JPS62138440U - - Google Patents

Info

Publication number

JPS62138440U

JPS62138440U JP2585086U JP2585086U JPS62138440U JP S62138440 U JPS62138440 U JP S62138440U JP 2585086 U JP2585086 U JP 2585086U JP 2585086 U JP2585086 U JP 2585086U JP S62138440 U JPS62138440 U JP S62138440U

Authority

JP

Japan

Prior art keywords

semiconductor substrate

etching

semiconductor

chemical solution

irradiating

Prior art date

1986-02-24

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000005530 etching Methods 0.000 claims description 3
• 239000000126 substance Substances 0.000 claims description 2
• 239000004065 semiconductor Substances 0.000 claims 3
• 239000000758 substrate Substances 0.000 claims 2
• 230000001678 irradiating effect Effects 0.000 claims 1
• 230000007246 mechanism Effects 0.000 claims 1
• 238000005507 spraying Methods 0.000 claims 1
• 239000002344 surface layer Substances 0.000 claims 1
• 239000007921 spray Substances 0.000 description 2

Cited By (2)