JPS62130748A - Wear resistant water-cooled mold parts - Google Patents
Wear resistant water-cooled mold partsInfo
- Publication number
- JPS62130748A JPS62130748A JP26958885A JP26958885A JPS62130748A JP S62130748 A JPS62130748 A JP S62130748A JP 26958885 A JP26958885 A JP 26958885A JP 26958885 A JP26958885 A JP 26958885A JP S62130748 A JPS62130748 A JP S62130748A
- Authority
- JP
- Japan
- Prior art keywords
- water
- wear
- cooled
- cooled molded
- ceramics
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
- B22D11/00—Continuous casting of metals, i.e. casting in indefinite lengths
- B22D11/04—Continuous casting of metals, i.e. casting in indefinite lengths into open-ended moulds
- B22D11/059—Mould materials or platings
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Continuous Casting (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】
［発明の技術分野］
本発明は特に高純度高融点金属に使用するのに適した耐
摩耗性水冷モールド部品に関する。DETAILED DESCRIPTION OF THE INVENTION TECHNICAL FIELD OF THE INVENTION The present invention relates to wear-resistant water-cooled molded parts particularly suitable for use with high purity refractory metals.
し発明の技術的背景とその問題点］
電子ビーム溶解、アーク溶解などの水冷モールドに用い
られる水冷モールド部品としては従来から高熱伝導率を
確保するため無酸素銅（ＯＦＨＣ）のような銅で形成さ
れたものが使用されてきた。[Technical background of the invention and its problems] Water-cooled mold parts used in water-cooled molds such as electron beam melting and arc melting have traditionally been made of copper such as oxygen-free copper (OFHC) to ensure high thermal conductivity. have been used.
しかしながら銅で形成された水冷モールド部品は銅山体
が軟かいため摩耗損傷が大きく、部品寿命が短いと共に
、摩耗によって銅片が鋳造材料中に混入し、材料特性を
変化させる等の欠点がある。However, water-cooled molded parts made of copper have a soft copper body, which causes significant wear and tear, shortening the life of the part, and has disadvantages such as copper pieces getting mixed into the casting material due to wear and changing the material properties.
一方、例えば半導体用配線材料として用いられる高純度
Ｔｉのように高純度高融点金属を鋳造する場合には銅を
はじめとする他金属の汚染は厳密にコントロールする必
要がある。従ってこのような鋳造材料に銅製の水冷モー
ルド部品を用いると材料中に銅が混合汚染して優れた品
質のものが得られないと共に、水冷モールド部品も一回
毎に取替えて再加工する必要があり作業能率が悪い等の
欠点があった。On the other hand, when casting a high-purity, high-melting-point metal such as high-purity Ti used as a wiring material for semiconductors, contamination of other metals such as copper must be strictly controlled. Therefore, if water-cooled molded parts made of copper are used in such casting materials, the material will be contaminated with copper, making it impossible to obtain products of excellent quality, and the water-cooled molded parts will also need to be replaced and reprocessed each time. However, there were drawbacks such as poor work efficiency.
また銅表面を保護するためアルミナなどのセラミックス
コーティングを施す方法もあるが熱伝導率が低い材料を
用い、かつ０．３〜１關厚ざにコーティングしているた
め、セラミックスの断熱効果によって鋳肌の荒れたイン
ゴットとなったりセラミックスの剥離が生じるなど使用
に耐えられるものではなかった。There is also a method of applying a ceramic coating such as alumina to protect the copper surface, but since a material with low thermal conductivity is used and the coating is 0.3 to 1 inch thick, the heat insulating effect of the ceramic prevents the casting surface. The resulting ingots were rough and the ceramics peeled off, making them unusable.
［発明の目的］
本発明は以上のような問題点を解決するためになされた
もので、摩耗損傷が少なく、他金属の汚染のない高純度
高融点金属インゴットを得ることのできる耐摩耗性水冷
モールド部品を提供することを目的とする。[Object of the Invention] The present invention was made to solve the above-mentioned problems, and provides a wear-resistant water-cooled metal ingot that has less wear damage and is free from contamination with other metals. The purpose is to provide molded parts.
［発明の概要］
すなわち本発明の耐摩耗性水冷モールド部品は、少なく
とも鋳造材料との接触部が熱伝導率５０Ｗ／ｍ・Ｋ以上
のセラミックスで被覆されてなることを特徴とする。[Summary of the Invention] That is, the wear-resistant water-cooled molded part of the present invention is characterized in that at least the contact portion with the casting material is coated with a ceramic having a thermal conductivity of 50 W/m·K or more.
本発明にあける熱伝導率が５０Ｗ／ｍ・Ｋ以上のセラミ
ックスとしてはたとえばＴｉＣ１ＡβＮ１Ｓ ｉＣ，Ｂ
Ｎ、ＢｅＯ等が上げられる。Examples of ceramics with a thermal conductivity of 50 W/m・K or more according to the present invention include TiC1AβN1S iC,B
Examples include N, BeO, etc.
