JPS62128498A - Static charge elimination of synthetic resin pipe - Google Patents
Static charge elimination of synthetic resin pipeInfo
- Publication number
- JPS62128498A JPS62128498A JP26879285A JP26879285A JPS62128498A JP S62128498 A JPS62128498 A JP S62128498A JP 26879285 A JP26879285 A JP 26879285A JP 26879285 A JP26879285 A JP 26879285A JP S62128498 A JPS62128498 A JP S62128498A
- Authority
- JP
- Japan
- Prior art keywords
- synthetic resin
- ultrapure water
- static electricity
- pipe
- resin pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は合成樹脂管を使用した配管において、管内の流
体中に発生した静電気を除去する方法に関し、特にＬＳ
Ｉ等の製造に使用される超純水の配管等に適用して好適
なものである。Detailed Description of the Invention [Field of Industrial Application] The present invention relates to a method for removing static electricity generated in a fluid in a pipe using a synthetic resin pipe, and in particular to a method for removing static electricity generated in a fluid in a pipe using a synthetic resin pipe.
It is suitable for application to ultrapure water piping used in the production of I, etc.
従来、ＬＳＩの製造に使用される超純水の配管には硬質
塩化ビニル管のような合成樹脂管が使用される。超純水
の配管に合成樹脂管が使用される理由は管の内面が平滑
であるため、細菌の発生を防止し、超純水を輸送するの
に好都合であるからである。Conventionally, synthetic resin pipes such as hard vinyl chloride pipes have been used for ultrapure water piping used in LSI manufacturing. The reason why synthetic resin pipes are used for ultrapure water piping is that the inner surface of the pipes is smooth, which prevents the generation of bacteria and is convenient for transporting ultrapure water.
しかしながら、超純水そのものが導電性を殆ど有しない
ものであるうえ、合成樹脂管は帯電し易い為、管内の超
純水と管壁との間の摩擦により帯電し、種々の障害を引
き起こすことになる。例えば、帯電した水をＬＳＩの洗
浄に使用した場合は、静電気により微粉体、微粒子が吸
引される結果、これらの微粉体、微粒子がＬＳＩに付着
したり、静電気の放電によりＬＳＩが破壊されたりする
欠点がある。However, ultrapure water itself has almost no conductivity, and synthetic resin pipes are easily charged, so friction between the ultrapure water inside the pipe and the pipe wall can cause charging, which can cause various problems. become. For example, when charged water is used to clean LSIs, static electricity attracts fine powders and particles, which may adhere to the LSIs or destroy the LSIs due to discharge of static electricity. There are drawbacks.
本発明は上記の問題点に鑑み、合成樹脂管からなる配管
に発生する静電気を除去する方法に関しその要旨は、合
成樹脂管を使用した配管において、管内の流体中に、先
端が接地された導線と接続された、導電性物質からなる
導電体を介在させることを特徴とする合成樹脂配管の静
電気除去方法に存する。In view of the above-mentioned problems, the present invention relates to a method for removing static electricity generated in piping made of synthetic resin pipes. The present invention relates to a method for removing static electricity from synthetic resin piping, characterized by intervening a conductor made of a conductive material, which is connected to a conductor.
以下、本発明方法を図示の実施例に基づいて説明する。The method of the present invention will be explained below based on the illustrated embodiments.
第１図は本発明の実施Ｂ様を示す説明図であり、図にお
いて、ｌは硬質塩化ビニル樹脂等の合成樹脂からなる管
である。２は管路上に設けられた限外濾過膜装置等から
なる超純水製造装置であり管１内を水が矢印方向に流れ
て超純水製造装置２に流入され、超純水製造装置２によ
り製造された超純水が管１により輸送され、管１の延長
上において使用領域３に至るようになっている。FIG. 1 is an explanatory diagram showing embodiment B of the present invention, and in the diagram, l is a tube made of synthetic resin such as hard vinyl chloride resin. Reference numeral 2 denotes an ultrapure water production device consisting of an ultrafiltration membrane device etc. installed on a pipe.Water flows in the direction of the arrow in the pipe 1 and flows into the ultrapure water production device 2. The ultrapure water produced is transported by a pipe 1 and reaches a usage area 3 on the extension of the pipe 1.
