JPS62136582U - - Google Patents

Info

Publication number
JPS62136582U
JPS62136582U JP2338886U JP2338886U JPS62136582U JP S62136582 U JPS62136582 U JP S62136582U JP 2338886 U JP2338886 U JP 2338886U JP 2338886 U JP2338886 U JP 2338886U JP S62136582 U JPS62136582 U JP S62136582U
Authority
JP
Japan
Prior art keywords
metal fitting
wafer
swinging member
movable
wafer holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2338886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2338886U priority Critical patent/JPS62136582U/ja
Publication of JPS62136582U publication Critical patent/JPS62136582U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Thin Magnetic Films (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP2338886U 1986-02-20 1986-02-20 Pending JPS62136582U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2338886U JPS62136582U (enrdf_load_stackoverflow) 1986-02-20 1986-02-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2338886U JPS62136582U (enrdf_load_stackoverflow) 1986-02-20 1986-02-20

Publications (1)

Publication Number Publication Date
JPS62136582U true JPS62136582U (enrdf_load_stackoverflow) 1987-08-28

Family

ID=30821653

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2338886U Pending JPS62136582U (enrdf_load_stackoverflow) 1986-02-20 1986-02-20

Country Status (1)

Country Link
JP (1) JPS62136582U (enrdf_load_stackoverflow)

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