JPS62143112A - Method and apparatus for controlling temperature - Google Patents

Abstract

PURPOSE:To control the temperature of a device having a heat generating part highly accurately by forming a control heat source capable of increasing/ decreasing temperature in a prescribed area including the heat generating part. CONSTITUTION:When the calorific value of the heat generating part 31 in a device 30 is changed in accordance with time, an electric power measuring circuit 38 measures current i1 flowing into the heat generating part 31, voltage v1, etc., and measures electric power W1=i1Xv1 to be energy consumped in each moment. Energy W2 to be consumped by an electric heater 34 is obtained by a computing element 39 as follows. When the energy W1 consumped by the heat generating part 31 is varied in accordance with time, the energy W2 in each moment when the whole consumed energy W is fixed is determined by W-W1. Current i2 corresponding to W2=i2Xv2 is made to flow into the heater 34 from a power supply part 40 to generate heat. Consequently, the sum of calorific values of the heat generating part 31 and the heater 34 is always fixed and the temperature of the device 30 can be held at a constant level.

Description

Detailed Description of the Invention [Field of Industrial Application] The present invention is designed to control the temperature of devices that require high precision, such as semiconductor-related equipment that has heat-generating parts such as motors, coils, and other electric circuits, to 'tJI'H. The present invention relates to a temperature control method and equipment.

[Technology background]

2. Description of the Related Art Devices such as semiconductor-related equipment are required to measure, process, or control in-line items with an accuracy of lm or more, that is, 10 -6 or more. However, physical constants such as expansion coefficient, Young's modulus, and various electrical constants vary by 10-
It has a temperature coefficient that fluctuates on the order of 3 to 10-6/'0. Therefore, in such a device, the
Temperature control is required to maintain a constant temperature with the above accuracy.

[Conventional technology]

Conventionally, technologies for controlling the temperature of devices with heat generating parts include controlling the temperature of the room in which the device is installed to be kept constant, or cutting off heat from a predetermined area including the heat generating part to reduce the temperature of that part. There was one that controlled to keep it constant.

This conventional temperature control technique will be explained using the fJS8 diagram. Reference numeral 1 denotes a device that is subject to temperature control, and has a heat generating section 2 such as a coil inside. Reference numeral 3 denotes a predetermined area including the heat generating part 2, and the surrounding area is heat-insulated by a heat insulating wall or the like. 4 is a heat exchanger consisting of a vibrator and cold water passing through a pipe, and is installed in the area 3.

Reference numeral 5 denotes a temperature measuring means such as a thermometer for measuring the temperature of the region 3. Reference numeral 6 denotes an operation unit that raises and lowers the temperature of the heat exchanger 4 based on the temperature measured by the temperature measuring means 5, either manually or automatically. In this prior art, the heat exchanger 4 has a suitable 1. ), or by manually or automatically controlling the amount or temperature of cold water so that the measured temperature remains constant. The temperature at t1 was maintained constant.

[Problem that the invention seeks to solve]

By the way, according to the conventional technology, the device i related to the controlled object
When controlling the temperature of i1, the temperature of the region 3 including the heat generating part 2 is measured by the temperature measuring means 5, and the temperature of the heat exchanger 4 is raised or lowered by the operation part 6 based on the measured temperature. . Therefore, when temporal fluctuations in the calorific value of the heat generating part 2 occur intermittently or continuously, the temperature fluctuations in the region 3 including the heat generating part 2 are detected and the temperature of the heat exchanger 4 is raised or lowered. is delayed in time. This delay increases as region 3 becomes larger. In addition, if the heat isolation of the region 3 is not complete, heat will move by conduction, convection, and radiation, so there is a problem that the temperature of the device 1 cannot be sufficiently controlled just by measuring the temperature change in the region 3. It had Particularly in the equipment of semiconductor equipment, electro-optical equipment, etc., the equipment equipment 1@ is significantly reduced due to temperature fluctuations caused by insufficient temperature control.