使用領域３では、例えば、ＬＳＩ製造工程中において、
管ｌから複数個のバルブ４．４・・が枝別れして設けら
れ、バルブ４．４・・の蛇口から噴出する超純水がＬＳ
Ｉの洗浄に使用されるようになっている。In usage area 3, for example, during the LSI manufacturing process,
A plurality of valves 4.4... are provided branching off from the pipe 1, and the ultrapure water spouted from the faucet of the valve 4.4... is LS.
It is now used for cleaning I.
洗浄に使用された超純水は水槽５．５・・に受けられた
後、管１により輸送され、廃棄されるか、又は再使用に
供せられる。The ultrapure water used for cleaning is received in water tanks 5, 5, .
６．６・・は超純水製造装置２の直後の管路上に設けら
れた静電気除去装置であり、詳細は第２図に示されてい
る。6.6 is a static electricity removal device installed on the pipe immediately after the ultrapure water production device 2, and the details are shown in FIG. 2.
第２図において、６１は管１，１の間に設けられたＴ壁
継手であり、管１と同様に硬質塩化ビニル樹脂等の合成
樹脂で製されている。Ｔ型継手６１の双方の受口内に管
１．１が挿入接合されている。In FIG. 2, 61 is a T-wall joint provided between the pipes 1, 1, and like the pipe 1, it is made of synthetic resin such as hard vinyl chloride resin. The tubes 1.1 are inserted and connected into both sockets of the T-shaped joint 61.
Ｔ型継手６１の分岐管部に閉塞板６２が嵌入接着され、
閉塞板６２°の中心に穿設された孔に金属取付棒６３が
挿入され、金属取付棒６３の先端にステンレススティー
ルのような金属からなる導電体６４が一体に設けられ、
導電体６４は管路内に曝されている。A closing plate 62 is fitted and adhered to the branch pipe portion of the T-shaped joint 61,
A metal mounting rod 63 is inserted into a hole drilled in the center of the closing plate 62°, and a conductor 64 made of metal such as stainless steel is integrally provided at the tip of the metal mounting rod 63.
The conductor 64 is exposed within the conduit.
尚、６５は取付棒６３に接続されたリードワイヤーであ
り、リードワイヤー６５の先端は、第１図に示すように
、接地されている。Note that 65 is a lead wire connected to the mounting rod 63, and the tip of the lead wire 65 is grounded as shown in FIG.
第１図において、７はバルブ４．４ ・・の蛇口に設け
られた静電気除去装置であり、第３図にやや拡大して示
すように、蛇口に取りつけられた環体に金属取付棒６３
が取付けられ、その先端に導電体６４が取りつけられて
いる。取付棒６３にはリードワイヤー６５が接続され、
リードワイヤー６５の先端は接地されている。In Fig. 1, 7 is a static electricity eliminator installed in the faucet of the valve 4.4.
is attached, and a conductor 64 is attached to its tip. A lead wire 65 is connected to the mounting rod 63,
The tip of the lead wire 65 is grounded.
第４図には、導電体６４の例が示され、第４図（ａ）に
示すものは、環体の中に金属線が蜘蛛の巣状に張り巡ら
されたものであり、（ｂｌに示すものは、環体の中に金
属線がネット状に張り巡らされたものであり、これらの
金属線を使用したものは、金属線の間を流体が通過する
ようになっている。金属線は流体の流動抵抗をできるだ
け減少するために細いものが望ましく、又、管１内を流
動する超純水の各部分の静電気を除去するために金属線
間の間隔は短い方がよい。（Ｃ）に示すものは、単なる
棒状のものである。An example of the conductor 64 is shown in FIG. 4, and the one shown in FIG. The one shown is a ring with metal wires stretched around it like a net, and those using these metal wires allow fluid to pass between the metal wires.Metal wire It is desirable that the metal wires be thin in order to reduce the flow resistance of the fluid as much as possible, and the distance between the metal wires should be short in order to eliminate static electricity in each part of the ultrapure water flowing in the tube 1. (C ) are simply rod-shaped.
