JPS62142841U - - Google Patents

Info

Publication number
JPS62142841U
JPS62142841U JP3245786U JP3245786U JPS62142841U JP S62142841 U JPS62142841 U JP S62142841U JP 3245786 U JP3245786 U JP 3245786U JP 3245786 U JP3245786 U JP 3245786U JP S62142841 U JPS62142841 U JP S62142841U
Authority
JP
Japan
Prior art keywords
tube
temperature distribution
processing device
semiconductor processing
cylindrical tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3245786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3245786U priority Critical patent/JPS62142841U/ja
Publication of JPS62142841U publication Critical patent/JPS62142841U/ja
Pending legal-status Critical Current

Links

JP3245786U 1986-03-04 1986-03-04 Pending JPS62142841U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3245786U JPS62142841U (enExample) 1986-03-04 1986-03-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3245786U JPS62142841U (enExample) 1986-03-04 1986-03-04

Publications (1)

Publication Number Publication Date
JPS62142841U true JPS62142841U (enExample) 1987-09-09

Family

ID=30839147

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3245786U Pending JPS62142841U (enExample) 1986-03-04 1986-03-04

Country Status (1)

Country Link
JP (1) JPS62142841U (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5754275U (enExample) * 1980-09-12 1982-03-30
JPS6058608A (ja) * 1983-09-12 1985-04-04 Hitachi Ltd 熱処理炉

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5754275U (enExample) * 1980-09-12 1982-03-30
JPS6058608A (ja) * 1983-09-12 1985-04-04 Hitachi Ltd 熱処理炉

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