JPS62136567U - - Google Patents

Info

Publication number
JPS62136567U
JPS62136567U JP2178886U JP2178886U JPS62136567U JP S62136567 U JPS62136567 U JP S62136567U JP 2178886 U JP2178886 U JP 2178886U JP 2178886 U JP2178886 U JP 2178886U JP S62136567 U JPS62136567 U JP S62136567U
Authority
JP
Japan
Prior art keywords
pressure
automatic valve
vacuum chamber
vacuum
pressure controller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2178886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0512281Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2178886U priority Critical patent/JPH0512281Y2/ja
Publication of JPS62136567U publication Critical patent/JPS62136567U/ja
Application granted granted Critical
Publication of JPH0512281Y2 publication Critical patent/JPH0512281Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Feedback Control In General (AREA)
JP2178886U 1986-02-17 1986-02-17 Expired - Lifetime JPH0512281Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2178886U JPH0512281Y2 (enrdf_load_stackoverflow) 1986-02-17 1986-02-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2178886U JPH0512281Y2 (enrdf_load_stackoverflow) 1986-02-17 1986-02-17

Publications (2)

Publication Number Publication Date
JPS62136567U true JPS62136567U (enrdf_load_stackoverflow) 1987-08-28
JPH0512281Y2 JPH0512281Y2 (enrdf_load_stackoverflow) 1993-03-29

Family

ID=30818553

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2178886U Expired - Lifetime JPH0512281Y2 (enrdf_load_stackoverflow) 1986-02-17 1986-02-17

Country Status (1)

Country Link
JP (1) JPH0512281Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013225660A (ja) * 2012-03-21 2013-10-31 Hitachi Kokusai Electric Inc 半導体装置の製造方法、基板処理方法、基板処理装置およびプログラム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013225660A (ja) * 2012-03-21 2013-10-31 Hitachi Kokusai Electric Inc 半導体装置の製造方法、基板処理方法、基板処理装置およびプログラム

Also Published As

Publication number Publication date
JPH0512281Y2 (enrdf_load_stackoverflow) 1993-03-29

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