JPS62138073A - Starting method for turning gear in vacuum - Google Patents

Starting method for turning gear in vacuum

Info

Publication number
JPS62138073A
JPS62138073A JP27782785A JP27782785A JPS62138073A JP S62138073 A JPS62138073 A JP S62138073A JP 27782785 A JP27782785 A JP 27782785A JP 27782785 A JP27782785 A JP 27782785A JP S62138073 A JPS62138073 A JP S62138073A
Authority
JP
Japan
Prior art keywords
vacuum
time
valve
pressure
vacuum container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27782785A
Other languages
Japanese (ja)
Inventor
Keiichi Akagawa
赤川 慶一
Noboru Inamura
稲村 登
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP27782785A priority Critical patent/JPS62138073A/en
Publication of JPS62138073A publication Critical patent/JPS62138073A/en
Pending legal-status Critical Current

Links

Landscapes

  • Motor And Converter Starters (AREA)

Abstract

PURPOSE:To shorten the starting time by evacuating the inside of a vacuum vessel up to a predetermined pressure, heating the outer surface of the vacuum vessel by a fluid at a high temperature and driving a revolving electric machine installed into the vacuum, vessel. CONSTITUTION:A rotary vacuum pump 7 is operated. A valve 12 is opened at the time T1 when a pressure-fluctuation gradient is made easy, and fluid at a high temperature is made to flow into a fluid path 10. The inner surface of a vacuum vessel 1 and an interior part such as a motor are degassed and treated by the heating. The valve 12 is controlled to be closed at the time T2 after a fixed time passes. The valve 12 is controlled to be opened again at the time T3 when pressure is made lower than that at the time T1. The inside of the vacuum vessel 1 is evacuated up to predetermined pressure or less, repeating the opening and closing of the valve 12. The motor 4 is driven at the time reaching target pressure. The valve 14 is controlled to be opened at the time when operation transfers to stationary operation, and a fluid at a low temperature is made to flow through the fluid path 10.

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明は、真空容器内に回転電機を設置してなる真空内
回転装置の起動方法に係り、特に、起動時間の短縮化を
図れるようにした起動方法に関する。
[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to a method for starting a rotating device in a vacuum having a rotating electrical machine installed in a vacuum container, and particularly to a method for starting a rotating device in a vacuum, which is capable of shortening the starting time. Regarding the startup method.

〔発明の技術的背景とその問題点〕[Technical background of the invention and its problems]

ある種のプラントでは、真空容器内に回転電機を設置し
、この回転電機を真空雰囲気中で運転するようにしたも
のがある。第3図は、このような真空内回転装置の代表
的な例を示すもので、真空容器1内にロータ2とステー
タ3とからなるモータ4を設置している。そして、モー
タ4のステータコイル線端をハーメチックシール部5を
通して外部に設けられた図示しないモータ駆i1]電源
に接続し、さらに真空容器1の排気口6をロータリ真空
ポンプ7に接続したものとなっている。なお。
In some types of plants, a rotating electric machine is installed in a vacuum container and the rotating electric machine is operated in a vacuum atmosphere. FIG. 3 shows a typical example of such a vacuum rotation device, in which a motor 4 consisting of a rotor 2 and a stator 3 is installed inside a vacuum container 1. The stator coil wire end of the motor 4 is connected to an external motor drive power source (not shown) through the hermetic seal 5, and the exhaust port 6 of the vacuum container 1 is connected to the rotary vacuum pump 7. ing. In addition.

図中8,9は軸受を示している。In the figure, numerals 8 and 9 indicate bearings.

ところで、上記のように構成された真空内回転装置を起
動するときには通常2次のような方法が採用されている
。すなわち、まずロータリ真空ポンプ7を動作させて真
空容器1内を真空引きする。
By the way, when starting up the vacuum rotating device configured as described above, the following method is usually adopted. That is, first, the rotary vacuum pump 7 is operated to evacuate the inside of the vacuum container 1.

