JPS62136570U - - Google Patents

Info

Publication number
JPS62136570U
JPS62136570U JP2140386U JP2140386U JPS62136570U JP S62136570 U JPS62136570 U JP S62136570U JP 2140386 U JP2140386 U JP 2140386U JP 2140386 U JP2140386 U JP 2140386U JP S62136570 U JPS62136570 U JP S62136570U
Authority
JP
Japan
Prior art keywords
electrode
brought
ecr type
potential
accelerating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2140386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2140386U priority Critical patent/JPS62136570U/ja
Publication of JPS62136570U publication Critical patent/JPS62136570U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Electron Sources, Ion Sources (AREA)
JP2140386U 1986-02-17 1986-02-17 Pending JPS62136570U (US06330241-20011211-M00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2140386U JPS62136570U (US06330241-20011211-M00004.png) 1986-02-17 1986-02-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2140386U JPS62136570U (US06330241-20011211-M00004.png) 1986-02-17 1986-02-17

Publications (1)

Publication Number Publication Date
JPS62136570U true JPS62136570U (US06330241-20011211-M00004.png) 1987-08-28

Family

ID=30817815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2140386U Pending JPS62136570U (US06330241-20011211-M00004.png) 1986-02-17 1986-02-17

Country Status (1)

Country Link
JP (1) JPS62136570U (US06330241-20011211-M00004.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07118859A (ja) * 1993-10-19 1995-05-09 Nissin Electric Co Ltd イオン源装置
JP2003203577A (ja) * 2003-02-05 2003-07-18 Nissin Electric Co Ltd プラズマ源装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07118859A (ja) * 1993-10-19 1995-05-09 Nissin Electric Co Ltd イオン源装置
JP2003203577A (ja) * 2003-02-05 2003-07-18 Nissin Electric Co Ltd プラズマ源装置

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