JPS62134016U - - Google Patents
Info
- Publication number
- JPS62134016U JPS62134016U JP2162386U JP2162386U JPS62134016U JP S62134016 U JPS62134016 U JP S62134016U JP 2162386 U JP2162386 U JP 2162386U JP 2162386 U JP2162386 U JP 2162386U JP S62134016 U JPS62134016 U JP S62134016U
- Authority
- JP
- Japan
- Prior art keywords
- observation
- optical system
- light
- contact detection
- detection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 11
- 238000005259 measurement Methods 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims 6
- 238000006073 displacement reaction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 201000009310 astigmatism Diseases 0.000 description 2
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986021623U JP2512050Y2 (ja) | 1986-02-18 | 1986-02-18 | 非接触検出装置における観察装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986021623U JP2512050Y2 (ja) | 1986-02-18 | 1986-02-18 | 非接触検出装置における観察装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62134016U true JPS62134016U (US06826419-20041130-M00005.png) | 1987-08-24 |
| JP2512050Y2 JP2512050Y2 (ja) | 1996-09-25 |
Family
ID=30818231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986021623U Expired - Lifetime JP2512050Y2 (ja) | 1986-02-18 | 1986-02-18 | 非接触検出装置における観察装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2512050Y2 (US06826419-20041130-M00005.png) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01182704A (ja) * | 1988-01-14 | 1989-07-20 | Matsushita Electric Ind Co Ltd | 溶接線検出装置 |
| JPWO2004040281A1 (ja) * | 2002-10-30 | 2006-03-02 | 凸版印刷株式会社 | 配線パターンの検査装置、検査方法、検出装置および検出方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5767844A (en) * | 1980-10-15 | 1982-04-24 | Nippon Kogaku Kk <Nikon> | Surface inspecting device |
| JPS57135306A (en) * | 1981-02-16 | 1982-08-20 | Toyo Kogaku Kogyo Kk | Measuring method of microsubstance |
| JPS59100805A (ja) * | 1982-12-01 | 1984-06-11 | Canon Inc | 物体観察装置 |
| JPS60186705A (ja) * | 1984-03-06 | 1985-09-24 | Agency Of Ind Science & Technol | 光学式粗さ計 |
-
1986
- 1986-02-18 JP JP1986021623U patent/JP2512050Y2/ja not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5767844A (en) * | 1980-10-15 | 1982-04-24 | Nippon Kogaku Kk <Nikon> | Surface inspecting device |
| JPS57135306A (en) * | 1981-02-16 | 1982-08-20 | Toyo Kogaku Kogyo Kk | Measuring method of microsubstance |
| JPS59100805A (ja) * | 1982-12-01 | 1984-06-11 | Canon Inc | 物体観察装置 |
| JPS60186705A (ja) * | 1984-03-06 | 1985-09-24 | Agency Of Ind Science & Technol | 光学式粗さ計 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01182704A (ja) * | 1988-01-14 | 1989-07-20 | Matsushita Electric Ind Co Ltd | 溶接線検出装置 |
| JPWO2004040281A1 (ja) * | 2002-10-30 | 2006-03-02 | 凸版印刷株式会社 | 配線パターンの検査装置、検査方法、検出装置および検出方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2512050Y2 (ja) | 1996-09-25 |