またセラミックスコーティングの方法としてはイオンブ
レーティング法がめげられ、このセラミックスコーティ
ングの被膜厚は１〜１０μｍが好ましく、特に２μｍ程
度が好ましい。被膜厚が１μｍ以下では摩耗によって素
材が露出することがおり、１０μｍ以上ではセラミック
スが剥離することがあるからである。セラミックスコー
ティングすべき場所は水冷モールド部品中の少なくとも
鋳造材料が接触する部分、例えば溶湯プール部、インゴ
ット形成部等に行なう。Further, as a method of ceramic coating, an ion-blating method is recommended, and the thickness of the ceramic coating is preferably 1 to 10 μm, particularly preferably about 2 μm. This is because if the coating thickness is 1 μm or less, the material may be exposed due to wear, and if the coating thickness is 10 μm or more, the ceramic may peel off. Ceramic coating is applied to at least the parts of the water-cooled molded part that come into contact with the casting material, such as the molten metal pool, the ingot forming part, and the like.
なお本発明の耐摩耗性水冷モールド部品は電子ビーム溶
解モールド、真空アーク溶解モールド、各種蒸着用モー
ルド等に適用することができる。The wear-resistant water-cooled molded parts of the present invention can be applied to electron beam melting molds, vacuum arc melting molds, various vapor deposition molds, and the like.
［発明の実施例］ 次に本発明を実施例によって説明する。[Embodiments of the invention] Next, the present invention will be explained by examples.
実施例
第１図は本発明の一実施例である水冷モールド部品を概
略的に示すものである。Embodiment FIG. 1 schematically shows a water-cooled molded part which is an embodiment of the present invention.
図中符号１は０ＦＨＣ製水冷モ一ルド部品、２はセラミ
ックスコーティング部、３は強制冷却用ガイドでおる。In the figure, numeral 1 is a water-cooled molded part made of 0FHC, 2 is a ceramic coating part, and 3 is a forced cooling guide.
溶湯金属４はこの水冷モールド部品中に注入されるとこ
の中の循環冷却水５によって冷却されて凝固し、インゴ
ット６となる。形成されたインゴット６は底板７を下降
させることによって徐々に引き下げられると共に、順次
溶湯金属が注入され連続鋳造される。When the molten metal 4 is injected into the water-cooled molded part, it is cooled by the circulating cooling water 5 therein and solidified to form an ingot 6. The formed ingot 6 is gradually lowered by lowering the bottom plate 7, and molten metal is successively poured into the ingot 6 for continuous casting.
セラミックスコーティングは例えば次のようにして行な
うことができる。Ceramic coating can be performed, for example, as follows.
ずなわち炭素含有雰囲気中、約４５０℃で反応性イオン
ブレーティング法によって０ＦＨＣ製水冷モ一ルド部品
上にＴ１を蒸着させ、厚さ１．５〜２μｍのＴｉＣ膜を
コーティングする。このＴｉＣ層は熱解析によると熱伝
導率が約６７Ｗ／ｍ・Ｋであり、アルミナの約３倍であ
った。That is, T1 is vapor-deposited on a water-cooled molded part made of 0FHC at about 450° C. in a carbon-containing atmosphere by a reactive ion blating method to coat a TiC film with a thickness of 1.5 to 2 μm. According to thermal analysis, this TiC layer had a thermal conductivity of about 67 W/m·K, which was about three times that of alumina.
このようにしてセラミックスコーティングした水冷モー
ルド部品を用いて連続鋳造を行なったところ、その温度
勾配は第２図に示すようになった。When continuous casting was carried out using the water-cooled molded parts coated with ceramics in this manner, the temperature gradient was as shown in FIG.
図中、ａは０ＦＨＣ単独で構成された水冷モールド部品
を用いた場合、ｂは本発明のセラミックスコーティング
を施した水冷モールド部品を用いた場合の温度勾配を示
している。第２図かられかるよ５に本発明の耐摩耗性水
冷モールド部品はセラミックスコーティングせず０ＦＨ
Ｃ単独で構成されたものとほとんど変わらぬ温度分布を
示している。このため製造されたインゴットの鋳肌は鋳
造後半期であっても初期と変わらず良好であると共にコ
ーテイング材がはがれることもなかった。また耐摩耗性
も優れており、連続鋳造を繰返してもコーテイング材が
摩耗することがなく、このためセラミックスコーティン
グによって水冷モールド部品を１０数回使用することが
可能となり耐久性が大巾に向上した。In the figure, a shows the temperature gradient when a water-cooled molded part made of 0FHC alone is used, and b shows the temperature gradient when a water-cooled molded part coated with the ceramic coating of the present invention is used. From Figure 2, the wear-resistant water-cooled molded parts of the present invention are 0FH without ceramic coating.
It shows a temperature distribution that is almost the same as that composed of C alone. Therefore, the cast surface of the manufactured ingot was as good as the initial stage even in the latter half of casting, and the coating material did not peel off. It also has excellent wear resistance, and the coating material does not wear out even when continuous casting is repeated, making it possible to use water-cooled molded parts more than 10 times with ceramic coating, greatly improving durability. .