そして、真空容器1内の圧力が一定以下まで下がつだ時
点でモータ駆動電源を投入してモータ4を回転開始させ
るようにしている。
Then, when the pressure inside the vacuum container 1 drops below a certain level, the motor drive power is turned on and the motor 4 starts rotating.

しかしながら、上記のような起動方法を採用した場合に
は次のような問題があった。すなわち。
However, when the above startup method is adopted, the following problems occur. Namely.

モータ駆動電源として、モータ4を最も少ない電力で定
格回転数まで上昇させるように設計されたものを使用し
た場合には、定格回転数まで上昇させるのに相当の時間
を必要とする。これは次のような理由による。づなわち
、最も一般的なロータリ真空ポンプを使用して真空容器
内を排気した場合には、第4図に示すような排気特性し
か得ることができない。この図は横軸に真空ポンプを動
作開始させた時点からの経過時間を示し、縦軸に真空容
器内の圧力を示している。この図から判かるように排気
開始当初は急激に排気され、その後は漸次排気されるが
、その勾配は非常に緩やかなものとなる。これは真空容
器内の体積とロータリ真空ポンプの排気量との関係によ
って決り、特に。
If a motor drive power source designed to increase the rotation speed of the motor 4 to the rated rotation speed with the least amount of electric power is used, a considerable amount of time is required to increase the rotation speed to the rated rotation speed. This is due to the following reasons. That is, when the inside of a vacuum container is evacuated using the most common rotary vacuum pump, only the evacuating characteristics shown in FIG. 4 can be obtained. In this figure, the horizontal axis shows the elapsed time from the time when the vacuum pump started operating, and the vertical axis shows the pressure inside the vacuum container. As can be seen from this figure, the gas is rapidly exhausted at the beginning of the exhaust, and then it is gradually exhausted, but the slope becomes very gentle. This is determined by the relationship between the volume inside the vacuum vessel and the displacement of the rotary vacuum pump, especially.

真空容器の体積が大きく、ロータリ真空ポンプの排気量
が小さいとき顕著となる。したがって、前述のように設
計されたモータ駆動電源を使用し。
This becomes noticeable when the volume of the vacuum container is large and the displacement of the rotary vacuum pump is small. Therefore, using a motor drive power supply designed as described above.

充分な排気を行なわずにモータ4を駆動開始さゼた場合
、供給電力量によって決まる回転数より風損分だけ低い
回転数でバランスし、真空容器1内の圧力が少しずつ低
下する分だけ回転数が徐々に上昇すると言った仔過を辿
りながら定格回転数まで上昇するので相当の時間を要す
ることになる。
If the motor 4 is started without sufficient evacuation, it will be balanced at a rotation speed that is lower than the rotation speed determined by the amount of supplied power by the amount of windage loss, and rotate as the pressure inside the vacuum vessel 1 gradually decreases. It takes a considerable amount of time to increase the number of revolutions to the rated number while following the process of gradually increasing the number of revolutions.

このように、起動に長時間を要すると、真空容器1内を
繰返し大気圧に戻して運転するような場合には時間的な
損失を免れ得ないものとなる。
If it takes a long time to start up as described above, a loss of time will be inevitable if the inside of the vacuum container 1 is repeatedly returned to atmospheric pressure for operation.

〔発明の目的〕[Purpose of the invention]

本発明は、このような事情に鑑みてなされたもので、そ
の目的とするところは、排気特性を大幅に改善すること
ができ、もって起動時間を短縮させ得る真空内回転装置
の起動方法を提供することにある。
The present invention has been made in view of the above circumstances, and its purpose is to provide a method for starting a rotating device in a vacuum, which can significantly improve the exhaust characteristics and shorten the start-up time. It's about doing.

