JPS62140431U - - Google Patents
Info
- Publication number
- JPS62140431U JPS62140431U JP2790486U JP2790486U JPS62140431U JP S62140431 U JPS62140431 U JP S62140431U JP 2790486 U JP2790486 U JP 2790486U JP 2790486 U JP2790486 U JP 2790486U JP S62140431 U JPS62140431 U JP S62140431U
- Authority
- JP
- Japan
- Prior art keywords
- probe
- probe gas
- measured
- gas
- sealed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 18
- 238000005507 spraying Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000007664 blowing Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Description
第１図は、この考案の１実施例であるリークテ
スト装置全体の構成図、第２図は、そのプローブ
（プローブガス吹き付け器）の外形平面図、第３
図は、その外形側面図、第４図はこの考案にかか
る前記とは別な実施例装置の要部の構成図、第５
図は、リークインジケータの正面図、第６図は従
来の装置全体の構成図である。
１…被測定体、２…リークデテクタ、３，３′
…油回転真空ポンプ、６…テストバルブ、１０…
ヘリウムボンベ、１８…リークインジケータ、２
１…リークレートメータ、２３…漏洩基準値設定
部、３１…吹き付け用プローブ、３１′…吹き込
み用プローブ、３５…ノズル、３８…ゼロサプレ
ス用スイツチのアクチエータ、４１…合否表示灯
。
Fig. 1 is a block diagram of the entire leak test device which is an embodiment of this invention, Fig. 2 is an external plan view of the probe (probe gas sprayer), and Fig. 3
The figure is a side view of its external appearance, FIG. 4 is a configuration diagram of a main part of an apparatus according to another embodiment of the invention, and FIG.
The figure is a front view of the leak indicator, and FIG. 6 is a configuration diagram of the entire conventional device. 1...Object to be measured, 2...Leak detector, 3, 3'
...oil rotary vacuum pump, 6...test valve, 10...
Helium cylinder, 18...Leak indicator, 2
DESCRIPTION OF SYMBOLS 1... Leak rate meter, 23... Leak reference value setting part, 31... Spraying probe, 31'... Blowing probe, 35... Nozzle, 38... Actuator of the zero suppression switch, 41... Pass/fail indicator light.
Claims (1)
面にプローブガスを吹き付ける、もしくは内部密
閉空間が真空排気されその密閉空間内にプローブ
ガスが封入された被測定体の前記密閉空間から外
部へ漏れるプローブガスを吸い込むプローブと、
このプローブにより被測定体の外表面に吹き付け
られたプローブガスのうち被測定体の内部密閉空
間内に漏れ込んだプローブガス、もしくは被測定
体の内部密閉空間内に封入されたプローブガスの
うち被測定体の外部へ漏れ出て前記プローブガス
に吸い込まれたプローブガスを真空排気系を介し
て導入し、そのプローブガスの漏れを検出するリ
ークデテクタと、このリークデテクタにより検出
されたプローブガス漏洩値からバツクグラウンド
を差し引いて真の漏洩値を求めるゼロサプレス手
段と、その真の漏洩値と予め設定された漏洩基準
値とを比較して被測定体の合否を判定する合否判
定手段とを備えてなるリークテスト装置において
、前記合否判定手段に電気的に接続された合否表
示灯と、前記ゼロサプレス手段に電気的に接続さ
れ、プローブの作動操作と連動するゼロサプレス
用スイツチとを前記プローブに配置したことを特
徴とするリークテスト装置。 Spraying probe gas onto the outer surface of a device to be measured whose internal sealed space has been evacuated, or leaking to the outside from the sealed space of a device to be measured whose internal sealed space has been evacuated and probe gas has been sealed in the sealed space. A probe that sucks in probe gas,
Out of the probe gas sprayed onto the outer surface of the object to be measured by this probe, the probe gas leaks into the internal hermetic space of the object to be measured, or the probe gas sealed in the internal airtight space of the object to be measured is detected. A leak detector that detects leakage of the probe gas by introducing the probe gas leaking out of the measurement object and being sucked into the probe gas through a vacuum exhaust system, and a probe gas leakage value detected by the leak detector. A zero suppressing means for obtaining a true leakage value by subtracting the background from the background, and a pass/fail determining means for comparing the true leakage value with a preset leakage reference value to determine whether the object to be measured passes or fails. In the leak test device, a pass/fail indicator electrically connected to the pass/fail determination means and a zero suppress switch electrically connected to the zero suppress means and interlocked with actuation of the probe are disposed on the probe. Characteristic leak test equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2790486U JPS62140431U (en) | 1986-02-26 | 1986-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2790486U JPS62140431U (en) | 1986-02-26 | 1986-02-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62140431U true JPS62140431U (en) | 1987-09-04 |
Family
ID=30830370
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2790486U Pending JPS62140431U (en) | 1986-02-26 | 1986-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62140431U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016057202A (en) * | 2014-09-10 | 2016-04-21 | 島津エミット株式会社 | Helium leak detector |
| JP2019510228A (en) * | 2016-03-31 | 2019-04-11 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツングＩｎｆｉｃｏｎ ＧｍｂＨ | Gas leak inspection using test gas atomizer |
-
1986
- 1986-02-26 JP JP2790486U patent/JPS62140431U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016057202A (en) * | 2014-09-10 | 2016-04-21 | 島津エミット株式会社 | Helium leak detector |
| JP2019510228A (en) * | 2016-03-31 | 2019-04-11 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツングＩｎｆｉｃｏｎ ＧｍｂＨ | Gas leak inspection using test gas atomizer |
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