Therefore, the present invention has been made to solve this technical problem, and has been made for the purpose of providing a temperature control method and device for controlling the temperature of a device having a heat generating part with high precision. .

[Means for solving problems]

In the first invention, in a temperature control method for controlling the temperature of a device having a heat generating part, a control heat source capable of raising and lowering the temperature is provided in a predetermined area including the heat generating part, and the consumption of the heat generating part is controlled. By measuring the energy and consuming the energy determined based on the measured energy consumption in the control heat source, the temperature of the control device 8 is raised and lowered to control the temperature of the device related to the control target. This is a characteristic temperature control method.

Here, the heat generating part may be either heat generating or heat absorbing. Similarly, the control heat source may be a high heat source that generates heat or a low heat source that absorbs heat. Furthermore, the predetermined area is determined by the heat capacity, heat transfer coefficient, etc. or calorific value of the device and the heat generating part, or the heat generating part of the control heat source, etc., so that the control heat source can effectively respond to temperature changes in the heat generating part. It is a place to spend time alone.

Moreover, consumed energy refers to the energy consumed for heat generation due to the difference between input energy and output energy.

In the embodiment according to the first invention, when controlling the temperature of the device related to the controlled object by raising and lowering the temperature of the control heat source, the average temperature of a predetermined area including the heat generating part is controlled. It is characterized by bringing the temperature closer to the average temperature of the device related to the object.

In the second invention, as shown in FIG.
In a temperature control device that controls the temperature of a device 1 that performs the following, the energy consumption of a control heat source 10 and a heat generating portion 2 provided in a predetermined area 3 including a heat generating portion 2 and capable of raising and lowering the temperature is measured. A consumption energy measuring means 11, a heat source energy determining means 12 which determines the energy to be consumed by the control heat source 10 based on the measured energy consumption, and a heat source energy determining means 12 which increases or decreases the temperature of the control heat source by consuming the energy in the control heat source. This temperature control device is characterized by having a heat source operation section 13 to be operated.

In an embodiment according to the second invention, as shown in FIG. 3, the second invention includes a relaxation means for bringing the average temperature in the predetermined region 3 closer to the average temperature of the device 1 related to the controlled object. 20.

In the third invention, in the temperature control method for controlling the temperature of a device having a heat generating part, a control heat source capable of raising and lowering the temperature is provided in a predetermined area including the heat generating part, and the consumption of the heat generating part is controlled. Energy is measured, and the temperature of the control heat source is adjusted by consuming the energy determined based on the measured energy consumption and the average temperature of the region for a time longer than the time of about FuJ during relaxation of the region. This is a temperature control method characterized by controlling the temperature of the device related to the controlled object by raising and lowering the device.

Here, the relaxation time is the time taken to reach an equilibrium or stable state.

In an embodiment according to a third invention, in the third invention, the temperature of the control heat source is increased! When the temperature of the device related to the controlled object is controlled by one operation, the average temperature of a predetermined area including the heat generating portion is brought close to the average temperature of the device related to the controlled object.

In the fourth invention, as shown in FIG.
In the temperature control device for controlling the temperature of a device 211 having a measuring means 11, a temperature measuring means 14 for measuring the temperature of the region 3, a temperature integrating means 15 for determining the average temperature of the region 3 for a time longer than about the relaxation time of the region 3; a heat source energy determining means 16 that determines the energy to be consumed by the control heat source IO based on the measured energy consumption and the average temperature of the area 3; Heat source operation unit 1
3. This is a temperature control device characterized by having:

In the embodiment according to the fourth invention, as shown in FIG. 4, the average temperature of the predetermined region 3 is controlled by the device. A relaxation means 20 is provided to bring the temperature closer to the average temperature of No. 11.