〔発明の概要〕[Summary of the invention]

本発明によれば、真空容器の外面を高温流体で加熱しな
がら上記真空容器内を所定圧力まで真空引きした後、上
記真空容器内に設置された回転電機を駆動するようにし
た真空内回転装置の起動方法が提供される。
According to the present invention, an in-vacuum rotating device is configured to evacuate the inside of the vacuum container to a predetermined pressure while heating the outer surface of the vacuum container with a high-temperature fluid, and then drive a rotating electric machine installed in the vacuum container. A startup method is provided.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、高温流体を用いて真空容器を外面から
加熱するようにしているので、この加熱によって真空容
器の内壁面やモータ等の容器内装物を強制的に脱ガス処
理することができる。この脱ガス処理によって排気特性
を改善でき、短時間に一定圧力以下まで排気させること
ができる。この結果、起動時間の短縮化を達成すること
ができる。
According to the present invention, since the vacuum container is heated from the outside using a high-temperature fluid, the inner wall surface of the vacuum container, the motor, and other internal components of the vacuum container can be forcibly degassed. . This degassing treatment improves the exhaust characteristics and allows the exhaust to be evacuated to a certain pressure or less in a short time. As a result, it is possible to shorten the startup time.

〔発明の実施例〕[Embodiments of the invention]

以下1本発明の実施例を図面を参照しながら説明する。 An embodiment of the present invention will be described below with reference to the drawings.

第1図は9本発明方法が適用される真空内回転装置の模
式図である。この図では、第3図と同一部分に同一符号
が付されている。したがって1重複する部分の詳しい説
明は省略する。
FIG. 1 is a schematic diagram of a vacuum rotation apparatus to which the method of the present invention is applied. In this figure, the same parts as in FIG. 3 are given the same reference numerals. Therefore, a detailed explanation of the overlapping portion will be omitted.

この例では、真空容器1の外側に、真空容器1の壁を兼
用し、かつ真空容器1を取り囲む関係に流体通路10が
設けられている。そして、流体通路10の入口11はバ
ルブ12を介して高温水あるいは高温蒸気等の高温流体
供給源13に接続されるとともにバルブ14を介して低
温流体供給源15に接続されている。
In this example, a fluid passage 10 is provided on the outside of the vacuum container 1 so as to double as the wall of the vacuum container 1 and to surround the vacuum container 1 . The inlet 11 of the fluid passage 10 is connected via a valve 12 to a high-temperature fluid supply source 13 such as high-temperature water or high-temperature steam, and is also connected via a valve 14 to a low-temperature fluid supply source 15 .

次に、第2図を参照しながら、この装置の起動手順を説
明する。まず、ロータリ真空ポンプ7を動作開始させる
。このようにロータリ真空ポンプ7を動作開始させると
、開始当初は第2図に示すように真空容器1内が急激に
排気され、続いて圧力変化勾配が緩やかとなる。この緩
やかになった時点T1で、バルブ12を“開″にする。
Next, referring to FIG. 2, the startup procedure of this device will be explained. First, the rotary vacuum pump 7 is started to operate. When the rotary vacuum pump 7 starts operating in this manner, the inside of the vacuum container 1 is rapidly evacuated as shown in FIG. 2 at the beginning, and then the pressure change gradient becomes gentle. At the time point T1 when the temperature becomes gentle, the valve 12 is opened.

バルブ12が“開″に制御されると、流体通路1o内に
高温流体が図中実線矢印で示すように流れる。このため
、真空容器1の壁が加熱され、この加熱によって真空容
器1の内面やモータ等の内装物が脱ガス処理される。こ
の脱ガスで真空容器1内は一時的に圧力上昇する。ロー
タリ真空ポンプ7による排気を継続させながら高温流体
を一定時間流し。
When the valve 12 is controlled to be "open", high temperature fluid flows into the fluid passage 1o as shown by the solid line arrow in the figure. Therefore, the wall of the vacuum container 1 is heated, and the inner surface of the vacuum container 1 and internal components such as the motor are degassed by this heating. Due to this degassing, the pressure inside the vacuum container 1 temporarily increases. The high temperature fluid is flowed for a certain period of time while the rotary vacuum pump 7 continues to exhaust the air.

時点T2においてバルブ12を゛閉゛′に制御する。At time T2, the valve 12 is controlled to be 'closed'.

