JPS62128635U - - Google Patents

Info

Publication number
JPS62128635U
JPS62128635U JP1657186U JP1657186U JPS62128635U JP S62128635 U JPS62128635 U JP S62128635U JP 1657186 U JP1657186 U JP 1657186U JP 1657186 U JP1657186 U JP 1657186U JP S62128635 U JPS62128635 U JP S62128635U
Authority
JP
Japan
Prior art keywords
chuck structure
base plate
wafer
circular base
support rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1657186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1657186U priority Critical patent/JPS62128635U/ja
Publication of JPS62128635U publication Critical patent/JPS62128635U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Weting (AREA)
JP1657186U 1986-02-06 1986-02-06 Pending JPS62128635U (US20050075337A1-20050407-C00081.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1657186U JPS62128635U (US20050075337A1-20050407-C00081.png) 1986-02-06 1986-02-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1657186U JPS62128635U (US20050075337A1-20050407-C00081.png) 1986-02-06 1986-02-06

Publications (1)

Publication Number Publication Date
JPS62128635U true JPS62128635U (US20050075337A1-20050407-C00081.png) 1987-08-14

Family

ID=30808549

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1657186U Pending JPS62128635U (US20050075337A1-20050407-C00081.png) 1986-02-06 1986-02-06

Country Status (1)

Country Link
JP (1) JPS62128635U (US20050075337A1-20050407-C00081.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6077425A (ja) * 1983-10-04 1985-05-02 Seiko Epson Corp 半導体製造装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6077425A (ja) * 1983-10-04 1985-05-02 Seiko Epson Corp 半導体製造装置

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