[Effect]

In the first invention, a control heat source capable of raising and lowering the temperature is provided in a predetermined area including the heat generating part, and when controlling the temperature of the device related to the controlled object, the heat source, ! The temperature of the device to be controlled is controlled by measuring the energy consumption of the unit and consuming energy determined based on the measured energy in the control heat source to raise and lower the temperature of the control heat source.

Therefore, 1. For example, when controlling a device related to a controlled object so as to eliminate temperature fluctuations and keep the temperature constant,
When the heat generating part and the control heat source generate heat, the sum of the energy consumption of the heat generating part and the energy consumed by the control heat source, that is, the sum of the calorific value, or the energy that the control heat source should consume so that it is always constant. Establish. On the other hand, if the control heat source absorbs heat, such as a heat exchanger that flows cold water inside, the difference between the energy consumed by the heat generating part and the energy consumed by the control heat source related to cooling, that is, the S amount or suction p! ! 4! The energy to be consumed by the control heat source is determined so that the amount is always constant. The thus determined energy is consumed by the control heat source to eliminate temporal fluctuations in the amount of heat generated and to control the temperature of the device to be kept constant.

In the embodiment according to the first invention, the average temperature of the predetermined area including the heat generating part is forcibly brought close to the average temperature of the device related to the controlled object, so that the device related to the controlled object is stabilized. The relaxation time until reaching an equilibrium state with a certain temperature is shortened.

In the second invention, as shown in FIG.

For example, the energy consumption measuring means 11 measures the variation in the amount of heat generated by the heat generating unit 2 inside the device 1 as the variation in the energy consumption of the heat generating unit 2. In the case where the heat generating part 2 and the control heat source 1α generate heat,
The energy to be consumed by the control heat source 10 is determined by the heat source energy determining means 12 so that the sum of the energy consumed by the heat generating section 2 and the energy consumed by the control heat source 1O, that is, the calorific value is always constant. On the other hand, when the control heat source IO absorbs heat, the difference between the energy consumed by the heat generating part 2 and the energy consumed by the control heat source IO that is involved in cooling is determined to be always constant. The heat source operation unit 13 causes the control heat source 10 to consume the energy determined in this manner, and controls the temperature of the control heat source 10 to be raised or lowered to keep the temperature of the device 1 constant.

In the embodiment according to the second invention, as shown in FIG. 3, a relaxation means 2 for forcibly approaches the average temperature of a predetermined region 3 including a heat generating part 2 to the average temperature of the device l related to the controlled object.
0, the relaxation time until the device l approaches an equilibrium state with a stable temperature is shortened.

In the third invention, a control heat source capable of raising and lowering the temperature is provided in a predetermined area including the heat generating part, and the measured energy consumption and the time longer than the relaxation time of the area are measured. Energy determined based on the average temperature of the region is consumed in the control heat source to raise and lower the temperature of the control heat source to control the temperature of the device related to the control target. Here, the reason why the average temperature of the region is determined for a time longer than the relaxation time is that if the time is shorter than this, the average temperature of the region will be affected by temperature fluctuations due to the heat generating part. This is because 0 is not stable.
For example, as mentioned above, in order to control the temperature of a device so that the average temperature of the region approaches the average temperature of the device directly controlled, the temperature can be controlled as follows: While controlling to keep it constant.

Brings the average temperature of the area directly closer to the average temperature of the device.

If a heat generating part and a control heat source generate heat, the control heat source should be consumed so that the sum of the energy consumed by the heat generating part and the energy consumed by the control heat source, that is, the sum of the calorific value, is always constant. Determine the energy that should be used. At this time, if the average temperature of the device is higher than the average temperature of the region, energy corresponding to the difference between the average temperature of the device and the average temperature of the region is added to the energy to be consumed by the control heat source. vice versa,
If the average temperature of the device is lower than the average temperature of the area,
The energy corresponding to the temperature difference is subtracted from the energy to be consumed by the control heat source.

