JPS62141709U - - Google Patents

Info

Publication number
JPS62141709U
JPS62141709U JP3037386U JP3037386U JPS62141709U JP S62141709 U JPS62141709 U JP S62141709U JP 3037386 U JP3037386 U JP 3037386U JP 3037386 U JP3037386 U JP 3037386U JP S62141709 U JPS62141709 U JP S62141709U
Authority
JP
Japan
Prior art keywords
circuit board
blocking member
spindle
main scale
measuring device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3037386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3037386U priority Critical patent/JPS62141709U/ja
Publication of JPS62141709U publication Critical patent/JPS62141709U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP3037386U 1986-03-03 1986-03-03 Pending JPS62141709U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3037386U JPS62141709U (enExample) 1986-03-03 1986-03-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3037386U JPS62141709U (enExample) 1986-03-03 1986-03-03

Publications (1)

Publication Number Publication Date
JPS62141709U true JPS62141709U (enExample) 1987-09-07

Family

ID=30835116

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3037386U Pending JPS62141709U (enExample) 1986-03-03 1986-03-03

Country Status (1)

Country Link
JP (1) JPS62141709U (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06160016A (ja) * 1992-11-25 1994-06-07 Mitsutoyo Corp 変位検出装置
JP2014140071A (ja) * 2007-12-28 2014-07-31 Nikon Corp 露光方法及び露光装置、並びにデバイス製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06160016A (ja) * 1992-11-25 1994-06-07 Mitsutoyo Corp 変位検出装置
JP2014140071A (ja) * 2007-12-28 2014-07-31 Nikon Corp 露光方法及び露光装置、並びにデバイス製造方法

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