JPS6213947U - - Google Patents
Info
- Publication number
- JPS6213947U JPS6213947U JP10622085U JP10622085U JPS6213947U JP S6213947 U JPS6213947 U JP S6213947U JP 10622085 U JP10622085 U JP 10622085U JP 10622085 U JP10622085 U JP 10622085U JP S6213947 U JPS6213947 U JP S6213947U
- Authority
- JP
- Japan
- Prior art keywords
- suction pad
- vacuum suction
- base plate
- suctioning
- affixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920003002 synthetic resin Polymers 0.000 claims 1
- 239000000057 synthetic resin Substances 0.000 claims 1
- 239000006260 foam Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000007666 vacuum forming Methods 0.000 description 1
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
- Blow-Moulding Or Thermoforming Of Plastics Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10622085U JPS6213947U (sv) | 1985-07-10 | 1985-07-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10622085U JPS6213947U (sv) | 1985-07-10 | 1985-07-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6213947U true JPS6213947U (sv) | 1987-01-28 |
Family
ID=30981373
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10622085U Pending JPS6213947U (sv) | 1985-07-10 | 1985-07-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6213947U (sv) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014038954A (ja) * | 2012-08-17 | 2014-02-27 | Apic Yamada Corp | 半導体製造装置用吸着ヘッドおよびその製造方法 |
-
1985
- 1985-07-10 JP JP10622085U patent/JPS6213947U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014038954A (ja) * | 2012-08-17 | 2014-02-27 | Apic Yamada Corp | 半導体製造装置用吸着ヘッドおよびその製造方法 |