JPS62136565U - - Google Patents
Info
- Publication number
- JPS62136565U JPS62136565U JP2313386U JP2313386U JPS62136565U JP S62136565 U JPS62136565 U JP S62136565U JP 2313386 U JP2313386 U JP 2313386U JP 2313386 U JP2313386 U JP 2313386U JP S62136565 U JPS62136565 U JP S62136565U
- Authority
- JP
- Japan
- Prior art keywords
- heater
- substrates
- film deposition
- line film
- deposition manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000003779 heat-resistant material Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2313386U JPH0230440Y2 (cs) | 1986-02-19 | 1986-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2313386U JPH0230440Y2 (cs) | 1986-02-19 | 1986-02-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62136565U true JPS62136565U (cs) | 1987-08-28 |
| JPH0230440Y2 JPH0230440Y2 (cs) | 1990-08-16 |
Family
ID=30821171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2313386U Expired JPH0230440Y2 (cs) | 1986-02-19 | 1986-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0230440Y2 (cs) |
-
1986
- 1986-02-19 JP JP2313386U patent/JPH0230440Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0230440Y2 (cs) | 1990-08-16 |
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