以上のような装置による本発明方法実施の態様を説明す
ると、管ｌ内の水は超純水製造装置により超純水となさ
れ、次いで、管１内を流動する間に管１の内壁との摩擦
により超純水に静電気が発生しても静電気除去装置６．
６、・・内を通過することにより、超純水中の静電気は
導電体６４と接触することにより放電され除去される。To explain the embodiment of the method of the present invention using the above-mentioned device, water in the tube 1 is made into ultrapure water by the ultrapure water production device, and then, while flowing in the tube 1, the water is made into ultrapure water, and then, while flowing in the tube 1, the water is made into ultrapure water. Even if static electricity is generated in ultrapure water due to friction, the static electricity remover 6.
6, . . ., the static electricity in the ultrapure water is discharged and removed by contacting the conductor 64.
次いで、バルブ４．４、・・の蛇口から流出する際にも
、超純水は静電気除去装置７の導電体６４と接触するこ
とにより放電され除去される。使用領域３において帯電
しない超純水が使用される。Then, when the ultrapure water flows out from the faucets of the valves 4.4, . In the usage area 3, ultrapure water that is not charged is used.
本発明においては、管内の流体中に導電体を介在させた
ので、流体中の静電気は放電除去される。In the present invention, since a conductor is interposed in the fluid within the tube, static electricity in the fluid is discharged and removed.
従って、本発明方法は、例えばＬＳＩの製造に使用され
る超純水を輸送する合成樹脂配管に使用して好適である
。Therefore, the method of the present invention is suitable for use in synthetic resin piping that transports ultrapure water used, for example, in the manufacture of LSIs.
図面の説明
第１図は本発明の１実施態様を示す説明図、第２図は配
管中の静電気除去装置を拡大して示す断面図、第３図は
バルブの蛇口における静電気除去装置を示す一部切欠正
面図、第４図、（ａ） （ｂ） （Ｃ）はそれぞれ導電
体の異なる例を示す正面図である。Description of the Drawings Fig. 1 is an explanatory drawing showing one embodiment of the present invention, Fig. 2 is an enlarged sectional view showing a static electricity eliminator in piping, and Fig. 3 is an illustration showing a static electricity eliminator in a valve faucet. FIGS. 4A, 4B, and 4C are front views showing different examples of conductors, respectively.
Claims (1)
に、先端が接地された導線と接続された、導電性物質か
らなる導電体を介在させることを特徴とする合成樹脂配
管の静電気除去方法1. A method for removing static electricity from synthetic resin piping, which is characterized by interposing a conductor made of a conductive substance connected to a conductive wire whose tip is grounded in the fluid inside the pipe, in the piping using synthetic resin pipes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26879285A JPS62128498A (en) | 1985-11-28 | 1985-11-28 | Static charge elimination of synthetic resin pipe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26879285A JPS62128498A (en) | 1985-11-28 | 1985-11-28 | Static charge elimination of synthetic resin pipe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62128498A true JPS62128498A (en) | 1987-06-10 |
Family
ID=17463334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26879285A Pending JPS62128498A (en) | 1985-11-28 | 1985-11-28 | Static charge elimination of synthetic resin pipe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62128498A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06295793A (en) * | 1993-04-09 | 1994-10-21 | Alps Electric Co Ltd | Static eliminating method and static eliminator for liquid having high specific resistance |
| JP2008115899A (en) * | 2006-11-01 | 2008-05-22 | Tokyo Electron Ltd | Diaphragm valve and substrate treatment device |
| JP2012030842A (en) * | 2010-07-30 | 2012-02-16 | Suntory Holdings Ltd | Method and device for removing electric charge of resin-made container |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5333187B2 (en) * | 1975-07-25 | 1978-09-12 |
-
1985
- 1985-11-28 JP JP26879285A patent/JPS62128498A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5333187B2 (en) * | 1975-07-25 | 1978-09-12 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06295793A (en) * | 1993-04-09 | 1994-10-21 | Alps Electric Co Ltd | Static eliminating method and static eliminator for liquid having high specific resistance |
| JP2008115899A (en) * | 2006-11-01 | 2008-05-22 | Tokyo Electron Ltd | Diaphragm valve and substrate treatment device |
| JP2012030842A (en) * | 2010-07-30 | 2012-02-16 | Suntory Holdings Ltd | Method and device for removing electric charge of resin-made container |
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