一方、比較例として厚さ０．８ｍｍのアルミナをコーテ
ィングした水冷モールド部品を用いて連続鋳造を行なっ
た場合は第３図のｂに示すような温度勾配となった。On the other hand, when continuous casting was carried out using a water-cooled molded part coated with alumina having a thickness of 0.8 mm as a comparative example, a temperature gradient as shown in FIG. 3b was obtained.
なお図中ａＩ、ｔＯＦ）−１０単独で構成された水冷モ
ールド部品を用いた場合の温度勾配を示している。Note that the figure shows the temperature gradient when a water-cooled molded part composed of aI, tOF)-10 alone is used.
図かられかるようにセラミックスコーティング部は断熱
的に作用しており、このためセラミックスにクラックが
生じて剥離しなり、鋳肌が荒れるなどの好ましくない結
果となった。As can be seen from the figure, the ceramic coating part acts as a heat insulator, and as a result, cracks occur in the ceramic, causing it to peel off, resulting in unfavorable results such as rough casting surfaces.
［発明の効果］
以上説明したように本発明の耐摩耗性水冷モールド部品
は鋳造材料との接触部が耐摩耗性で高熱伝導性のセラミ
ックスで薄く被覆されているので摩耗しにくく、特に銅
の混入汚染を排除しなければならない高純度高融点金属
に使用するのに適していると共に、耐久性が大巾に向上
するので操業効率の改善を図ることができる。[Effects of the Invention] As explained above, the wear-resistant water-cooled molded parts of the present invention are hard to wear because the contact area with the casting material is thinly coated with wear-resistant and highly thermally conductive ceramics. It is suitable for use with high-purity, high-melting-point metals that must be free from contamination, and its durability can be greatly improved, making it possible to improve operational efficiency.
第１図は本発明の一実施例を概略的に示す断面図、第２
図は本発明による水冷モールド部品の場合と０ＦＨＣ単
独で構成された水冷モールド部品の場合の温度勾配を示
す図、第３図は従来のセラミックスコーティングを施し
た水冷モールド部品の場合と０ＦＨＣ単独で構成された
水冷モールド部品の場合の温度勾配を示す図である。
１・・・・・・・・・０ＦＨＣ製水冷モ一ルド部品２・
・・・・・・・・セラミックスコーティング部３・・・
・・・・・・強制冷却用ガイド４・・・・・・・・・溶
湯金属
５・・・・・・・・・循環冷却水
６・・・・・・・・・インゴット
７・・・・・・・・・底 板FIG. 1 is a sectional view schematically showing one embodiment of the present invention, and FIG.
The figure shows the temperature gradient in the case of a water-cooled molded part according to the present invention and in the case of a water-cooled molded part composed of only 0FHC. Figure 3 shows the case of a water-cooled molded part with a conventional ceramic coating and a case of a water-cooled molded part composed of only 0FHC. FIG. 3 is a diagram showing a temperature gradient in the case of a water-cooled molded part. 1...0FHC water-cooled molded parts 2.
...Ceramics coating part 3...
... Forced cooling guide 4 ... Molten metal 5 ... Circulating cooling water 6 ... Ingot 7 ... ······Bottom plate
Claims (3)
／ｍ・Ｋ以上のセラミックスで被覆されてなることを特
徴とする耐摩耗性水冷モールド部品。(1) At least the contact part with the casting material has a thermal conductivity of 50W
A wear-resistant water-cooled molded part characterized by being coated with ceramics having a hardness of /m·K or more.
である特許請求の範囲第１項記載の耐摩耗性水冷モール
ド部品。(2) The thickness of the ceramic coating is 1 to 10 μm
A wear-resistant water-cooled molded part according to claim 1.
ＢｅＯよりなる群から選択されたものである特許請求の
範囲第１項記載の耐摩耗性水冷モールド部品。(3) Ceramics include TiC, AlN, SiC, BN,
A wear-resistant water-cooled molded part according to claim 1, which is selected from the group consisting of BeO.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26958885A JPS62130748A (en) | 1985-11-29 | 1985-11-29 | Wear resistant water-cooled mold parts |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26958885A JPS62130748A (en) | 1985-11-29 | 1985-11-29 | Wear resistant water-cooled mold parts |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62130748A true JPS62130748A (en) | 1987-06-13 |
Family
ID=17474447
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26958885A Pending JPS62130748A (en) | 1985-11-29 | 1985-11-29 | Wear resistant water-cooled mold parts |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62130748A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000007752A1 (en) * | 1998-08-06 | 2000-02-17 | Ag Industries, Inc. | An improved continuous casting mold system and related processes |
| CN107921517A (en) * | 2015-08-31 | 2018-04-17 | 株式会社神户制钢所 | Epithelium, hot forming mould and thermo shaping method |
-
1985
- 1985-11-29 JP JP26958885A patent/JPS62130748A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000007752A1 (en) * | 1998-08-06 | 2000-02-17 | Ag Industries, Inc. | An improved continuous casting mold system and related processes |
| CN107921517A (en) * | 2015-08-31 | 2018-04-17 | 株式会社神户制钢所 | Epithelium, hot forming mould and thermo shaping method |
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