JPS62134903U - - Google Patents

Info

Publication number
JPS62134903U
JPS62134903U JP16284685U JP16284685U JPS62134903U JP S62134903 U JPS62134903 U JP S62134903U JP 16284685 U JP16284685 U JP 16284685U JP 16284685 U JP16284685 U JP 16284685U JP S62134903 U JPS62134903 U JP S62134903U
Authority
JP
Japan
Prior art keywords
spool
piezoelectric bodies
servo valve
valve body
output end
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16284685U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0414646Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985162846U priority Critical patent/JPH0414646Y2/ja
Publication of JPS62134903U publication Critical patent/JPS62134903U/ja
Application granted granted Critical
Publication of JPH0414646Y2 publication Critical patent/JPH0414646Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Servomotors (AREA)
JP1985162846U 1985-10-25 1985-10-25 Expired JPH0414646Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985162846U JPH0414646Y2 (enExample) 1985-10-25 1985-10-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985162846U JPH0414646Y2 (enExample) 1985-10-25 1985-10-25

Publications (2)

Publication Number Publication Date
JPS62134903U true JPS62134903U (enExample) 1987-08-25
JPH0414646Y2 JPH0414646Y2 (enExample) 1992-04-02

Family

ID=31090496

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985162846U Expired JPH0414646Y2 (enExample) 1985-10-25 1985-10-25

Country Status (1)

Country Link
JP (1) JPH0414646Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62106106A (ja) * 1985-11-01 1987-05-16 Toyoda Autom Loom Works Ltd リニアパルスモ−タ直結式制御弁

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60129481A (ja) * 1983-12-13 1985-07-10 Nippon Denso Co Ltd 圧電素子駆動の制御弁
JPS60139981A (ja) * 1983-12-27 1985-07-24 Saginomiya Seisakusho Inc 圧電素子を利用した弁
JPS60155073A (ja) * 1984-01-25 1985-08-14 Nippon Denso Co Ltd 圧電素子駆動の切換弁

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60129481A (ja) * 1983-12-13 1985-07-10 Nippon Denso Co Ltd 圧電素子駆動の制御弁
JPS60139981A (ja) * 1983-12-27 1985-07-24 Saginomiya Seisakusho Inc 圧電素子を利用した弁
JPS60155073A (ja) * 1984-01-25 1985-08-14 Nippon Denso Co Ltd 圧電素子駆動の切換弁

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62106106A (ja) * 1985-11-01 1987-05-16 Toyoda Autom Loom Works Ltd リニアパルスモ−タ直結式制御弁

Also Published As

Publication number Publication date
JPH0414646Y2 (enExample) 1992-04-02

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