JPS62136989U - - Google Patents
Info
- Publication number
- JPS62136989U JPS62136989U JP2350886U JP2350886U JPS62136989U JP S62136989 U JPS62136989 U JP S62136989U JP 2350886 U JP2350886 U JP 2350886U JP 2350886 U JP2350886 U JP 2350886U JP S62136989 U JPS62136989 U JP S62136989U
- Authority
- JP
- Japan
- Prior art keywords
- contamination
- pump
- degree
- liquid supply
- detection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 4
- 238000005406 washing Methods 0.000 claims description 4
- 238000011109 contamination Methods 0.000 claims 6
- 239000002904 solvent Substances 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2350886U JPS62136989U (en, 2012) | 1986-02-20 | 1986-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2350886U JPS62136989U (en, 2012) | 1986-02-20 | 1986-02-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62136989U true JPS62136989U (en, 2012) | 1987-08-28 |
Family
ID=30821871
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2350886U Pending JPS62136989U (en, 2012) | 1986-02-20 | 1986-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62136989U (en, 2012) |
-
1986
- 1986-02-20 JP JP2350886U patent/JPS62136989U/ja active Pending