JPS62136437U - - Google Patents

Info

Publication number
JPS62136437U
JPS62136437U JP2381486U JP2381486U JPS62136437U JP S62136437 U JPS62136437 U JP S62136437U JP 2381486 U JP2381486 U JP 2381486U JP 2381486 U JP2381486 U JP 2381486U JP S62136437 U JPS62136437 U JP S62136437U
Authority
JP
Japan
Prior art keywords
substrates
magazine
board
ejector
substrate supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2381486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2381486U priority Critical patent/JPS62136437U/ja
Publication of JPS62136437U publication Critical patent/JPS62136437U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP2381486U 1986-02-20 1986-02-20 Pending JPS62136437U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2381486U JPS62136437U (enrdf_load_stackoverflow) 1986-02-20 1986-02-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2381486U JPS62136437U (enrdf_load_stackoverflow) 1986-02-20 1986-02-20

Publications (1)

Publication Number Publication Date
JPS62136437U true JPS62136437U (enrdf_load_stackoverflow) 1987-08-27

Family

ID=30822461

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2381486U Pending JPS62136437U (enrdf_load_stackoverflow) 1986-02-20 1986-02-20

Country Status (1)

Country Link
JP (1) JPS62136437U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5364476A (en) * 1976-11-22 1978-06-08 Toshiba Corp Slide lever for semiconductor wafer transfer device
JPS62167138A (ja) * 1986-01-20 1987-07-23 Denyo Kk シ−ト材自動供給装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5364476A (en) * 1976-11-22 1978-06-08 Toshiba Corp Slide lever for semiconductor wafer transfer device
JPS62167138A (ja) * 1986-01-20 1987-07-23 Denyo Kk シ−ト材自動供給装置

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