JPS62139373A - Discharge excitation type short pulse laser device - Google Patents

Discharge excitation type short pulse laser device

Info

Publication number
JPS62139373A
JPS62139373A JP27931185A JP27931185A JPS62139373A JP S62139373 A JPS62139373 A JP S62139373A JP 27931185 A JP27931185 A JP 27931185A JP 27931185 A JP27931185 A JP 27931185A JP S62139373 A JPS62139373 A JP S62139373A
Authority
JP
Japan
Prior art keywords
discharge
main
electrode
auxiliary
main electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27931185A
Other languages
Japanese (ja)
Inventor
Hitoshi Wakata
若田　仁志
Mitsuo Inoue
満夫 井上
Yukio Sato
行雄 佐藤
Takeo Haruta
春田　健雄
Haruhiko Nagai
治彦 永井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP27931185A priority Critical patent/JPS62139373A/en
Publication of JPS62139373A publication Critical patent/JPS62139373A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To make preliminary ionization uniform and to make a main discharge uniform by arranging a plurality of projections on a surface of an auxiliary electrode corresponding to a dielectric arranged on a back side of a main electrode. CONSTITUTION:A high voltage from a high-voltage power source 1 of a pulse laser device is applied between first and second main electrodes 2 and 3 and a laser medium is excited by a uniform glow main discharge 8 so as to emit laser beams from an optical axis 9. An auxiliary electrode 5 is arranged on a back side of the main electrode comprising openings 7 through a dielectric 4 and a plurality of projections are formed on the surface of the auxiliary electrode 5 which is in contact with the dielectric 4. Furthermore, a high voltage from an auxiliary power source 6 is applied between the main electrode 3 and the auxiliary electrode 5 and an auxiliary discharge is generated from the many projections. Then, the auxiliary discharge makes preliminary ionization of the main electrode 3 uniform and accordingly the main discharge 8 uniform.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は気体レーザのうち短パルスレーザ光を発生す
る放電励起型短パルスレーザ装置、特にその電極構造に
関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a discharge-excited short-pulse laser device that generates short-pulse laser light among gas lasers, and particularly to its electrode structure.

〔従来の技術〕[Conventional technology]

一般に、レーザ発揚を得るためにはレーザ媒質中での空
間的に均一な放電の発生を必要とする。Generally, in order to obtain laser launch, it is necessary to generate a spatially uniform discharge in the laser medium.

ところで、ＴＥＡＧＯ２レーザやエキシマレーザ等の短
パルスレーザ光を発生させる短パルスレーザ装置では、
その動作圧力が数気圧もの高圧であるため、上記の放電
は収束してアークになり易い。これを防止するために、
主放電励起型短に先立って予め主放電空間に均一に電子
をばらまいておくための予備７４ｍを行なうのが普通で
ある。By the way, in a short pulse laser device that generates short pulse laser light such as a TEAGO2 laser or an excimer laser,
Since the operating pressure is as high as several atmospheres, the above discharge tends to converge and become an arc. To prevent this,
Prior to the main discharge excitation type short circuit, a preliminary step 74m is usually performed to uniformly disperse electrons in the main discharge space.

第２図は従来の放電励起型短パルスレーザ装置における
予備電離と主放電の関係を説明するための図であり、こ
の装置における放電領域に垂直な断面の概略を示してい
る。図において、符号（１）は主放電のための高電圧電
源、■はレーザ媒質中に配置され、レーザ光軸方向を長
手方向とする第１の主電極、■は第２の主電極であり、
この電極は複数の開孔部（７）を有する。（句は第２の
主電極に直接接触している誘電体、（５ａ）は補助電極
で、（ｅは補助電極（５ａ）と第２の主電極０間に高電
圧を印加するための補助電源である。■は主放電で、■
はレーザの光軸を示すものである。FIG. 2 is a diagram for explaining the relationship between pre-ionization and main discharge in a conventional discharge-excited short-pulse laser device, and schematically shows a cross section perpendicular to the discharge region in this device. In the figure, symbol (1) is a high voltage power supply for main discharge, ■ is a first main electrode placed in the laser medium and whose longitudinal direction is in the direction of the laser optical axis, and ■ is a second main electrode. ,
This electrode has a plurality of apertures (7). (The phrase is the dielectric that is in direct contact with the second main electrode, (5a) is the auxiliary electrode, and (e is the auxiliary electrode for applying high voltage between the auxiliary electrode (5a) and the second main electrode 0. It is a power source. ■ is the main discharge, ■
indicates the optical axis of the laser.

