JPS6212942U - - Google Patents

Info

Publication number
JPS6212942U
JPS6212942U JP1985022449U JP2244985U JPS6212942U JP S6212942 U JPS6212942 U JP S6212942U JP 1985022449 U JP1985022449 U JP 1985022449U JP 2244985 U JP2244985 U JP 2244985U JP S6212942 U JPS6212942 U JP S6212942U
Authority
JP
Japan
Prior art keywords
sample
vertical movement
electron beam
correction device
position correction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1985022449U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985022449U priority Critical patent/JPS6212942U/ja
Publication of JPS6212942U publication Critical patent/JPS6212942U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP1985022449U 1985-02-19 1985-02-19 Pending JPS6212942U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985022449U JPS6212942U (enExample) 1985-02-19 1985-02-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985022449U JPS6212942U (enExample) 1985-02-19 1985-02-19

Publications (1)

Publication Number Publication Date
JPS6212942U true JPS6212942U (enExample) 1987-01-26

Family

ID=30819841

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985022449U Pending JPS6212942U (enExample) 1985-02-19 1985-02-19

Country Status (1)

Country Link
JP (1) JPS6212942U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01268122A (ja) * 1988-04-20 1989-10-25 Fujitsu Ltd 電子ビーム露光装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01268122A (ja) * 1988-04-20 1989-10-25 Fujitsu Ltd 電子ビーム露光装置

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