07 | 1986-03-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH036915Y2 (US06373033-20020416-M00035.png) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007047254A (ja) * | 2005-08-08 | 2007-02-22 | Shin Etsu Polymer Co Ltd | ペリクル用収納容器 |
| JP2008129453A (ja) * | 2006-11-22 | 2008-06-05 | Asahi Kasei Electronics Co Ltd | ペリクルの収納方法 |
| JP2011014823A (ja) * | 2009-07-06 | 2011-01-20 | Dainichi Shoji Kk | マスクケース |
| JP2017151130A (ja) * | 2016-02-22 | 2017-08-31 | 信越化学工業株式会社 | ペリクル収納容器 |
| JP2021060555A (ja) * | 2019-10-09 | 2021-04-15 | 信越化学工業株式会社 | ペリクルとその専用ペリクルケースからなるアセンブリ |
-
1986
- 1986-03-07 JP JP1986032763U patent/JPH036915Y2/ja not_active Expired
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007047254A (ja) * | 2005-08-08 | 2007-02-22 | Shin Etsu Polymer Co Ltd | ペリクル用収納容器 |
| JP4668724B2 (ja) * | 2005-08-08 | 2011-04-13 | 信越ポリマー株式会社 | ペリクル用収納容器 |
| JP2008129453A (ja) * | 2006-11-22 | 2008-06-05 | Asahi Kasei Electronics Co Ltd | ペリクルの収納方法 |
| JP2011014823A (ja) * | 2009-07-06 | 2011-01-20 | Dainichi Shoji Kk | マスクケース |
| JP2017151130A (ja) * | 2016-02-22 | 2017-08-31 | 信越化学工業株式会社 | ペリクル収納容器 |
| JP2021060555A (ja) * | 2019-10-09 | 2021-04-15 | 信越化学工業株式会社 | ペリクルとその専用ペリクルケースからなるアセンブリ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH036915Y2 (US06373033-20020416-M00035.png) | 1991-02-21 |