次に上記の従来の放電励起型短パルスレーザ装置の動作
を説明する。補助電源（ｅにより第２の主電極■と補助
電極（５ａ）の間に高電圧が印加され、これにより、第
２の主電極■に設けられた開孔部（７）の近傍における
誘電体（４）の表面に補助放電（沿面放電）が生じる。Next, the operation of the above-mentioned conventional discharge-excited short pulse laser device will be explained. A high voltage is applied between the second main electrode (2) and the auxiliary electrode (5a) by the auxiliary power source (e), which causes the dielectric material in the vicinity of the opening (7) provided in the second main electrode (2) to (4) An auxiliary discharge (creeping discharge) occurs on the surface.

この補助放電により、第２の主電極■の近傍に電子がば
らまかれ、これが後述する主放電をグロー状の均一な放
電とするための種となる。次いで、第１及び第２の主電
極■、■間に高電圧電源（Ｄからの高電圧が印加される
ことにより、グロー状の均一な主放電■を生じる。そし
て、これによりレーザ媒質が励起され、その結果光軸■
の方向にレーザ光が取り出される。Due to this auxiliary discharge, electrons are scattered near the second main electrode (2), which becomes a seed for making the main discharge described later into a glow-like uniform discharge. Next, by applying a high voltage from a high voltage power supply (D) between the first and second main electrodes (2) and (2), a glow-like uniform main discharge (2) is generated.This excites the laser medium. As a result, the optical axis ■
Laser light is extracted in the direction of .

〔発明が解決しようとする問題点〕 従来の放電励起型短パルスレーザ装置は以上のように構
成されているので、′ｓ２の主電極■に設けられた多数
の開孔■のいずれにおいても一様な沿面放電を発生させ
るためには、第２の主電極■の開孔（７）の形状をそろ
えたり、誘電体（４ａ）の厚みを一様にしたり、あるい
は補助電極（５ａ）を丸める等により、電界が特定の開
孔（７）附近に集中しないようにする必要があった。[Problems to be Solved by the Invention] Since the conventional discharge-excited short-pulse laser device is configured as described above, it is possible that one of the many holes (2) provided in the main electrode (2) of In order to generate a similar creeping discharge, it is necessary to make the shapes of the openings (7) of the second main electrode (2) the same, to make the thickness of the dielectric (4a) uniform, or to round off the auxiliary electrode (5a). etc., it was necessary to prevent the electric field from concentrating around a specific aperture (7).

この発明は上記のような問題点を解消するためになされ
たもので、第２の主電極極に多数設けられたすべての開
孔に一様に沿面放電を飛ばし、レーザビームの強度分布
が滑らかな放電励起型短パルスレーザ装置を得ることを
目的とする。This invention was made in order to solve the above-mentioned problems, and the creeping discharge is uniformly spread across all the holes provided in the second main electrode, so that the intensity distribution of the laser beam is smooth. The purpose of this study is to obtain a discharge-excited short-pulse laser device.

〔問題点を解決するための手段〕[Means for solving problems]

この発明に係る放電励起型短パルスレーザ装置は、補助
電極の表面に突起部を多数もけたものである。The discharge-excited short pulse laser device according to the present invention has a large number of protrusions on the surface of the auxiliary electrode.

〔作用〕[Effect]

この発明においては、突起部に電界が集中するため、放
電が生じやすくなり、第２の主電極に沿っていたる所で
誘電体を介した放電が発生する。In this invention, since the electric field is concentrated at the protrusion, discharge is likely to occur, and discharge occurs through the dielectric everywhere along the second main electrode.

〔実施例〕〔Example〕

以下、この発明の一実施例を図について説明する。第１
図において、■は円錐状の突起部をを多数配した金属性
の補助電極である。その他の符号は３４２図に示した従
来例と同等かぞれに相当する部分を示す。An embodiment of the present invention will be described below with reference to the drawings. 1st
In the figure, ■ is a metallic auxiliary electrode with a large number of conical protrusions. Other symbols indicate the same parts as those in the conventional example shown in FIG. 342.

次に動作について説明する。補助電源０により第２の主
電極■と補助電極■との間に高電圧が印加されると、両
者の間で誘電体■を介した補助放電が発生する。高電圧
が印加された際に発生する電界は、補助電８ｉ（■に突
起が設けられているので突起の先端で高くなって補助放
電が生じやすくなる。しかも、突起は多数もうけられて
おり、多数の突起のすべてから補助放電が発生する。そ
の結果第２の主電極■の近傍に一様に電子がばらまかれ
る。Next, the operation will be explained. When a high voltage is applied between the second main electrode (2) and the auxiliary electrode (2) by the auxiliary power source 0, an auxiliary discharge occurs between the two through the dielectric material (2). Since the electric field generated when a high voltage is applied is provided with a protrusion on the auxiliary electric field 8i (■), it becomes high at the tip of the protrusion, making it easier for auxiliary discharge to occur.Moreover, there are many protrusions, Auxiliary discharge is generated from all of the many protrusions.As a result, electrons are uniformly scattered in the vicinity of the second main electrode (2).

