JPS62129057U - - Google Patents
Info
- Publication number
- JPS62129057U JPS62129057U JP1776686U JP1776686U JPS62129057U JP S62129057 U JPS62129057 U JP S62129057U JP 1776686 U JP1776686 U JP 1776686U JP 1776686 U JP1776686 U JP 1776686U JP S62129057 U JPS62129057 U JP S62129057U
- Authority
- JP
- Japan
- Prior art keywords
- thermocouple
- coil
- tip
- hearth
- insertion hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000137 annealing Methods 0.000 claims description 2
- 230000037431 insertion Effects 0.000 claims description 2
- 238000003780 insertion Methods 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1776686U JPH0437894Y2 (enExample) | 1986-02-10 | 1986-02-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1776686U JPH0437894Y2 (enExample) | 1986-02-10 | 1986-02-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62129057U true JPS62129057U (enExample) | 1987-08-15 |
| JPH0437894Y2 JPH0437894Y2 (enExample) | 1992-09-04 |
Family
ID=30810818
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1776686U Expired JPH0437894Y2 (enExample) | 1986-02-10 | 1986-02-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0437894Y2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4905290B2 (ja) * | 2007-08-09 | 2012-03-28 | 住友電気工業株式会社 | 半導体製造装置用測温装置及びそれを搭載した半導体製造装置 |
-
1986
- 1986-02-10 JP JP1776686U patent/JPH0437894Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0437894Y2 (enExample) | 1992-09-04 |