JPS62134234U - - Google Patents
Info
- Publication number
- JPS62134234U JPS62134234U JP1880486U JP1880486U JPS62134234U JP S62134234 U JPS62134234 U JP S62134234U JP 1880486 U JP1880486 U JP 1880486U JP 1880486 U JP1880486 U JP 1880486U JP S62134234 U JPS62134234 U JP S62134234U
- Authority
- JP
- Japan
- Prior art keywords
- tubes
- nozzle
- hole
- tube
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000000428 dust Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1880486U JPS62134234U (OSRAM) | 1986-02-14 | 1986-02-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1880486U JPS62134234U (OSRAM) | 1986-02-14 | 1986-02-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62134234U true JPS62134234U (OSRAM) | 1987-08-24 |
Family
ID=30812812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1880486U Pending JPS62134234U (OSRAM) | 1986-02-14 | 1986-02-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62134234U (OSRAM) |
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1986
- 1986-02-14 JP JP1880486U patent/JPS62134234U/ja active Pending