次いで、第１及び第２の主電極■、■の間に高電圧電源
（１）からの高電圧が印加されると、上記の電子を種と
して一様なグロー状の主放電■が生じ、これによりレー
ザ媒貿が励起され、その結果光軸■の方向にレーザ光が
取り出される。Next, when a high voltage from the high voltage power supply (1) is applied between the first and second main electrodes (1) and (2), a uniform glow-like main discharge (2) is generated using the electrons as seeds, This excites the laser medium, and as a result, laser light is extracted in the direction of the optical axis (2).

なお、上記実施例では補助電極（ωにもうけられた突起
を円錐状としたが、Ｖ型あるいはコの字型の敵状の突起
を多数もうけてもよい。また、上記実施例では突起部を
一様に多数もうけたが、突起部のない部分をもうけ、補
助放電が発生しない場所をつくるようにすれば、予備電
離された電子の空間分布を調整できるという効果もある
。In the above embodiment, the protrusion provided on the auxiliary electrode (ω) is conical, but it is also possible to provide a large number of V-shaped or U-shaped protrusions.Also, in the above embodiment, the protrusion is Although a large number of electrons are uniformly formed, if a portion without protrusions is formed to create a place where auxiliary discharge does not occur, it is possible to adjust the spatial distribution of pre-ionized electrons.

〔発明の効果〕〔Effect of the invention〕

以上の様に、この発明によれば補助電極の表面に突起部
を多数もうけたので、予備電離が一様になり、従ってよ
り均一な主放電が得られるという効果がある。As described above, according to the present invention, since a large number of protrusions are provided on the surface of the auxiliary electrode, preliminary ionization becomes uniform, and therefore, a more uniform main discharge can be obtained.

【図面の簡単な説明】 第１図はこの発明の一実施例による放電励起型短パルス
レーザ装置を示す断面図、第２図は従来の放電励起型短
パルスレーザ装置を示す断面図である。 図において、（１）は高電圧電源、（りは第１の主電極
、■は第２の主電極、（勾は誘電体、（５）は補助電極
、（Ｑは補助電源、（７）は開孔部を示す。 なお、図中同一符号は同一まは相当部分を示す。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a sectional view showing a discharge excited short pulse laser device according to an embodiment of the present invention, and FIG. 2 is a sectional view showing a conventional discharge excited short pulse laser device. In the figure, (1) is a high voltage power supply, (ri is the first main electrode, ■ is the second main electrode, (gradient is the dielectric, (5) is the auxiliary electrode, (Q is the auxiliary power supply, (7) indicates an opening. Note that the same reference numerals in the figures indicate the same or equivalent parts.

Claims (2)

【特許請求の範囲】[Claims] （１）レーザ媒質中に配置され、レーザ光軸方向を長手
方向とする第１の主電極と、複数の開孔部を有し、上記
第１の主電極と対向して配置された第２の主電極と、該
第２の主電極の背面に接するように配置された誘電体と
、上記誘電体を上記第２の主電極とともにはさむように
配置された複数の突起部を有する補助電極とを備えたこ
とを特徴とする放電励起型短パルスレーザ装置。(1) A first main electrode disposed in a laser medium and having its longitudinal direction in the direction of the laser optical axis, and a second main electrode having a plurality of openings and disposed opposite to the first main electrode. a main electrode, a dielectric disposed in contact with the back surface of the second main electrode, and an auxiliary electrode having a plurality of protrusions disposed to sandwich the dielectric together with the second main electrode. A discharge-excited short pulse laser device comprising: （２）誘電体として、ガラス又はセラミックの管を用い
、その中に補助電極を配したことを特徴とする特許請求
の範囲第１項記載の放電励起型短パルスレーザ装置。(2) A discharge-excited short-pulse laser device according to claim 1, characterized in that a glass or ceramic tube is used as the dielectric material, and an auxiliary electrode is arranged inside the tube.
JP27931185A 1985-12-13 1985-12-13 Discharge excitation type short pulse laser device Pending JPS62139373A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27931185A JPS62139373A (en) 1985-12-13 1985-12-13 Discharge excitation type short pulse laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27931185A JPS62139373A (en) 1985-12-13 1985-12-13 Discharge excitation type short pulse laser device

Publications (1)

Publication Number Publication Date
JPS62139373A true JPS62139373A (en) 1987-06-23

Family

ID=17609394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27931185A Pending JPS62139373A (en) 1985-12-13 1985-12-13 Discharge excitation type short pulse laser device

Country Status (1)

Country Link
JP (1) JPS62139373A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS647578A (en) * 1987-06-30 1989-01-11 Toshiba Corp Gas laser device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS647578A (en) * 1987-06-30 1989-01-11 Toshiba Corp Gas laser device

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