JPS62142841U - - Google Patents
Info
- Publication number
- JPS62142841U JPS62142841U JP3245786U JP3245786U JPS62142841U JP S62142841 U JPS62142841 U JP S62142841U JP 3245786 U JP3245786 U JP 3245786U JP 3245786 U JP3245786 U JP 3245786U JP S62142841 U JPS62142841 U JP S62142841U
- Authority
- JP
- Japan
- Prior art keywords
- tube
- temperature distribution
- processing device
- semiconductor processing
- cylindrical tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 1
Description
第１図はこの考案の実施例である拡散炉の概略
構成を示す図、第２図は上記拡散炉の炉本体の分
解図、第３図は従来の炉の構成を示す図である。 ２…温度測定管、３…温度センサ、６…マイク
ロコンピユータ、７…ヒータ制御回路。
構成を示す図、第２図は上記拡散炉の炉本体の分
解図、第３図は従来の炉の構成を示す図である。 ２…温度測定管、３…温度センサ、６…マイク
ロコンピユータ、７…ヒータ制御回路。
Claims (1)
- 【実用新案登録請求の範囲】 円柱状チユーブの一方の側面にシヤツタが設け
られた半導体処理装置において、 前記円柱状チユーブの他方の側面からチユーブ
内に伸びる温度分布測定管を設け、この温度分布
測定管内に温度分布を測定する温度センサを配置
したことを特徴とする半導体処理装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3245786U JPS62142841U (ja) | 1986-03-04 | 1986-03-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3245786U JPS62142841U (ja) | 1986-03-04 | 1986-03-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62142841U true JPS62142841U (ja) | 1987-09-09 |
Family
ID=30839147
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3245786U Pending JPS62142841U (ja) | 1986-03-04 | 1986-03-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62142841U (ja) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5754275U (ja) * | 1980-09-12 | 1982-03-30 | ||
| JPS6058608A (ja) * | 1983-09-12 | 1985-04-04 | Hitachi Ltd | 熱処理炉 |
-
1986
- 1986-03-04 JP JP3245786U patent/JPS62142841U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5754275U (ja) * | 1980-09-12 | 1982-03-30 | ||
| JPS6058608A (ja) * | 1983-09-12 | 1985-04-04 | Hitachi Ltd | 熱処理炉 |
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