If the control heat source absorbs heat, such as a heat exchanger that allows cold water to flow inside, the difference between the energy consumed by one heat generating part and the energy consumed by the control heat source for cooling should always be constant. Determine the energy to be consumed by the control heat source.

At that time, if the average temperature of the device is higher than the average temperature of the area, the energy corresponding to the difference between the average temperature of the device and the average temperature of the area is subtracted from the energy to be consumed by the control heat source. If the average temperature of the region is lower than the average temperature of the region, energy corresponding to the temperature difference is added to the energy to be consumed by the control heat source.

In the embodiment of the third invention, the average temperature of a predetermined area including the heat generating part is forcibly brought close to the average temperature of the device related to the controlled object, so that the device maintains an equilibrium with a stable temperature. The relaxation time until reaching the state is shortened.

In the fourth invention, as shown in FIG.

The energy consumption measuring means 11 measures the variation in the amount of heat generated by the heat generating unit 2 inside the device 1 as a variation in the energy consumption of the heat generating unit 2. At the same time, the temperature of a predetermined area including the heat generating part 2 is measured by the temperature measuring means 14, and the measured temperature is integrated by the temperature integrating means 15 over a time longer than the relaxation time of the area 3. For example, if the average temperature of the area 3 is directly approached to the average temperature of the device 2! The temperature of i1 is controlled as follows, if the heat generating section 2 and control heat source IO generate heat.

The heat source energy determining means 16 determines the energy to be consumed by the control heat source 10 so that the sum of the energy consumed by the heat generating section 2 and the energy consumed by the control heat source 10, that is, the sum of the calorific value is always constant.

At that time, if the average temperature of device 1 is higher than the average temperature of region 3, energy corresponding to the difference between the average temperature of device P11 and the average temperature of region 3 is converted into energy to be consumed by control heat source device 0. Add. Conversely, when the average temperature of the device 1 is lower than the average temperature of the region 3, the energy corresponding to the temperature difference is subtracted from the energy to be consumed by the control heat FAIO.

If the heat generating part 2 generates heat and the control heat source 10 absorbs heat, the difference between the energy consumed by the heat generating part 2 and the energy consumed by the control heat source 10 for cooling is always constant. The energy to be consumed by the control heat source 10 is determined.

At that time, if the average temperature of device 1 is higher than the average temperature of region 3, device 1. The energy corresponding to the difference between the average temperature of the region 3 and the average temperature of the region 3 is subtracted from the energy to be consumed by the control heat source IO. Conversely, when the average temperature of the equipment 1 is lower than the average temperature of the region 3, energy corresponding to the temperature difference is added to the energy to be consumed by the control heat source 10.

In the 18th embodiment according to the fourth invention, as shown in FIG. 4, the relaxation means forcibly approaches the average temperature of a predetermined region 3 including the heat generating part 2 to the average temperature of the device 1 to be controlled. 20, the relaxation time until the device I approaches an equilibrium state with a stable temperature is shortened.

(Example〕 Examples according to the first and second inventions will be described.

As shown in FIG. 5, 30 is a device related to the temperature control target, for example, an electronic WJ microscope. 31 is a heat generating portion, which is, for example, the effective resistance of a lens coil for an electron microscope. The current flowing through the coil of the heat generating section 31 changes during use for focusing and the like. A region 32 is surrounded by a heat insulating wall 33 and includes a heat generating portion 31. Reference numeral 34 designates an electric heater as a heat source for control, and is provided within a region 32 that includes the heat generating section 31 . 9. This electric heater 34 is controlled by changing the current value. It is possible to raise and lower the temperature by changing the amount of heat. 35 is a heat exchanger as the relaxation means 20, and the cold water flowing inside the pipe flows into the region 32 from the inlet 36 and takes away the heat in the region 32, and the temperature rises by an amount corresponding to the amount of heat taken from the outlet 37. and is discharged. The cooling effect of this heat exchanger 35 is in the region 32 if the water amount and water temperature are constant.
It is proportional to the temperature difference between the water and the cold water. Furthermore, 38 is the heat generating part 3
Energy consumption measuring means 11 that measures the current voltage or power of 1 and outputs an electrical signal corresponding to the power data.
This is a power measurement circuit.

