JPS62133551U - - Google Patents

Info

Publication number
JPS62133551U
JPS62133551U JP1948986U JP1948986U JPS62133551U JP S62133551 U JPS62133551 U JP S62133551U JP 1948986 U JP1948986 U JP 1948986U JP 1948986 U JP1948986 U JP 1948986U JP S62133551 U JPS62133551 U JP S62133551U
Authority
JP
Japan
Prior art keywords
wafer
transport path
transported
guide member
tapered wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1948986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0530022Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1948986U priority Critical patent/JPH0530022Y2/ja
Publication of JPS62133551U publication Critical patent/JPS62133551U/ja
Application granted granted Critical
Publication of JPH0530022Y2 publication Critical patent/JPH0530022Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Registering Or Overturning Sheets (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Feeding Of Articles To Conveyors (AREA)
JP1948986U 1986-02-15 1986-02-15 Expired - Lifetime JPH0530022Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1948986U JPH0530022Y2 (enrdf_load_stackoverflow) 1986-02-15 1986-02-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1948986U JPH0530022Y2 (enrdf_load_stackoverflow) 1986-02-15 1986-02-15

Publications (2)

Publication Number Publication Date
JPS62133551U true JPS62133551U (enrdf_load_stackoverflow) 1987-08-22
JPH0530022Y2 JPH0530022Y2 (enrdf_load_stackoverflow) 1993-07-30

Family

ID=30814129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1948986U Expired - Lifetime JPH0530022Y2 (enrdf_load_stackoverflow) 1986-02-15 1986-02-15

Country Status (1)

Country Link
JP (1) JPH0530022Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0530022Y2 (enrdf_load_stackoverflow) 1993-07-30

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