このバルブ?ri+制御によって、脱ガスが止まり、真
空容器1内の圧力は再び低下する。そして2時点T1に
おける圧力より低下した時点T3において再びバルブ1
2を゛′開°′に制御して流体通路10へ高温流体を一
定時間流す。以後、バルブ12の開閉を繰り返しながら
真空容器1内を一定圧力以下まで排気する。そして、目
標圧力に達した時点でモータ4を駆動する。また、定常
運転に移行した時点でバルブ14を゛開″に制御して流
体通路10へ低温流体を流すようにする。
This valve? By the ri+ control, degassing is stopped and the pressure inside the vacuum vessel 1 is reduced again. Then, at the time T3 when the pressure has decreased from the pressure at the second time T1, the valve 1 is again
2 is controlled to be ``open'' to allow high-temperature fluid to flow into the fluid passage 10 for a certain period of time. Thereafter, the inside of the vacuum container 1 is evacuated to a certain pressure or less while repeatedly opening and closing the valve 12. Then, the motor 4 is driven when the target pressure is reached. Further, at the time of transition to steady operation, the valve 14 is controlled to be "open" so that the low temperature fluid flows into the fluid passage 10.

このような起動方法であると、真空容器1内を目標圧力
まで排気する時間を短縮でき、起動時間を短縮すること
ができる。すなわち、真空容器1を強制的に加熱して脱
ガス迅理するようにしているので、ロータリ真空ポンプ
7の吸引力だけで脱ガスさせる場合に比べて脱ガスに要
する時間を短縮でき、その結果、目標圧力に到達するま
での時間を短縮することができる。したがって、起動時
間の短縮化の実現に寄与することができる。
With such a startup method, the time required to evacuate the inside of the vacuum container 1 to the target pressure can be shortened, and the startup time can be shortened. In other words, since the vacuum container 1 is forcibly heated to expedite degassing, the time required for degassing can be shortened compared to when degassing is done only by the suction force of the rotary vacuum pump 7. , the time required to reach the target pressure can be shortened. Therefore, it is possible to contribute to shortening the startup time.

なお1本発明は上述した実施例に限定されるものではな
く、前記モータを駆動源として容器内の回転体を同軸で
駆動する等をはじめ種々変形できる。また、真空容器内
の圧力がある値まで低下した時点で流体通路10に低温
流体を流すことによって目標圧力までの到達時間をさら
に短縮させるようにしてもよい。また、上述した実施例
では起動時に高温流体を通流させる流体通路に定常運転
時には低温流体を通流させ、流体通路を兼用させるよう
にしているが、それぞれ専用の流体通路を設警プるよう
にしてもよい。また、排気用のポンプはロータリ真空ポ
ンプに限られるものではない。
Note that the present invention is not limited to the above-described embodiments, and can be modified in various ways, such as coaxially driving the rotating body inside the container using the motor as a drive source. Alternatively, the time required to reach the target pressure may be further shortened by flowing low-temperature fluid into the fluid passage 10 when the pressure within the vacuum container has decreased to a certain value. In addition, in the above-mentioned embodiment, the fluid passage through which high-temperature fluid flows during startup is made to flow through low-temperature fluid during steady operation, so that the fluid passage also serves as a fluid passage. You may also do so. Further, the pump for evacuation is not limited to a rotary vacuum pump.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の起動方法が適用される真空内回転装置
の模式的構成図、第2図は本発明の起動方法を採用した
ときの排気特性を示す図、第3図は従来の起動方法を採
用した真空内回転装置の(Q式的構成図、第4図は従来
の起動方法を採用したときの排気特性を示す図である。 1・・・真空容器、4・・・モータ、7・・・ロータリ
真空ポンプ、13・・・高温流体供給源。 第1図 Ilを  n 第2図 第3図 第4図
Fig. 1 is a schematic configuration diagram of a rotating device in vacuum to which the starting method of the present invention is applied, Fig. 2 is a diagram showing exhaust characteristics when the starting method of the present invention is adopted, and Fig. 3 is a diagram showing the conventional starting method. Fig. 4 is a diagram showing the exhaust characteristics when the conventional startup method is adopted. 1... Vacuum vessel, 4... Motor, 7... Rotary vacuum pump, 13... High temperature fluid supply source. Fig. 1 Il n Fig. 2 Fig. 3 Fig. 4