Reference numeral 39 denotes a computing unit serving as the heat source energy determining means 12 which receives the electrical signal, determines the energy to be consumed by the electric heater 34, and outputs the corresponding electrical signal. 4
Reference numeral 0 denotes a power supply section as the heat source operating section 13 that receives an electric signal corresponding to the energy and supplies a current corresponding to the energy to be consumed by the electric heater 34.

This embodiment operates as follows. When the amount of heat generated by the heat generating part 31 inside the device 30 changes over time, the power measurement circuit 38 measures the current 11 and voltage I flowing through the heat generating part 31, and calculates the power Wl as the energy consumption at each moment. i Measure 1X91. Then, the computing unit 39 as the heat source energy determining means 12 determines the energy W2 that should be consumed by the electric heater 34 as the control heat source 10.
Find it as follows. As shown in FIG. 6, when the energy consumption WI of the heat generating section 31 changes over time, the control heat source lO when the total energy consumption W is set constant
The energy W2 to be consumed at each moment is W 2 = W
- Defined by W I.

At this time, it is necessary that the total energy consumption W is set to be slightly larger than the maximum amount of heat generation W1 of the heat generating section 31.

A current 12 corresponding to this W2 = i2 Fluctuations in the temperature of the region 32 are eliminated, and the temperature of the device 30 is kept constant.Furthermore, in parallel with the above temperature control, a heat exchanger 35 is used as a mitigation means.
is used at the same time, and a constant amount of cooling water at a constant temperature is allowed to flow so that the average value of the inlet temperature and outlet temperature is approximately equal to the temperature of the device 30. In other words, the cooling effect of the cooling water is equal to the energy W. By doing so, the relaxation time until the temperature of the device 30 becomes constant is shortened, and at the same time, heat transfer between the device 30 and the region 32 is eliminated, so that the accuracy of temperature control is improved.

Next, embodiments according to the third and fourth inventions will be described. In this embodiment, as shown in FIG. A heat insulating wall 33 surrounds a region 32 including a heat generating part 31, an electric heater 34 as a control heat source 10 is provided in the region 32, and a heat exchanger 35 as a relaxation means, a power measurement circuit 38 and a power supply section are provided. It has 40. In addition, in this embodiment, a thermometer 41 as a temperature measuring means 14 that measures the temperature within the region 32 and outputs an electrical signal corresponding to this temperature data is installed within the region 32, and
A thermometer 42 is also installed inside the outside device 30. Further, an integral calculator 43 as a temperature integrating means 15 inputs these electrical signals to determine the average temperature difference between the region 32 and the device a 30, and outputs an electrical signal corresponding to the data of the average temperature difference. has been established. Further, a computing unit 4 as a heat source energy determining means 12 determines the energy to be consumed by the electric heater 34 from the average temperature and an electric signal corresponding to the consumed energy, and outputs an electric signal of data corresponding to the energy.
It has 4. Furthermore, it has a power source section 40 as a heat source operating section 13 that operates the electric heater 34 based on the energy.

This embodiment operates as follows. The first and second mentioned above
Similarly to the embodiment according to the invention, the electric power measurement circuit 38 measures the current 11 and the voltage 9! flowing through the heat generating part 31! Therefore, the power as the energy consumed at each moment WH= i 1X9
Find 1. On the other hand, by measuring the temperature of the region 32 including the heat generating part 31 with the thermometer 41, for example, by maintaining the temperature of the region 32 at the average temperature of the device 30 or the average temperature of the constant temperature room in which the device 30 is installed. When controlling the temperature of the device 30 to be kept constant, it is performed as follows.First, an electric signal is integrated for data of the temperature difference between the region 32 and the device R30 measured by the thermometer 41 and the thermometer 42. The arithmetic unit 43 performs time integration with a time constant having a time longer than the relaxation time of the region 32,
The difference in average temperature between region 32 and device 30 is determined.

