JPS62136582U - - Google Patents
Info
- Publication number
- JPS62136582U JPS62136582U JP2338886U JP2338886U JPS62136582U JP S62136582 U JPS62136582 U JP S62136582U JP 2338886 U JP2338886 U JP 2338886U JP 2338886 U JP2338886 U JP 2338886U JP S62136582 U JPS62136582 U JP S62136582U
- Authority
- JP
- Japan
- Prior art keywords
- metal fitting
- wafer
- swinging member
- movable
- wafer holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims 1
- 239000007791 liquid phase Substances 0.000 description 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2338886U JPS62136582U (enExample) | 1986-02-20 | 1986-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2338886U JPS62136582U (enExample) | 1986-02-20 | 1986-02-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62136582U true JPS62136582U (enExample) | 1987-08-28 |
Family
ID=30821653
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2338886U Pending JPS62136582U (enExample) | 1986-02-20 | 1986-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62136582U (enExample) |
-
1986
- 1986-02-20 JP JP2338886U patent/JPS62136582U/ja active Pending