Claims (3)

【特許請求の範囲】[Claims] (1)真空容器内に回転電機を設置してなる真空内回転
装置を起動するに当って、前記真空容器の外面を高温流
体で加熱しながら上記真空容器内を所定圧力まで真空引
きした後、前記回転電機を駆動するようにしたことを特
徴とする真空内回転装置の起動方法。
(1) When starting up a vacuum rotating device consisting of a rotating electric machine installed inside a vacuum container, after evacuation of the inside of the vacuum container to a predetermined pressure while heating the outer surface of the vacuum container with high-temperature fluid, A method for starting a rotating device in a vacuum, characterized in that the rotating electric machine is driven.
(2)前記高温流体を、前記真空容器の外面に沿って設
けられた通路を通して通流させるようにしたことを特徴
とする特許請求の範囲第1項記載の真空内回転装置の起
動方法。
(2) The method for starting a rotating device in a vacuum according to claim 1, wherein the high-temperature fluid is made to flow through a passage provided along the outer surface of the vacuum container.
(3)前記通路は、定常運転時の低温流体通路を兼ねて
いることを特徴とする特許請求の範囲第2項記載の真空
内回転装置の起動方法。
(3) The method for starting a rotating device in a vacuum according to claim 2, wherein the passage also serves as a low-temperature fluid passage during steady operation.
JP27782785A 1985-12-12 1985-12-12 Starting method for turning gear in vacuum Pending JPS62138073A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27782785A JPS62138073A (en) 1985-12-12 1985-12-12 Starting method for turning gear in vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27782785A JPS62138073A (en) 1985-12-12 1985-12-12 Starting method for turning gear in vacuum

Publications (1)

Publication Number Publication Date
JPS62138073A true JPS62138073A (en) 1987-06-20

Family

ID=17588816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27782785A Pending JPS62138073A (en) 1985-12-12 1985-12-12 Starting method for turning gear in vacuum

Country Status (1)

Country Link
JP (1) JPS62138073A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007160680A (en) * 2005-12-13 2007-06-28 Kuretake Co Ltd Pen-point holding cap

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007160680A (en) * 2005-12-13 2007-06-28 Kuretake Co Ltd Pen-point holding cap

Similar Documents

Publication Publication Date Title
JP3929185B2 (en) Vacuum exhaust apparatus and method
JP4819828B2 (en) Method for cleaning a vacuum screw pump
JP5496498B2 (en) Vacuum pump and method of operating vacuum pump
JPH07329066A (en) Inner heater for tire vulcanization
JPS62138073A (en) Starting method for turning gear in vacuum
JPS6143297A (en) Gas purge device for molecular pump
KR20020043445A (en) Vacuum pump
JPH018713Y2 (en)
EP0522603B1 (en) Pumping stage for turbomolecular pumps
US4193742A (en) Vacuum pump assembly with built-in shutoff valve
JPS6332180A (en) Vacuum pump controlling method
CN209406597U (en) A kind of traditional vacuum concentrating instrument
JPH09317641A (en) Vacuum exhauster
JPH1183338A (en) Hot isotropic pressing apparatus
JP3226316B2 (en) Vapor compression evaporator
CN220822835U (en) Three-phase asynchronous motor for high-temperature environment
CN104578469B (en) A kind of method, apparatus for reducing switched reluctance machines vibration and noise
JP2003071271A (en) Plasma treatment apparatus
JPH10160312A (en) Food cooling device, and food cooling method using the device
JPH05106578A (en) Warming-up control method for screw type dry vacuum pump
JPS62192582A (en) Vacuum evacuation device
JP6125242B2 (en) Vacuum pump device and operation method thereof
JPH09273659A (en) Baking device for vacuum device
JP3130128B2 (en) Vacuum pump with cryotrap
JP2001207992A (en) Turbo dry pump