This is because if the average temperature is shorter than this time constant, the temperature of the region 32 will be unstable due to the influence of fluctuations in the heat generating portion 31.

Using the energy WO corresponding to the difference between the average temperature of the area 32 obtained in this way and the average temperature of the enclosure 30 or the constant temperature room, the power W+ obtained by the power measurement circuit 38, and the total energy consumption W, a calculation unit 44, the energy W2 that the electric heater 34 should consume is W2=W±Wo-w.

Define as follows. However, if the number is 10, the device 30
Alternatively, the average temperature of the constant temperature room is lower than the average temperature of the area 32, and - is higher. By determining the energy W2 in this way, almost no heat is transferred from the region 32 including the heat generating part 31 to the outside of the region 32,
The stability of the controlled temperature of the device 30 will be increased and the relaxation time for the device 30 to reach an equilibrium state will be reduced. Furthermore, by using the heat exchanger 35 as a relaxation means, the relaxation time can be further shortened.

Note that in the above embodiments, the heat generating part does not necessarily have to be an electric circuit such as a coil, but may be a part that generates mechanical work such as a motor. In this case, the energy consumed in the motor part is equal to the input power. This is the work energy that is the mechanical output of the motor, that is, the shaft output energy is subtracted from the electric power. This shaft output energy is usually equal to the frictional force x the speed at the point where the frictional force acts, and when the voltage, current, force, and speed change in an alternating current manner, the various instantaneous values are multiplied and integrated. Energy consumption can be determined. Furthermore, the number of heat generating parts 31 does not necessarily have to be one in the device 30, and there may be a plurality of them. In this case, this temperature control method and device may be applied to each heat generating part in parallel. In addition, in the above embodiments, as a heat source for control, if the Peltier effect is used, which causes dissimilar metals to be connected and a current is passed through them, causing heat generation and heat absorption depending on the direction of the flow, both heat generation and heat absorption can be achieved. This can be realized with a simple mechanism. Further, in the above embodiments, the heat exchanger is not necessarily limited to a water-cooled type, and various types using other fluids, heat conduction, convection, and radiation can be considered.

〔Effect of the invention〕

In the first and second inventions, instead of controlling the temperature of the controlled object by measuring the temperature as in the past, the energy consumption that causes heat generation in each heat generating part in the device is measured. Then, the temperature is controlled by causing the control heat source to consume energy determined based on the measured energy consumption.

Therefore, when the heat generating portion of the heat generating portion changes over time, it is possible to immediately respond to the change without delay, and therefore temperature control can be performed with high accuracy. Furthermore, since we are not measuring the temperature generated by heat generation, but rather the energy consumption that causes heat generation, it is possible to measure each calorific value as energy without having to install a completely insulated wall, making it inexpensive. temperature can be controlled with high precision.

In addition, in the first and second embodiments, in order to bring the average temperature of a predetermined region including the heat generating part closer to the average temperature of the device, the relaxation time until the device reaches an equilibrium state is shortened, and the The control temperature is stabilized because heat is prevented from being transferred between the area and the device.

On the other hand, in the third and fourth inventions, the temperature of a predetermined region including the heat generating part is determined based on the average temperature for a time longer than the relaxation time of the region and the measured energy consumption. Since the power energy is determined, the average temperature of the area can be stably set as desired. Therefore, when controlling the temperature of a device to be controlled to always maintain a constant temperature, if the temperature of a predetermined area including the heat generating part is taken as the average temperature of the device to be controlled, the device will shift to a constant temperature state. In addition to shortening the relaxation time until the temperature changes, a stable and highly accurate equilibrium state at a constant temperature can be obtained at low cost.

In the embodiments according to the third and fourth inventions, when the temperature of the device related to the controlled object is held constant, the relaxation time until the device related to the controlled object reaches an equilibrium state is further shortened, and The temperature of the device related to this controlled object becomes more stable.

[Brief explanation of drawings]

Fig. 1 is a block diagram showing the second invention, Fig. 2 is a block diagram showing the fourth invention, Fig. 3 is the second invention, and Fig. 5 shows an embodiment according to the first and second inventions. Explanatory diagram, Figure 6 is the first
and a control explanatory diagram of an embodiment according to the second invention, FIG. 7 is an explanatory diagram showing an embodiment according to the third and fourth IJJ, and FIG.
The figure is a block diagram showing a conventional example. lO...Control heat source 11...Energy consumption measuring means 12.16...Heat source energy determining means 13...Heat &
;i Operation section 14...Temperature measurement means 15...Temperature integration means Agent Patent attorney Uzumaki: ゛・,−
・J Figure 1, Figure 2, 1, Figure 4, 1. 14 1b Figure 6 Yao time Figure 7 Figure 3, 71

Claims (8)

[Claims] (1) In a temperature control method for controlling the temperature of a device having a heat generating part, a control heat source capable of raising and lowering the temperature is provided in a predetermined area including the heat generating part, and the energy consumption of the heat generating part is measured. A temperature control method comprising controlling the temperature of the device related to the control target by increasing or decreasing the temperature of the control heat source by causing the control heat source to consume energy determined based on the consumed energy. (2) When controlling the temperature of the device to be controlled by raising or lowering the temperature of the control heat source, the average temperature of a predetermined area including the heat generating portion is brought closer to the average temperature of the device to be controlled. Claim 1 characterized in that
Temperature control method described in section. (3) In a temperature control device that controls the temperature of a device having a heat generating part, a control heat source that can raise and lower the temperature is provided in a predetermined area including the heat generating part, and an energy consumption source that measures the energy consumption of the heat generating part. a measuring means, a heat source energy determining means that determines the energy to be consumed by the control heat source based on the measured energy consumption, and a heat source operating section that increases or decreases the temperature of the control heat source by consuming the energy in the control heat source. A temperature control device comprising: (4) The temperature control device according to claim 3, further comprising a relaxation means for bringing the average temperature of the predetermined region closer to the average temperature of the device to be controlled. (5) In a temperature control method for controlling the temperature of a device having a heat generating part, a control heat source capable of raising and lowering the temperature is provided in a predetermined area including the heat generating part, and the energy consumption of the heat generating part is measured. and the energy determined based on the average temperature of the area for a time longer than the relaxation time of the area is consumed in the control heat source to raise and lower the temperature of the control heat source to reach the control target. A temperature control method comprising controlling the temperature of the device. (6) When controlling the temperature of the device to be controlled by raising or lowering the temperature of the control heat source, the average temperature of a predetermined area including the heat generating portion is brought closer to the average temperature of the device to be controlled. Claim 5 is characterized in that
Temperature control method described in section. (7) In a temperature control device that controls the temperature of a device having a heat generating part, a control heat source that can raise and lower the temperature is provided in a predetermined area including the heat generating part, and an energy consumption device that measures the energy consumption of the heat generating part. a measuring means, a temperature measuring means for measuring the temperature of the region, a temperature integrating means for determining the average temperature of the region for a time longer than about the relaxation time of the region, and a temperature measuring means for measuring the temperature of the region; The method includes a heat source energy determining means that determines the energy to be consumed by the control heat source based on the average temperature of the area, and a heat source operation unit that causes the control heat source to consume the energy to raise or lower the temperature of the control heat source. Features temperature control device. (8) The temperature control device according to claim 7, further comprising a relaxation means for bringing the average temperature of the predetermined region closer to the average temperature of the device to be controlled.